JPS6041243A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS6041243A
JPS6041243A JP14941283A JP14941283A JPS6041243A JP S6041243 A JPS6041243 A JP S6041243A JP 14941283 A JP14941283 A JP 14941283A JP 14941283 A JP14941283 A JP 14941283A JP S6041243 A JPS6041243 A JP S6041243A
Authority
JP
Japan
Prior art keywords
oxide film
carbon
film
semiconductor substrate
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14941283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0152900B2 (enrdf_load_stackoverflow
Inventor
Tatsuichi Ko
高　辰一
Jiro Oshima
次郎 大島
Takashi Yasujima
安島　隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP14941283A priority Critical patent/JPS6041243A/ja
Publication of JPS6041243A publication Critical patent/JPS6041243A/ja
Publication of JPH0152900B2 publication Critical patent/JPH0152900B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
JP14941283A 1983-08-16 1983-08-16 半導体装置の製造方法 Granted JPS6041243A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14941283A JPS6041243A (ja) 1983-08-16 1983-08-16 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14941283A JPS6041243A (ja) 1983-08-16 1983-08-16 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS6041243A true JPS6041243A (ja) 1985-03-04
JPH0152900B2 JPH0152900B2 (enrdf_load_stackoverflow) 1989-11-10

Family

ID=15474551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14941283A Granted JPS6041243A (ja) 1983-08-16 1983-08-16 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6041243A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170046U (enrdf_load_stackoverflow) * 1987-04-18 1988-11-04
JPH01259538A (ja) * 1988-04-11 1989-10-17 Agency Of Ind Science & Technol 酸化膜の形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170046U (enrdf_load_stackoverflow) * 1987-04-18 1988-11-04
JPH01259538A (ja) * 1988-04-11 1989-10-17 Agency Of Ind Science & Technol 酸化膜の形成方法

Also Published As

Publication number Publication date
JPH0152900B2 (enrdf_load_stackoverflow) 1989-11-10

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