JPS6038609A - 板形状測定装置 - Google Patents

板形状測定装置

Info

Publication number
JPS6038609A
JPS6038609A JP58147248A JP14724883A JPS6038609A JP S6038609 A JPS6038609 A JP S6038609A JP 58147248 A JP58147248 A JP 58147248A JP 14724883 A JP14724883 A JP 14724883A JP S6038609 A JPS6038609 A JP S6038609A
Authority
JP
Japan
Prior art keywords
signal
slicer
view
edge
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58147248A
Other languages
English (en)
Japanese (ja)
Other versions
JPH045123B2 (enExample
Inventor
Tomoaki Kawabata
川畑　友明
Kiyotaka Inada
稲田　清崇
Sueo Miyaki
宮木　末雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Nippon Steel Corp
Original Assignee
Hamamatsu Photonics KK
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK, Sumitomo Metal Industries Ltd filed Critical Hamamatsu Photonics KK
Priority to JP58147248A priority Critical patent/JPS6038609A/ja
Publication of JPS6038609A publication Critical patent/JPS6038609A/ja
Publication of JPH045123B2 publication Critical patent/JPH045123B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP58147248A 1983-08-10 1983-08-10 板形状測定装置 Granted JPS6038609A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58147248A JPS6038609A (ja) 1983-08-10 1983-08-10 板形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58147248A JPS6038609A (ja) 1983-08-10 1983-08-10 板形状測定装置

Publications (2)

Publication Number Publication Date
JPS6038609A true JPS6038609A (ja) 1985-02-28
JPH045123B2 JPH045123B2 (enExample) 1992-01-30

Family

ID=15425930

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58147248A Granted JPS6038609A (ja) 1983-08-10 1983-08-10 板形状測定装置

Country Status (1)

Country Link
JP (1) JPS6038609A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239406A (ja) * 1988-03-22 1989-09-25 Agency Of Ind Science & Technol 形状測定方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50111941A (enExample) * 1974-02-12 1975-09-03
JPS5744806A (en) * 1980-08-29 1982-03-13 Sumitomo Metal Ind Ltd Method of two-dimensional measurement for pattern
JPS58160305U (ja) * 1982-04-20 1983-10-25 株式会社東芝 形状検出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50111941A (enExample) * 1974-02-12 1975-09-03
JPS5744806A (en) * 1980-08-29 1982-03-13 Sumitomo Metal Ind Ltd Method of two-dimensional measurement for pattern
JPS58160305U (ja) * 1982-04-20 1983-10-25 株式会社東芝 形状検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239406A (ja) * 1988-03-22 1989-09-25 Agency Of Ind Science & Technol 形状測定方法

Also Published As

Publication number Publication date
JPH045123B2 (enExample) 1992-01-30

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