JPS58178577A - Laser oscillator - Google Patents

Abstract

PURPOSE:To improve the output of a CO2 laser by flowing cooling medium to the outer periphery of a spiral laser tube, flowing laser gas which has circulating flow in the tube and recombining the dissociated gas at the downstream. CONSTITUTION:Laser gas which is introduced from an inlet 33 becomes circulating flow by the twisting angle and direction of blades 35 of an anode ring 25, tubular wall is flowed to a spiral laser tube 39 and a high speed turbulence flow is directed toward an anode ring 47. Cooling coil which flows between an outer tube 41 and the tube 39 becomes turbulent flow by spiral line. The turbulent flow degree of the gas is substantially equalized, thermal exchange efficiency is improved, and gas temperature is equalized. Accordingly, the decrease in the inversion distribution rate of the excited part is suppressed. Further, a catalyst unit 52 is provided at a gas exhaust port 51, gas is passed in high temperature state, dissociation of CO2 molecules is effectively suppressed, and the deterioration of the laser gas is prevented. According to this structure, the output of the CO2 laser oscillator of coaxial discharging excitation circulation type can be improved.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention particularly relates to a coaxial type discharge laser oscillator that directs the laser output. Regarding equipment.

In general, the efficiency of a coaxial type electrically pumped tli 1m helical carbon dioxide (C02) ray R& device (hereinafter referred to as I'C02 laser oscillator) is low, and therefore it is difficult to increase the laser oscillation length. By increasing the volume of the laser beam by increasing the diameter of the discharge beam, the direction of the laser output can be changed.

However, regarding cooling of conventional laser oscillators,
Ray If tube - (It became 71 due to the adoption of a certain Pyrex water cooling or 4 irradiation tube, but this 7
]>1, if the laser volume is increased by the four measures mentioned in -1 to improve the laser output, the CO2
The humidity of the sea 11'A body containing gas is CO2 + Q' The discharge f1 in the oscillator! On the flow side of the laser gas in region I, the temperature is
There is a problem in that the CO2 molecules are excited to the upper laser level and the inversion valve porosity of the excited molecules is reduced.

-h, the above-mentioned CO2 laser oscillator (・ is an essential problem, and in the discharge region, there is a problem that the laser output decreases due to the dissociation of CO2 molecules shown by the chemical formula: C02; "G O+ O"). Yes, regarding this, please refer to C.
In the fli electric region in the O2 laser oscillator (secondary
This can be suppressed by uniformizing the temperature of O2, but when trying to increase the laser output by increasing the laser volume as described above, it is possible to suppress the temperature by using the cooling method described above. , 1. There is a problem in that it is difficult to measure the uniformity of the temperature of CO2 molecules.

The present invention has been made in view of the above-mentioned problems.The purpose of the present invention is to improve the output of a coaxial discharge-excited circulation laser oscillator.

, 1. [In order to achieve the 1st objective, this explanation number includes a spirally formed laser tube, and a cold 7JI medium that is installed around the outer periphery of the laser tube and flows around the laser tube. a cold fjl pipe serving as a guide for the laser; , a coaxial type fault current 11! installed in the flow/drain section of the laser gas where J>LJ in the laser +fm and a laser gas deterioration prevention means 11 for recombining the dissociated laser gas.
A J circulation type laser oscillator is formed, and the sea 41 This method uniformizes the FM degree of the laser gas in the discharge region in the tube, improves the cooling efficiency of the laser gas, and prevents the laser gas from collapsing, and in addition to the above measures. Regarding the cold JJI of the laser oscillator, there are five points: The insulating coil for cooling that flows around the laser tube is turbulent due to the spiral shape of the laser tube, and heat exchange with the laser tube wall is performed with high efficiency. In order to prevent dissociation of the laser gas, the gist is to increase the C efficiency by using the laser gas deterioration prevention means.

Hereinafter, embodiments of the present invention will be explained using Eko.

1 shows an embodiment of the present invention, and the CO2 laser oscillator 1 is roughly divided into 7 minnows, a 4-ter jacket part 5, an anode linver part 7, a spiral tube chamber part 9, and a cup dove 1. There is a configuration C that includes a chamber part 11, a catalyst chamber 13 constituting a means for preventing laser gas deterioration, and an output mirror 15.

The rear mirror water jet 1 inlet part 5 is 100%
The rear mirror 17, the water jacket 19, the bellows 21, and the micro head 23 for adjusting the optical axis of the mirror 17 have a light reflectance of .

The seventh node chamber part 7 includes an anode link 25, an anode power insulator (see FIG. 2) 27 that supplies power to the anode ring 25, and a high resistance
A glow discharge is generated between the node ring 25 and the cathode, which will be described later. 1-rigger electrical connection connection f31 for connecting the output line to the trigger electrode 25), 1-rigger electrical connection connection f31, which serves to lower the relative dielectric strength between the rings 47, and 1 laser gas inlet 33. 11.

In addition, since the anode link H254 and the L-ray IJ-gas swirling legal 9 means are configured, FIG.
3, Laser gas introduction] 33 (in the direction of the arrow), the laser gas flows after passing through, and a blade 35 is formed in the cylindrical body, and a blade 35 is formed in the cylindrical body. An IIM pole is formed on 25-a.
2 laser oscillator 1 body (=J4) is fixed. Also, the 7-node electric wire 251.t, the inner surface 25-a
For parts other than the anode, insulating -1-ding (
The area marked with an X in Figure 3) is covered with blinds.

The spiral tube chamber section 9 includes a laser tube 39 formed in a spiral shape and made of a metal material h1 with high thermal conductivity.
and the cooling pipe 41 installed on the outer periphery of the laser tube 39. (See Figure 5)・0 In addition, Joki cold 1 pipe 4
1, an inlet [143] and an outlet []45 of the insulation A-il for cold fJI are formed.

The cathode inverter section 11 connects a cylindrical power node link 47 and a cathode power supply insulator 48 (see FIG. 4) that supplies power to the cathode ring 47 with Th? do. The inner surface 47-a of the cathode ring 47 is a cathode, and the cathode ring 47 is fixed to the main body of the CO2 laser oscillator 1 by a fixing J-sicut 40 (see FIG. 6). . Note that the catalyst chamber 13, which is coated with insulation except for the first orientation surface portion 47-a, has a laser gas discharge [1
51, the dissociated C02 molecules of the laser gas flowing through the discharge area in the laser tube 39 are oxidized and recombined by the catalyst, suppressing the deterioration of the C02H gas! +1
The part 52 containing oil-coated alumina is polished.

The output mirror chamber 15 includes a laser output mirror 53 with a light transmittance of 20%, a bellows r, l), a laser output mirror 53 with a light transmittance of 20%,
There is a b7 to the optical axis adjustment microphone 11 of the output mirror 53.

Reference number 59 is an insulating cuff for cutting the non-turn of the circuit when a high voltage is applied between the electrodes to open the valve 11.

Next, the operation of this example of real blind will be explained.

First, to describe the outline of the fabrication of the C02 laser oscillator 1, the Ray If gas is produced by Ray + J' gas introduction 1133-→anode ring 25→laser tsr, 39t cathode ring 47→touch wax part 52-slightly゛Gas outlet 51 → Ray
17" Gas inlet 33 is set to 1 rule C high speed 'c-WI
When the laser gas circulates at high speed, a discharge occurs in the laser tube 39 between the ring 25 and the cathode ring 47, and a discharge occurs between the rear mirror 17 and the laser output mirror 53. Optical amplification is performed, and when the optical amplification exceeds a predetermined lllllgIa, a laser output is obtained.

On the other hand, during the operation of the CO2 laser excavator 1 as described above, the laser gas introduced from the laser gas introduction [133] Depending on the direction, it becomes a right-handed or right-handed swirling gas flow and flows out into the laser tube 39, and the wall of one laser tube 39 has a spiral shape, so due to their synergistic effect, It becomes a turbulent state and flows at high speed inside the laser tube 39 toward the cathode ring 47.

Generally, as the flow velocity of the laser gas in the laser tube decreases, the thermal resistance increases, and the C1 heat exchange rate decreases to 10hΣ.
However, as described above, by actively generating a turbulent flow of laser gas in the laser tube 39, the mutual velocity between the laser gas and the laser tube 39 increases, and one laser tube 39 and the cold fJl The cooling insulating oil flowing between the tube 41 also becomes turbulent due to the spiral shape of the laser IJ' tube 39, and the relative velocity with the laser tube 39 also increases due to C1 heat exchange. Efficiency decreases by -F. In addition, in the turbulent flow state of the laser gas as described above, in any cross section of the laser gas from the 4-stream side to the downstream side along the optical axis in the laser tube 39, 1-4 turbulence of the laser gas occurs. As the flow rate becomes more or less uniform, the temperature of the laser gas in the discharge region can also be made more uniform.

Therefore, the problem of a low rate of inversion of the I1iIJ molecule due to the temperature of the laser gas rising on the upstream side of the discharge region can be solved. Even when the ray volume is increased, the reduction in the inversion and pores can be suppressed.

On the other hand, the dissociation of 002 min-f in the discharge region is suppressed because the turbulent flow of the laser gas in the discharge region as described above makes the cold II efficiency F and uniformity of the laser gas formation uniform. However, since the catalyst section 52 is installed at the laser gas discharge point 51, it is possible to pass the laser gas in a state of high humidity (unlike conventional methods, the laser gas is discharged). After passing through the laser, the catalytic converter was installed at a considerable distance, resulting in a higher catalytic efficiency compared to the case where low-temperature laser gas was passed through.
The dissociation can be suppressed more effectively.

Note that the turbulence of the sea+1 gas in the laser tube 39 depends on the size of the spiral peaks and valleys formed in the laser tube 39;
Needless to say, the pitch can be changed depending on the pitch between the ridges and the shape of the blenoid 35.

According to this embodiment, the rape tube has a spiral shape,
By allowing the laser gas and the insulating oil flowing between the laser tube and the cold IA tube to flow in a turbulent manner, the discharge region can be maintained even when the laser volume is increased to direct the laser output. If the temperature of the laser gas inside can be uniformized, the cooling efficiency of the laser gas can also be improved. For the dissociation of CO2 molecules in the region, the laser gas is brought into a turbulent state (
In addition to uniformizing the temperature of the CO2 molecules by flowing the CO2 molecules, the dissociated CO2 molecules are passed through the catalyst and bonded together, which can suppress the temperature.

Since the present invention is within the scope of the claims, it is possible to improve the laser output of a coaxial discharge-excited circulation laser oscillator.

[Brief explanation of the drawing]

Figure 1 shows the body of the CO2 laser oscillator. 2 is a sectional view taken along the line A-A in FIG. 1, FIG. 3 is a detailed view of the 71-node ring, and FIG. FIG. 5 is a diagram of the C0 line lli curve in FIG. 1, and FIG. 6 is a detailed diagram of the cathode ring. (Representing one important part of the diagram and explaining the month of March) 1...C
02 Laser oscillator 39... Laser tube 41... Cooling pipe 25...
・Anode ring 52... Catalyst part special engineering) Applicant
Co., Ltd. Ne1 Ama Da Special Investor Co., Ltd. Ne1 Sankyo Electric Manufacturing Co., Ltd. Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 4'/ 4'/

Claims (1)

[Claims] A coaxial discharge excitation circulation type laser oscillator that causes laser gas to flow in the coaxial direction of the laser oscillator and discharge excites the laser gas to output a laser, includes a laser tube formed in a spiral shape and an outer periphery of the laser tube. a cooling pipe provided in the laser tube to serve as a guide for the medium flowing around the laser tube; and a laser provided at a downstream portion of the laser gas passage in the laser tube to generate a swirling flow of the laser gas. A gas swirling flow generating means and a laser gas deterioration prevention stage 11-r provided in the downstream part of the flow of the laser sound f gas in the laser tube and self-coupling the decomposed laser gas. A laser oscillation device characterized by: