JPS6042606A - 光学的寸法測定装置 - Google Patents

光学的寸法測定装置

Info

Publication number
JPS6042606A
JPS6042606A JP11472184A JP11472184A JPS6042606A JP S6042606 A JPS6042606 A JP S6042606A JP 11472184 A JP11472184 A JP 11472184A JP 11472184 A JP11472184 A JP 11472184A JP S6042606 A JPS6042606 A JP S6042606A
Authority
JP
Japan
Prior art keywords
optical
sensor
image
item
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11472184A
Other languages
English (en)
Japanese (ja)
Inventor
ホイト・エツチ・ネルソン
ウイリアム・ビー・コール
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nanometrics Inc
Original Assignee
Nanometrics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanometrics Inc filed Critical Nanometrics Inc
Publication of JPS6042606A publication Critical patent/JPS6042606A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP11472184A 1983-08-04 1984-06-06 光学的寸法測定装置 Pending JPS6042606A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US52030783A 1983-08-04 1983-08-04
US520307 2000-03-07

Publications (1)

Publication Number Publication Date
JPS6042606A true JPS6042606A (ja) 1985-03-06

Family

ID=24072038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11472184A Pending JPS6042606A (ja) 1983-08-04 1984-06-06 光学的寸法測定装置

Country Status (3)

Country Link
JP (1) JPS6042606A (de)
DE (1) DE3428772A1 (de)
GB (1) GB2144536A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61217704A (ja) * 1985-03-22 1986-09-27 Dainippon Screen Mfg Co Ltd 線幅測定装置
US5206699A (en) 1988-05-06 1993-04-27 Gersan Establishment Sensing a narrow frequency band of radiation and gemstones
GB8816730D0 (en) * 1988-07-14 1988-08-17 Pa Consulting Services Improved vision system
GB8826224D0 (en) * 1988-11-09 1988-12-14 Gersan Anstalt Sensing shape of object
GB2258576A (en) * 1991-08-03 1993-02-10 British Aerospace Space & Comm A visible light detector assembly

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1563570A (en) * 1976-08-19 1980-03-26 Seiko Instr & Electronics Hardness tester
GB2021260B (en) * 1978-03-09 1983-01-12 British Steel Corp Optical gauging of cross-sectional dimensions
GB2052734B (en) * 1979-05-21 1983-10-19 Daystrom Ltd Position and dimension measuring apparaus
GB2058344B (en) * 1979-09-07 1984-01-25 Diffracto Ltd Electro-optical inspection of workpieces
CH643060A5 (de) * 1979-11-20 1984-05-15 Zellweger Uster Ag Verfahren zur bestimmung des durchmessers oder des querschnittes eines faden- oder drahtfoermigen koerpers, vorrichtung zur ausfuehrung des verfahrens, sowie anwendung des verfahrens.
US4394683A (en) * 1980-06-26 1983-07-19 Diffracto Ltd. New photodetector array based optical measurement systems
FR2512949A1 (fr) * 1981-09-16 1983-03-18 Merck Georges Dispositif de mesure optique par eclairage coaxial

Also Published As

Publication number Publication date
GB8418351D0 (en) 1984-08-22
GB2144536A (en) 1985-03-06
DE3428772A1 (de) 1985-02-14

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