Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EEJA Ltd
Original Assignee
Electroplating Engineers of Japan Ltd
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Filing date
Publication date
Application filed by Electroplating Engineers of Japan LtdfiledCriticalElectroplating Engineers of Japan Ltd
Priority to JP14500083ApriorityCriticalpatent/JPS6039192A/ja
Publication of JPS6039192ApublicationCriticalpatent/JPS6039192A/ja
Publication of JPH0440437B2publicationCriticalpatent/JPH0440437B2/ja
Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces