JPS6042883A - Gas laser oscillator - Google Patents
Gas laser oscillatorInfo
- Publication number
- JPS6042883A JPS6042883A JP15015283A JP15015283A JPS6042883A JP S6042883 A JPS6042883 A JP S6042883A JP 15015283 A JP15015283 A JP 15015283A JP 15015283 A JP15015283 A JP 15015283A JP S6042883 A JPS6042883 A JP S6042883A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- straight pipe
- tube
- gas flow
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】 本発明はガス・レーザ発信器に関する。[Detailed description of the invention] The present invention relates to gas laser oscillators.
ガス・レーザは気体放電によってプラズマをつくり、そ
の内部で各種の衝突を行って反転分布を達成するもので
ある。Gas lasers create plasma by gas discharge, and perform various collisions within the plasma to achieve population inversion.
Ｈｅ−Ｎｅガス・レーザ及び炭酸ガス・レーザ等がある
。Examples include He-Ne gas laser and carbon dioxide laser.
本発明では特に炭酸ガス・レーザについてのものである
。The present invention is particularly concerned with carbon dioxide lasers.
炭酸ガス・レーザは００２分子の振動と回転に基づ（エ
ネルギ単位の間の遷移を用い、波長１０．６μ９出力を
得るレーザである。The carbon dioxide laser is based on the vibration and rotation of the 002 molecule (using transitions between energy units) and produces an output at a wavelength of 10.6 μ9.
ＣＯ２ガス・レーザはこのガス温度を下げるほど反転分
布と利得が増すので、普通はウォータ・ジャケットを用
いて冷却水を流しっ＼使用される。CO2 gas lasers are generally used with cooling water flowing through them using a water jacket, since the population inversion and gain increase as the gas temperature is lowered.
更にＨｅを加えて、ＣＯ２Ｎ２ ＨｅとするとＨｅの冷
却作用によって％ ＣＯ２ガスの温度上昇が防止される
ので能率が向上する。Furthermore, when He is added to form CO2N2 He, the cooling effect of He prevents the temperature of the CO2 gas from rising, improving efficiency.
レーザ管では放電中００２がｃｏと０とに分解し％Ｎ２
が上記０と結合しＮ２０となったりするため、封じ切り
管によっては長時間安定な動作を得ることはできないの
で、ある程度以上の高出方装置に対しては、一定量の新
鮮なガスを常時流して使用するガス・フロ一式が用いら
れる。In the laser tube, 002 decomposes into co and 0 during discharge and becomes %N2.
may combine with the above 0 to form N20, making it impossible to obtain stable operation over a long period of time depending on the sealed tube. A gas flow set is used.
例えば、第１図に従来のガス・フロ一式ｃｏ２Ｎ２ Ｈ
ｅガス・レーザ発振器の一部数断説明図として示すよう
なものがあり、この図面により従来技術の詳細を具体的
に説明する。For example, Fig. 1 shows a conventional gas flow set co2N2H
There is a partially cutaway explanatory diagram of an e-gas laser oscillator, and the details of the prior art will be specifically explained with reference to this diagram.
第１図中、１は直管１ａとウォータ・ジ中ケソト１ｂと
から成るガラス製のレーザ管、２はガス導入口、３はガ
ス吸引口、４は冷却水の給水口、５は冷却水の排水口、
６及び７は陽極及び陰極のリング状の電極、８及び９は
反射鏡、１ｏ及び１１は反射鏡８の固定板、１２及び１
３は反射鏡９の調整板１４．１４は調整ねじ、１５は０
リング、１６はＫＣ１単結晶板の出力取出窓、１７はＣ
Ｏ２−Ｎ２−１（ｅ混合ガスが充填されたガスボンベ、
１８は減圧パルプ。In Fig. 1, 1 is a glass laser tube consisting of a straight pipe 1a and a water pipe 1b, 2 is a gas inlet, 3 is a gas suction port, 4 is a cooling water supply port, and 5 is a cooling water drain,
6 and 7 are anode and cathode ring-shaped electrodes, 8 and 9 are reflecting mirrors, 1o and 11 are fixing plates of reflecting mirror 8, 12 and 1
3 is the adjustment plate 14 of the reflecting mirror 9. 14 is the adjustment screw, 15 is 0
ring, 16 is the output window of the KC1 single crystal plate, 17 is C
O2-N2-1 (e gas cylinder filled with mixed gas,
18 is vacuum pulp.
１９はニードル・パルプ、２ｏは圧力針、２１はガス・
フローパルプ、２２は毛細管、２３は荒引パルプ、°２
４はリーク・パルプ、２５はロータリ・ポンプである。19 is needle pulp, 2o is pressure needle, 21 is gas
Flow pulp, 22 is capillary, 23 is rough pulp, °2
4 is a leak pulp, and 25 is a rotary pump.
而して、反射鏡９は動作状態においても外部から調整で
きるように配置された内部ミラー形である。直管１ａの
プラズマ部分は冷却するためのウォータ・ジャケット１
ｂで覆われ、直管１ａの内部には有効なプラズマを発生
させるに必要な陽極６、と陰極７が配置、され、更に片
側に発振器を透過させる出力取出窓１６が設けられてい
る。反射鏡８及び９は誘電体多層膜を用いる他、金を蒸
着したものが多く用いられる。Thus, the reflecting mirror 9 is an internal mirror arranged so that it can be adjusted from the outside even in the operating state. A water jacket 1 is used to cool the plasma part of the straight pipe 1a.
An anode 6 and a cathode 7 necessary for generating effective plasma are arranged inside the straight tube 1a, and an output window 16 is provided on one side to allow the oscillator to pass through. In addition to using a dielectric multilayer film, the reflecting mirrors 8 and 9 are often made of vapor-deposited gold.
、而して、予め最適条件に混合されたガスを圧入したガ
スボンベ１７から、減圧パルプ１８を通してニードル・
パルプ１９に導き、ここからガスの量を調節しながら少
しづつガス導入口２から直管ｌａ内に導入し、直管ｌａ
のもう一方のガス吸引口３から荒引パルプ２３、ガス・
、フローバルー？’ ２１及び適当な排気抵抗をもつ毛
細管２２を通して、ロータリ・ポンプ２５で吸引するよ
うにしたものである。カ゛スの流愛を一定に保ちながら
、直管ｌａ内のガス圧をよい値に保つことができる。Then, from the gas cylinder 17 into which the gas mixed under optimal conditions is pressurized, the needle is passed through the vacuum pulp 18.
The gas is introduced into the straight pipe la from the gas inlet 2 little by little while adjusting the amount of gas.
From the other gas suction port 3, rough pulp 23, gas
, Flowbaloo? ' 21 and a capillary tube 22 having an appropriate evacuation resistance, and a rotary pump 25 is used for suction. The gas pressure in the straight pipe la can be maintained at a good value while keeping the gas flow constant.
然しなから、畝上の如き従来のガス・フロ一式ＣＯ２−
Ｎ２−Ｈｅガス・レーザ発振器にあっては、直管の内部
にそれぞれ陽極及び陰極のリング状の電極を設けている
ので、このリング状の電極部分でガス流が絞られ、この
部分を通過後には乱気流を生ずるのでガス流の流れが不
均一となリレーザ出力の効率を悪くするという問題μが
あった。However, the conventional gas flow set CO2-
In the N2-He gas laser oscillator, anode and cathode ring-shaped electrodes are provided inside the straight tube, so the gas flow is constricted by these ring-shaped electrodes, and after passing through this part, the gas flow is Since this causes turbulence, there is a problem μ in that the gas flow is non-uniform and reduces the efficiency of the laser output.
本発明は畝上の観点に立ってなされたものであり、本発
明の目的とするところは、レーザ管内のガス流の流れを
極めてスムーズにし、均一なガス流の流れを得ることに
より効率の良い高出力のガス・レーザ発振器を′提供す
ることにある。The present invention was made from the viewpoint of ridges, and an object of the present invention is to make the gas flow within the laser tube extremely smooth and to obtain a uniform gas flow, thereby achieving high efficiency. The object of the present invention is to provide a high-output gas laser oscillator.
而して１本発明の要旨とするところは、ガス・フロ一式
レーザ管の直管の内部に陰極及び陽極のリング状の電極
を設けたガス・レーザ発振器に於°Ｃ１上記直管の内壁
面に溝を設け、その溝内に直管の内径と略等しい内径と
したリング状の電極を設けることにある。Therefore, the gist of the present invention is to provide a gas laser oscillator in which cathode and anode ring-shaped electrodes are provided inside a straight tube of a gas flow laser tube, and the inner wall surface of the straight tube at 1°C. A groove is provided in the tube, and a ring-shaped electrode is provided within the groove, the inner diameter of which is approximately equal to the inner diameter of the straight pipe.
以下、図面により本発明の詳細を具体的に説明する。Hereinafter, the details of the present invention will be specifically explained with reference to the drawings.
尚、以下では従来と共通の部分には共通の符号を付し、
重複する説明は省略する。In addition, in the following, parts common to conventional ones are given common symbols,
Duplicate explanations will be omitted.
第２図は本発明にかかるガス・フロ一式ＣＯ２Ｎ２ Ｈ
ｅガス・レーザ発振器の一実施例を示を一部破断説明図
である。Figure 2 shows the gas flow set CO2N2H according to the present invention.
FIG. 1 is a partially cutaway explanatory diagram showing one embodiment of an e-gas laser oscillator.
第２図中、２６は第１直管２７ａと第１ウオータ・ジャ
ケシ）２７ｂ、第２直管２８ａと第２ウオータ・ジャケ
ット２８ｂ、及び第３直管２９ａと第３ウオータ・ジャ
ケット２９ｂと断面がＵ形の環状継手管３０．３１．３
２及び３３とから成るレーザ管、３４は第１直管２７ａ
に設けたガス導入口、３５は第３直管２９ａに設けたガ
ス吸引口、３６は第３ウオータ・ジャケット２９ｂに設
けた冷却水の給水口、３７は第１ウオータ・ジャケット
２７ｂに設けた冷却水の排水口、３８及び３９はｈｉ３
ウォータ・ジャケット２９ｂに設けた冷却水の流出口、
４０及び４１は第２ウオータ・ジャケシ）２８ｂに設け
た冷却水の流入口、４２及び４３は第２ウオータ・ジャ
ゲット２８ｂに設けた冷却水の流出口、４４及び４５は
第１ウオータ・ジャケット２７ｂに設置ノだ冷却水の流
入口、４６及び４７は陽極及び陰極のフランジ４６ａ及
び４７ａを有するリング状の電極、４８．４９．５０及
び５１は、０リングである。In FIG. 2, 26 has a cross section of a first straight pipe 27a and a first water jacket 27b, a second straight pipe 28a and a second water jacket 28b, and a third straight pipe 29a and a third water jacket 29b. U-shaped annular joint pipe 30.31.3
2 and 33, 34 is the first straight pipe 27a
35 is a gas suction port provided in the third straight pipe 29a, 36 is a cooling water supply port provided in the third water jacket 29b, and 37 is a cooling port provided in the first water jacket 27b. Water drains, 38 and 39 are hi3
A cooling water outlet provided in the water jacket 29b,
40 and 41 are cooling water inlets provided in the second water jacket 28b, 42 and 43 are cooling water outlet ports provided in the second water jacket 28b, and 44 and 45 are cooling water outlet ports provided in the first water jacket 27b. The cooling water inlets 46 and 47 are ring-shaped electrodes having anode and cathode flanges 46a and 47a, and 48, 49, 50 and 51 are O-rings.
而して、レーザ管２６は籐１直管２７ａと第２直管２８
ａと第３直管２９ａとの内径が等しく直列に配Ｖされ、
上記直管と内径の等しい電極４Ｇ及び４７をぞれぞれ第
１直管２７ａと第２直管２８ａとの間及び第２直管２８
ａと第３直管２９ａとの間に形成される環状溝部に設け
〕Ｃフランジ４６ａ及び４１ａにそれぞれ０リング４８
と４９及び５０と５１を介し°Ｃ挾持し、各直管及びウ
ォータ・ジャケットの軸の廻りに環状に形成される冷却
水流出入口４２と４４．４３と４５．３８と４０及び３
９と４１にそれぞれ断面がＵ形の環状継手管３２．３３
．３０及び３１を嵌め込んで取り付けた構成となってい
る。Thus, the laser tube 26 has a rattan first straight pipe 27a and a second straight pipe 28.
a and the third straight pipe 29a have equal inner diameters and are arranged in series,
Electrodes 4G and 47 having the same inner diameter as the straight pipe are connected between the first straight pipe 27a and the second straight pipe 28a and the second straight pipe 28, respectively.
O-rings 48 are provided on the C flanges 46a and 41a, respectively.
and 49, 50, and 51, and cooling water inlets 42, 44, 43, 45, 38, 40, and 3 formed in an annular shape around the axis of each straight pipe and water jacket.
9 and 41 are annular joint pipes 32 and 33 with U-shaped cross sections, respectively.
．． 30 and 31 are fitted and attached.
第３図はｕＸ２図中レーザ管の他の一実施例を示す断面
図である。FIG. 3 is a sectional view showing another embodiment of the laser tube in FIG. uX2.
第３図中、５２は＃ｊｌ直管５３ａと第１ウオータ・ジ
ャケット５３ｂ、１８２直管５４と第２ウオータ・ジャ
ゲット５５、及び第３１’！Ｆ５６ａと第３ウオータ・
ジャケット５６ｂとから成るレーザ管、５７は第１直管
５３ａに設けたガス導入口、５８はｋＮ３直管５６ａに
設けたガス吸引口、５９はｗ４３ウォータ・ジャケット
５６ｂに設けた冷却水の給水口、６０は第１ウオータ・
ジャケット５３ｂに設けた冷却水の排水口、６１及び６
２は陽極及び陰極゛のリング状の電極である。In FIG. 3, 52 indicates #jl straight pipe 53a, first water jacket 53b, 182 straight pipe 54, second water jacket 55, and 31'! F56a and 3rd water
57 is a gas inlet provided on the first straight pipe 53a, 58 is a gas suction port provided on the kN3 straight pipe 56a, and 59 is a cooling water supply port provided on the W43 water jacket 56b. , 60 is the first water
Cooling water drain ports 61 and 6 provided in jacket 53b
2 is a ring-shaped electrode of an anode and a cathode.
而して、レーザ’１ＪＦ５２は１８１直管５３ａと第１
ウオ・−タ・ジャケット５３ｂの一端にそれぞれｆｓ２
直管５４と第２ウオータ・ジャケント５５の一端を嵌め
込んで取り付け、更に第２直管５４と１２ウオータ・ジ
４．ｒソト５５の他端に第３直管５６ａと第３ウオータ
・ジャケット５６ｂの一端を嵌め込んで取り付は直列に
継ぐようにし、それぞれの直管は内径が等しく、継目に
溝部を形成させて設け、その溝内に直管の内径と等しい
内径のリング状の電極６１．６２を設けた構成となって
いる。Therefore, the laser '1JF52 connects the 181 straight pipe 53a and the first
fs2 at one end of the water jacket 53b.
Fit and attach one end of the straight pipe 54 and the second water pipe 55, and then connect the second straight pipe 54 and the 12 water jacket 4. The third straight pipe 56a and one end of the third water jacket 56b are fitted into the other end of the r-soto 55 so that they are connected in series, and each straight pipe has the same inner diameter and a groove is formed at the joint. A ring-shaped electrode 61, 62 having an inner diameter equal to the inner diameter of the straight pipe is provided in the groove.
本発明は畝上の如く構成されるから、本発明に −よる
ときは、直管の内壁面に溝部を形成させて設け、その溝
内に直管の内径と藺等しい内径としたリング状の電極を
設りる事と（た為、レーザ管内のガス流の流れが極めて
スムーズになり、均一なガス流の流れを得るので効率の
良い高出力のレーザ出力を得ることができ、且つ電極消
耗が少なくなるので１１４！！１の寿命を１く保つこと
ができるという効果もある。Since the present invention is constructed like a ridge, according to the present invention, a groove is formed on the inner wall surface of the straight pipe, and a ring-shaped ring having an inner diameter equal to the inner diameter of the straight pipe is provided in the groove. By installing electrodes, the gas flow inside the laser tube becomes extremely smooth, and a uniform gas flow is obtained, making it possible to obtain efficient high-output laser output and reducing electrode wear. This also has the effect that the lifespan of 114!!1 can be kept at 1 since the number of
実験値では、レーザ管の長さを１．３ ｍとし、ＣＯ２
−Ｎ２−Ｈｅガス流を１１０ｍ／ｓｅｅで流し６０Ｔｃ
ｒｒｒとした場合、従来の方法では電極内径を２６龍で
４２０Ｗの出力となったが、本発明では電極内径を３５
ｍで６３０Ｗの出力を得ることができた。In the experimental values, the length of the laser tube was 1.3 m, and CO2
-N2-He gas flow at 110m/see 60Tc
rrr, the conventional method had an electrode inner diameter of 26 mm and an output of 420 W, but in the present invention, the electrode inner diameter was 35 mm.
It was possible to obtain an output of 630W with m.
尚、本発明の構成は畝上の実施例に限定されるものでは
なく、例えば溝部を直管の部分的な径の鉱大により形成
したもの等を用いることかで潰、ヌ［レーザ管の構成は
本発明の目的の範囲内で自由に設計変更できるものであ
り、本発明はそれらの総てを包摂するものである。Note that the configuration of the present invention is not limited to the embodiment on the ridge; for example, the groove portion may be formed by partially enlarging the diameter of the straight pipe, or the like. The design of the configuration can be freely changed within the scope of the purpose of the present invention, and the present invention encompasses all of them.
第１図は従来のガス・フロ一式ｃｏ２−Ｎ２−Ｉ（ｅガ
ス・レーザ発振器の一実施例を示す一部破断説明図、
第２図は本発明にかかるガス・フロ一式ＣＯ２−Ｎ２−
Ｈｅガス・レーザ発振器の一実施例を示す一部破断説明
図、
Ｎ４３図は第２図中レーザ管の他の一実施例を示す断面
図である。
１．２６．５２−−−−−−−−−レーザ管ｌ ａ −
−−−−−−−−・−・−直管１ｂ−・−一−−−−−
−・・−一−−ウォータ・ジャケット２．３４．５７−
−−−−一・−ガス導入口３．３５．５８−・・−−−
−・・−ガス吸引口４．３６．５９−・・−・−・・〜
給水口５．３７．６０−・−・・−・・排水口６．４６
．６１−−−−−−−・−・陽極７．４７．６２−・−
−−−−・−陰極８．９・−・・・−２−・−・−反射
鏡１０．１１−・・−・・−・・−・・・固定板１２．
１３−・−・−−−一・・・・−・Ｊ＆１Ｍ板１４−−
−−−−−・−ａ贅ねし
１５−−−−−・・−−−−−一一−−−−−−・０リ
ング１６−＝・−・−−−−−−；・−・・・・・・出
力取出窓１７−−−−−−−−−−−−−−−−・ガス
ボンへ１８−−−−−−−−−− Ｎ圧バルゾ１９−−
−−−・−・−・−・−・・−・・ニードル・パルプ２
０−・−・・−−−一・−・・・圧力直１２１−−−−
−−・−・・・−・・−・−・ガス・フローバルブ２２
・・−・・−−−−・−・−−一−−毛細管２３・・−
・−・−・−・・−・・−−−一／荒引パルプ２４・−
−−−−−・−・−・−一−−−−リーク・バルブ２５
−−−−−−−・−一−−−・・−−−−一ロータリ・
ポンプ２７ ａ 、 ５３ａ −−−−−−−−・・・
−第１直管２７ ｂ 、 ５３ ｂ −−−−−−−−
・−第１ウオータ・ジャケット２８ ａ 、 ５４−−
−−−−−−−−−−一第２直管２１１ｂ 、、 ５５
−−−−−一・−・−−−−一第２ウォータ・ジャケッ
ト２９ａ 、 ５６ａ −−−−・・・・−Ｎ４３直管
２９ｂ 、 ５６．ｂ −’：−−−−・・−第３ウオ
ータ・ジャケット３０乃至３３−−−−−−−− ｍ重
管３８乃至４５−−−−−−−一・−−−−一流出入口
４６ ａ −−−−−−−−−−−−一陽極のフランジ
４７ ａ −−−−−−−−・−・−一−−−−陰極の
フランジ４８乃至５１−−−・−一−・−０リング特許
出願人 株式会社 井上ジャパックス研究所代理人（７
５２４）鰻上正太部
１ 第１図
第３図
２Fig. 1 is a partially cutaway explanatory diagram showing a conventional gas flow set CO2-N2-I (an embodiment of an e-gas laser oscillator), and Fig. 2 is a gas flow set CO2-N2-I according to the present invention.
A partially cutaway explanatory diagram showing one embodiment of the He gas laser oscillator. Figure N43 is a sectional view showing another embodiment of the laser tube in FIG. 2. 1.26.52---------Laser tube l a -
−−−−−−−・−・−Straight pipe 1b−・−1−−−−−
-...-1--Water jacket 2.34.57-
-----1.-Gas inlet port 3.35.58-----
−・・−Gas suction port 4.36.59−・・−・−・・～
Water supply port 5.37.60-・-・・・・・Drain port 6.46
．． 61--------・-・Anode 7.47.62-・-
-------Cathode 8.9--2--Reflector 10.11---Fixing plate 12.
13−・−・−−−1・・・・−・J＆1M board 14−−
−−−−−・−a extravagant 15−−−−−・−−−−−1−−−−−−・0 ring 16−=・−・−−−−−−;・−・・・・・・Output window 17--------・To gas cylinder 18----- N pressure balzo 19--
−−−・−・−・−・−・・−・Needle pulp 2
0−・−・・−−−1・−・Pressure direct 121−−−
−−・−・・・・−・・−・−・Gas flow valve 22
・・−・・−−−−・−・−−1−−Capillary tube 23・・−
・−・−・−・・−・・−−−1/Roughing pulp 24・−
−−−−−・−・−・−1−−−−Leak valve 25
−−−−−−−・−1−−−・・−−−−1 Rotary・
Pump 27a, 53a---------...
-First straight pipe 27b, 53b------
・-First water jacket 28a, 54--
-------------Second straight pipe 211b,, 55
------1・------1 Second water jacket 29a, 56a ------...-N43 straight pipe 29b, 56. b -':-----Third water jacket 30 to 33--M heavy pipes 38 to 45-----1.----First inlet/outlet 46 a ---------------------------------------------------------------------------------- 0-Ring Patent Applicant Inoue Japax Research Institute Agent (7
524) Unagiue Shotabu 1 Figure 1 Figure 3 2
Claims (1)
び陽極のリング状の電極を設けたガス・レーザ発振器に
於て、 上記直管の内壁面に溝を設け、その溝内に直管の内径と
略等しい内径としたリング状の電極を設けたことを特徴
とするガス・レーザ発振器。[Claims] In a gas laser oscillator in which ring-shaped cathode and anode ring electrodes are provided inside a straight gas flow laser tube, a groove is provided on the inner wall surface of the straight tube, and a groove is provided on the inner wall surface of the straight tube. A gas laser oscillator characterized in that a ring-shaped electrode with an inner diameter approximately equal to the inner diameter of a straight pipe is provided in a groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15015283A JPS6042883A (en) | 1983-08-19 | 1983-08-19 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15015283A JPS6042883A (en) | 1983-08-19 | 1983-08-19 | Gas laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6042883A true JPS6042883A (en) | 1985-03-07 |
Family
ID=15490633
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15015283A Pending JPS6042883A (en) | 1983-08-19 | 1983-08-19 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6042883A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6138964U (en) * | 1984-08-07 | 1986-03-11 | 日本電気株式会社 | gas laser oscillator |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56131985A (en) * | 1980-03-19 | 1981-10-15 | Mitsubishi Electric Corp | Amplifying device for laser beam |
-
1983
- 1983-08-19 JP JP15015283A patent/JPS6042883A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56131985A (en) * | 1980-03-19 | 1981-10-15 | Mitsubishi Electric Corp | Amplifying device for laser beam |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6138964U (en) * | 1984-08-07 | 1986-03-11 | 日本電気株式会社 | gas laser oscillator |
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