NL7603931A - ELLIPSOMETER. - Google Patents

ELLIPSOMETER.

Info

Publication number
NL7603931A
NL7603931A NL7603931A NL7603931A NL7603931A NL 7603931 A NL7603931 A NL 7603931A NL 7603931 A NL7603931 A NL 7603931A NL 7603931 A NL7603931 A NL 7603931A NL 7603931 A NL7603931 A NL 7603931A
Authority
NL
Netherlands
Prior art keywords
ellipsometer
Prior art date
Application number
NL7603931A
Other languages
Dutch (nl)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/572,476 external-priority patent/US4053232A/en
Application filed by Ibm filed Critical Ibm
Publication of NL7603931A publication Critical patent/NL7603931A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
NL7603931A 1975-04-28 1976-04-14 ELLIPSOMETER. NL7603931A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/572,476 US4053232A (en) 1973-06-25 1975-04-28 Rotating-compensator ellipsometer

Publications (1)

Publication Number Publication Date
NL7603931A true NL7603931A (en) 1976-11-01

Family

ID=24287979

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7603931A NL7603931A (en) 1975-04-28 1976-04-14 ELLIPSOMETER.

Country Status (8)

Country Link
JP (1) JPS6042901B2 (en)
BE (1) BE839043A (en)
CA (1) CA1048806A (en)
DE (1) DE2616141A1 (en)
FR (1) FR2309860A1 (en)
GB (1) GB1493087A (en)
IT (1) IT1064176B (en)
NL (1) NL7603931A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4526471A (en) * 1982-06-17 1985-07-02 Bykov Anatoly P Method for sensing spatial coordinate of article point and apparatus therefor
JPS5930004A (en) * 1982-08-09 1984-02-17 インタ−ナシヨナル　ビジネス　マシ−ンズ　コ−ポレ−シヨン Measuring device for film thickness
JPS59182324A (en) * 1983-03-31 1984-10-17 Horiba Ltd Polarimeter
NO850157L (en) * 1984-01-16 1985-10-23 Barringer Research Ltd PROCEDURE AND APPARATUS FOR DETERMINING HYDROCARBONES ON A WATER SURFACE.
JPH0820358B2 (en) * 1986-03-03 1996-03-04 オリンパス光学工業株式会社 Device for measuring the refractive index of a substrate for an optical recording medium
DE3708148A1 (en) * 1987-03-11 1987-10-15 Michael Linder Method and device for ellipsometric measurement
JPS6428509A (en) * 1987-07-23 1989-01-31 Nippon Kokan Kk Apparatus for measuring thickness of film
DE19805853B4 (en) * 1997-03-25 2004-03-11 Schmekel, Björn Method and device for measuring the refractive index and / or the light beam angle at a medium boundary
US9046474B2 (en) * 2011-07-07 2015-06-02 Kla-Tencor Corporation Multi-analyzer angle spectroscopic ellipsometry

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1422426A (en) * 1973-06-22 1976-01-28 Penny Turbines Ltd Noel Compressor rotor

Also Published As

Publication number Publication date
FR2309860A1 (en) 1976-11-26
DE2616141A1 (en) 1976-11-11
FR2309860B1 (en) 1979-04-20
GB1493087A (en) 1977-11-23
JPS6042901B2 (en) 1985-09-25
BE839043A (en) 1976-06-16
IT1064176B (en) 1985-02-18
CA1048806A (en) 1979-02-20
JPS51131655A (en) 1976-11-16

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