JPS5966179A - Gas laser device - Google Patents
Gas laser deviceInfo
- Publication number
- JPS5966179A JPS5966179A JP17786882A JP17786882A JPS5966179A JP S5966179 A JPS5966179 A JP S5966179A JP 17786882 A JP17786882 A JP 17786882A JP 17786882 A JP17786882 A JP 17786882A JP S5966179 A JPS5966179 A JP S5966179A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- tube
- cylinder
- laser
- insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】 産業上の利用分野 この発明はガスレーザ装置に関するものである。[Detailed description of the invention] Industrial applications The present invention relates to a gas laser device.
従来例の構成とその問題点
従来より、炭酸ガスレーザなどでは、第１図に示すよう
に、プロア１等にエリレーザ媒質ガスが放電領域である
レーザ管２内を流れるように構成している。３はガスの
流入口、４はガスの排出口である。レーザ媒質ガスにエ
ネルギを与えるための放電用電極５は、排出口４＄工び
流入口３とそトぞれ同一ブロックで構成される。６は共
振器を構メするミラーで舎る。Conventional Structure and Problems Conventionally, as shown in FIG. 1, carbon dioxide lasers and the like have been structured so that an EL laser medium gas flows through a laser tube 2, which is a discharge region, in a proar 1 or the like. 3 is a gas inlet, and 4 is a gas outlet. The discharge electrode 5 for giving energy to the laser medium gas is constructed of the same block as the discharge port 4 and the inlet port 3. 6 is a mirror that forms a resonator.
ところが、レーザ管２内において、放電によりレーザ発
振に寄与した′高温ガスは、レーザ管２を通過した後、
直ちにプロワ１側へ送り返されて、高温ガスの熱エネル
ギがレーデ発振に有効利用されていないため、発振効率
が悪いという問題を有していた。However, in the laser tube 2, the high-temperature gas that contributed to laser oscillation due to discharge passes through the laser tube 2, and then
Since the thermal energy of the high-temperature gas is immediately sent back to the blower 1 side and is not effectively used for Rade oscillation, there is a problem in that the oscillation efficiency is poor.
発明の目的
この発明の目的は、発振効率を向上できるガスレーザ装
置を提供することである。OBJECT OF THE INVENTION An object of the invention is to provide a gas laser device that can improve oscillation efficiency.
発明の構成
この発明のガスレーザ装置は、周胴部にガス排出口をも
つ支持筒の内側筒端と、レーザ管のガス排出側管端との
間に絶縁筒体を連結して、その絶縁筒体の内側筒端に電
極を配したもので、レーダ′管から排出されてくる高温
ガスの熱エネルギを絶縁筒体により吸収して、シー４／
′発振屹寄与させる。Structure of the Invention The gas laser device of the present invention connects an insulating cylindrical body between the inner cylindrical end of a support tube having a gas discharge port in the circumferential body and the gas discharge side tube end of the laser tube. An electrode is placed at the end of the inner tube, and the thermal energy of the high-temperature gas discharged from the radar tube is absorbed by the insulating tube.
'Contributes to oscillation.
実施例の説明
この発明の一実施例を第２図ないし第４図を用いて説明
する。第２図において、７は電極兼用ガス流入側筒、８
はガス排出側筒て、両筒７，８はそれぞれの筒軸を揃え
てｏｒ定間隔をあけて対向配置される。９はミラーで、
両筒７．８の外側筒端にそれぞれ密封連結され、ミラー
面を７．８の筒軸に対し直交配置する。１０は絶縁筒体
で、外側筒端を上記ガスリド出側筒８の内側筒端に連結
する。DESCRIPTION OF THE EMBODIMENTS An embodiment of the present invention will be described with reference to FIGS. 2 to 4. In Fig. 2, 7 is a gas inflow cylinder that also serves as an electrode, and 8
is a gas discharge side cylinder, and both cylinders 7 and 8 are arranged facing each other with their respective cylinder axes aligned or with a constant interval. 9 is a mirror,
Both tubes 7.8 are connected to the outer tube ends thereof in a sealed manner, and the mirror surfaces are disposed perpendicular to the tube axes of the tubes 7.8. Reference numeral 10 denotes an insulating cylinder whose outer cylinder end is connected to the inner cylinder end of the gas lid outlet cylinder 8.
１１はレー゛プ′管で、絶縁筒体１０の内側筒端と、ガ
ス流入側筒７の内側筒端間に連結される。１２はガス流
通パイプで、両管端１２ａ 、 １２ｂを両筒７゜８の
固ハ１１号部にそれぞれ連結する。１３はプロワて、ガ
スをガス流通パイプ１２を介して筒７側へ送り出す。１
４は１色糾筒体ｌＯの内側筒端に配した電（へである。Reference numeral 11 denotes a rape tube, which is connected between the inner tube end of the insulating tube 10 and the inner tube end of the gas inflow side tube 7. Reference numeral 12 denotes a gas distribution pipe, and both pipe ends 12a and 12b are respectively connected to the 7°8 rigid part No. 11 of both cylinders. A blower 13 sends the gas to the cylinder 7 side through the gas distribution pipe 12. 1
4 is an electric wire arranged on the inner end of the one-color cylindrical body lO.
この場合、絶縁筒体１０の内径Ｄ′は、レーザ管１１の
内径と同程度に設定する。In this case, the inner diameter D' of the insulating cylinder 10 is set to be approximately the same as the inner diameter of the laser tube 11.
このように構成した結果、レーザ管１１内での放７１（
により高温となったガスは、絶縁筒体１０内を通過する
ときにその熱エネルギの一部を絶縁筒体１０にエリ奪わ
れてレーザ発振のエネルギとして利用され、こうして発
振効率の向上を図ることができる。このう８振効率向上
の効果は、特に、プロワ１３として、その動作ガス圧力
において流量５００−ｇ／ｍｉｎ以上の能力を有するも
のを使用した場合に顕著である。また、第３図に示すよ
うに、絶縁筒体１０の内径Ｄ′とレーザ管１１の内径り
との比率Ｄ’／ Ｄを、第３図に示すように、０．８〜
２の範囲内に設定した場合にも顕著な効果が得られる（
従来の放電エネルギの入力に対する発振効率は１８〜１
９％である）。さら番ζニ、絶縁筒体１ｏの筒長りを、
第４図に示すように、３０１以上に６（ト定した場合に
も顕著な幼果か得られる。なお、上記絶縁筒体１０を、
冷却媒質により冷却すれば、その絶縁筒体１０でレーデ
管１１からｆＩＶ出された高温ガスのｆ％ ３４ネルギ
をかなり除去できるため、ガスの温度低下を実現してレ
ーザ発振り率を向上できるとともに、筒８やプロワ１３
の温度上昇も防止できる。As a result of this configuration, the emission 71 (
When the gas, which has become high in temperature, passes through the insulating cylinder 10, part of its thermal energy is absorbed by the insulating cylinder 10 and used as energy for laser oscillation, thus improving oscillation efficiency. I can do it. This effect of improving vibration efficiency is particularly noticeable when the blower 13 has a flow rate of 500 g/min or more at its operating gas pressure. Further, as shown in FIG. 3, the ratio D'/D of the inner diameter D' of the insulating cylinder 10 to the inner diameter of the laser tube 11 is set to 0.8 to 0.3, as shown in FIG.
Remarkable effects can also be obtained when setting within the range of 2 (
The oscillation efficiency for conventional discharge energy input is 18 to 1
9%). Countermeasure number ζ 2, the length of the insulating cylinder 1o,
As shown in FIG. 4, remarkable young fruits can also be obtained when the insulating cylinder 10 is
By cooling with a cooling medium, the insulating cylinder 10 can considerably remove f%34 energy of the high-temperature gas fIV emitted from the Lede tube 11, thereby lowering the gas temperature and improving the laser oscillation rate. , tube 8 and blower 13
temperature rise can also be prevented.
発明の幼果
この発明のガスレーザ装置によれば、発振効率を向上で
きるという効果が得られる。Effects of the Invention According to the gas laser device of the present invention, the effect of improving oscillation efficiency can be obtained.
第１図は従来例の借成図、第２図はこの発明の一実施例
の措成ト］、第３図はレーデ管内径に対する絶縁筒体内
径の比率とレーザ発振効率との関係特性図、第４図は絶
縁筒体長さとレーザ発振効率との関係特性図である。
７．８・・・ガス流出入口をもつ筒、９・・・ミラー、
１０・・・勧、縁部ｆｔ＝、１１・・・レーデ管、１２
・・・ガス流通パイプ、１３・・・プロワ、１４・・・
電概第１図
１４
第２図
に 辛（Ｄ’／Ｄ）−
第３図
！２４１
孝 １８１
鞄、縁筒伴長（ｍｍ）−−
第４図Fig. 1 is a drawing of a conventional example, Fig. 2 is a drawing of an embodiment of the present invention], and Fig. 3 is a characteristic diagram of the relationship between the ratio of the inner diameter of the insulating cylinder to the inner diameter of the lede tube and the laser oscillation efficiency. , FIG. 4 is a characteristic diagram showing the relationship between the length of the insulating cylinder and the laser oscillation efficiency. 7.8...Cylinder with gas inlet and outlet, 9...Mirror,
10... Recommended, edge ft=, 11... Rede tube, 12
...Gas distribution pipe, 13...Prower, 14...
Electric summary Figure 1 14 Figure 2 Spicy (D'/D) - Figure 3! 241 Takashi 181 Bag, edge length (mm) -- Fig. 4
Claims (4)
用ガス流入側筒＄よびガス排出側筒と、外側筒端を前記
排出側筒の内側筒端に連結した絶縁筒体と、この絶縁筒
体の内側筒端と前記ガス流入側筒の内側筒端間に連結し
たレーザ管と、前記絶縁筒体の内側筒端に配した電極と
、両管端を前記両筒の各周胴部へそれぞれ連結したガス
流通パイプと、この′ガス流通パイプの途中に設置して
ガスをガス流入側筒へ送り出すブロワとを備えたガスレ
ーザ装置。(1) A gas inflow side tube that also serves as an electrode and a gas discharge side tube that are arranged facing each other with sleeves aligned and spaced apart, an insulating tube whose outer tube end is connected to the inner tube end of the discharge side tube, and this insulation tube. A laser tube connected between the inner tube end of the cylinder and the inner tube end of the gas inflow side tube, an electrode arranged on the inner tube end of the insulating tube, and both tube ends connected to each peripheral body of the two tubes, respectively. A gas laser device that includes a connected gas distribution pipe and a blower that is installed in the middle of the gas distribution pipe and sends gas to the gas inflow cylinder.
径に対する比率が、０．８〜２の範囲内にある特許請求
の範囲第（１）項記載のガスレーザ装置。(2) The gas laser device according to claim 1, wherein the ratio of the inner diameter of the insulating cylinder to the inner diameter of the laser tube is within a range of 0.8 to 2.
である特許請求の範囲第（１）項または第（２）項記載
のガスレーザ装ｆσ。(3) The gas laser device fσ according to claim (1) or (2), wherein the ITJ insulating cylinder has a cylinder length of 30 mm or more.
囲第（１）項、第（２）項または第（３）項記載のガス
レーザ、装置。(4) The gas laser and device according to claim (1), (2), or (3), wherein the insulating cylinder includes a cooler groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17786882A JPS5966179A (en) | 1982-10-08 | 1982-10-08 | Gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17786882A JPS5966179A (en) | 1982-10-08 | 1982-10-08 | Gas laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5966179A true JPS5966179A (en) | 1984-04-14 |
Family
ID=16038466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17786882A Pending JPS5966179A (en) | 1982-10-08 | 1982-10-08 | Gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5966179A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49122997A (en) * | 1973-03-27 | 1974-11-25 | ||
| JPS55121691A (en) * | 1979-03-14 | 1980-09-18 | Hitachi Ltd | Gas laser device |
-
1982
- 1982-10-08 JP JP17786882A patent/JPS5966179A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49122997A (en) * | 1973-03-27 | 1974-11-25 | ||
| JPS55121691A (en) * | 1979-03-14 | 1980-09-18 | Hitachi Ltd | Gas laser device |
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