JPS6036838A - 清浄室装置 - Google Patents

清浄室装置

Info

Publication number
JPS6036838A
JPS6036838A JP59121704A JP12170484A JPS6036838A JP S6036838 A JPS6036838 A JP S6036838A JP 59121704 A JP59121704 A JP 59121704A JP 12170484 A JP12170484 A JP 12170484A JP S6036838 A JPS6036838 A JP S6036838A
Authority
JP
Japan
Prior art keywords
air
zone
clean
outlet
performance filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59121704A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0515934B2 (enrdf_load_stackoverflow
Inventor
Katsuto Yagi
八木　克人
Kozo Takahashi
高橋　耕造
Yuji Isayama
諌山　雄二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59121704A priority Critical patent/JPS6036838A/ja
Publication of JPS6036838A publication Critical patent/JPS6036838A/ja
Publication of JPH0515934B2 publication Critical patent/JPH0515934B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP59121704A 1984-06-15 1984-06-15 清浄室装置 Granted JPS6036838A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59121704A JPS6036838A (ja) 1984-06-15 1984-06-15 清浄室装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59121704A JPS6036838A (ja) 1984-06-15 1984-06-15 清浄室装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57008851A Division JPS58127033A (ja) 1982-01-25 1982-01-25 清浄室装置

Publications (2)

Publication Number Publication Date
JPS6036838A true JPS6036838A (ja) 1985-02-26
JPH0515934B2 JPH0515934B2 (enrdf_load_stackoverflow) 1993-03-03

Family

ID=14817811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59121704A Granted JPS6036838A (ja) 1984-06-15 1984-06-15 清浄室装置

Country Status (1)

Country Link
JP (1) JPS6036838A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243236A (ja) * 1985-04-19 1986-10-29 Hitachi Ltd 清浄作業室
JPS62130330U (enrdf_load_stackoverflow) * 1986-02-08 1987-08-18
JPS62165000U (enrdf_load_stackoverflow) * 1986-04-07 1987-10-20
JP2015068562A (ja) * 2013-09-30 2015-04-13 株式会社日立産機システム ファンフィルタユニット
IT201800009437A1 (it) * 2018-10-15 2020-04-15 Weightpack Srl Macchina per il riempimento e la tappatura di contenitori
WO2024170496A1 (en) * 2023-02-15 2024-08-22 ABN Cleanroom Technology N.V. System and method for ventilating a climate chamber

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162335A (en) * 1980-05-16 1981-12-14 Hitachi Ltd Air conditioner

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56162335A (en) * 1980-05-16 1981-12-14 Hitachi Ltd Air conditioner

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243236A (ja) * 1985-04-19 1986-10-29 Hitachi Ltd 清浄作業室
JPS62130330U (enrdf_load_stackoverflow) * 1986-02-08 1987-08-18
JPS62165000U (enrdf_load_stackoverflow) * 1986-04-07 1987-10-20
JP2015068562A (ja) * 2013-09-30 2015-04-13 株式会社日立産機システム ファンフィルタユニット
IT201800009437A1 (it) * 2018-10-15 2020-04-15 Weightpack Srl Macchina per il riempimento e la tappatura di contenitori
WO2024170496A1 (en) * 2023-02-15 2024-08-22 ABN Cleanroom Technology N.V. System and method for ventilating a climate chamber
BE1031344B1 (nl) * 2023-02-15 2024-09-16 Abn Cleanroom Tech N V Inrichting en werkwijze voor het ventileren van een klimaatkamer

Also Published As

Publication number Publication date
JPH0515934B2 (enrdf_load_stackoverflow) 1993-03-03

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