FR2309860A1 - ROTARY COMPENSATOR ELLIPSOMETER - Google Patents

ROTARY COMPENSATOR ELLIPSOMETER

Info

Publication number
FR2309860A1
FR2309860A1 FR7605148A FR7605148A FR2309860A1 FR 2309860 A1 FR2309860 A1 FR 2309860A1 FR 7605148 A FR7605148 A FR 7605148A FR 7605148 A FR7605148 A FR 7605148A FR 2309860 A1 FR2309860 A1 FR 2309860A1
Authority
FR
France
Prior art keywords
rotary compensator
compensator ellipsometer
ellipsometer
rotary
compensator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7605148A
Other languages
French (fr)
Other versions
FR2309860B1 (en
Inventor
Frederick H Dill
Peter S Hauge
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/572,476 external-priority patent/US4053232A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2309860A1 publication Critical patent/FR2309860A1/en
Application granted granted Critical
Publication of FR2309860B1 publication Critical patent/FR2309860B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
FR7605148A 1975-04-28 1976-02-17 ROTARY COMPENSATOR ELLIPSOMETER Granted FR2309860A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/572,476 US4053232A (en) 1973-06-25 1975-04-28 Rotating-compensator ellipsometer

Publications (2)

Publication Number Publication Date
FR2309860A1 true FR2309860A1 (en) 1976-11-26
FR2309860B1 FR2309860B1 (en) 1979-04-20

Family

ID=24287979

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7605148A Granted FR2309860A1 (en) 1975-04-28 1976-02-17 ROTARY COMPENSATOR ELLIPSOMETER

Country Status (8)

Country Link
JP (1) JPS6042901B2 (en)
BE (1) BE839043A (en)
CA (1) CA1048806A (en)
DE (1) DE2616141A1 (en)
FR (1) FR2309860A1 (en)
GB (1) GB1493087A (en)
IT (1) IT1064176B (en)
NL (1) NL7603931A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526471A (en) * 1982-06-17 1985-07-02 Bykov Anatoly P Method for sensing spatial coordinate of article point and apparatus therefor
JPS5930004A (en) * 1982-08-09 1984-02-17 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン Measuring device for film thickness
JPS59182324A (en) * 1983-03-31 1984-10-17 Horiba Ltd Polarimeter
GB2153071A (en) * 1984-01-16 1985-08-14 Barringer Research Ltd Method and apparatus for detecting hydrocarbons on the surface of water
JPH0820358B2 (en) * 1986-03-03 1996-03-04 オリンパス光学工業株式会社 Device for measuring the refractive index of a substrate for an optical recording medium
DE3708148A1 (en) * 1987-03-11 1987-10-15 Michael Linder Method and device for ellipsometric measurement
JPS6428509A (en) * 1987-07-23 1989-01-31 Nippon Kokan Kk Apparatus for measuring thickness of film
DE19805853B4 (en) * 1997-03-25 2004-03-11 Schmekel, Björn Method and device for measuring the refractive index and / or the light beam angle at a medium boundary
KR101991217B1 (en) * 2011-07-07 2019-06-19 케이엘에이-텐코 코포레이션 Multi-analyzer angle spectroscopic ellipsometry

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1422426A (en) * 1973-06-22 1976-01-28 Penny Turbines Ltd Noel Compressor rotor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
ARTICLE DE P.S.HAUGE ET F.H.DILL "A ROTATING-COMPENSATOR FOURIER ELLIPSOMETER" DANS "OPTICS COMMUNICATIONS" VOLUME 14, NO. 4, AOUT 1975, PAGES 431 A 437) *

Also Published As

Publication number Publication date
NL7603931A (en) 1976-11-01
IT1064176B (en) 1985-02-18
FR2309860B1 (en) 1979-04-20
DE2616141A1 (en) 1976-11-11
GB1493087A (en) 1977-11-23
JPS6042901B2 (en) 1985-09-25
CA1048806A (en) 1979-02-20
JPS51131655A (en) 1976-11-16
BE839043A (en) 1976-06-16

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Legal Events

Date Code Title Description
ST Notification of lapse