JPS6036648A - 高真空容器用材料及びその製造方法 - Google Patents
高真空容器用材料及びその製造方法Info
- Publication number
- JPS6036648A JPS6036648A JP14441983A JP14441983A JPS6036648A JP S6036648 A JPS6036648 A JP S6036648A JP 14441983 A JP14441983 A JP 14441983A JP 14441983 A JP14441983 A JP 14441983A JP S6036648 A JPS6036648 A JP S6036648A
- Authority
- JP
- Japan
- Prior art keywords
- boron nitride
- alloy
- vacuum
- high vacuum
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims description 8
- 229910052582 BN Inorganic materials 0.000 claims description 16
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 16
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 229910000963 austenitic stainless steel Inorganic materials 0.000 claims description 4
- 239000002244 precipitate Substances 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012611 container material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 241001174990 Boros Species 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001257 Nb alloy Inorganic materials 0.000 description 1
- 229910000979 O alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Other Surface Treatments For Metallic Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441983A JPS6036648A (ja) | 1983-08-09 | 1983-08-09 | 高真空容器用材料及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441983A JPS6036648A (ja) | 1983-08-09 | 1983-08-09 | 高真空容器用材料及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6036648A true JPS6036648A (ja) | 1985-02-25 |
| JPS6239234B2 JPS6239234B2 (enrdf_load_stackoverflow) | 1987-08-21 |
Family
ID=15361734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14441983A Granted JPS6036648A (ja) | 1983-08-09 | 1983-08-09 | 高真空容器用材料及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6036648A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63266057A (ja) * | 1986-12-16 | 1988-11-02 | Nkk Corp | オーステナイトステンレス鋼材の製造法 |
| US5192409A (en) * | 1990-03-09 | 1993-03-09 | National Research Institute For Metals | Method of sputtering a mixture of hexagonal boron nitride and stainless steel onto a steel vessel and heating the film so as to precipitate the boron nitride onto the film surface |
| US5478524A (en) * | 1992-08-24 | 1995-12-26 | Nissan Motor Co., Ltd. | Super high vacuum vessel |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06346221A (ja) * | 1993-06-15 | 1994-12-20 | Tadahiro Omi | 超高純度ガス供給系用部材または部品 |
-
1983
- 1983-08-09 JP JP14441983A patent/JPS6036648A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63266057A (ja) * | 1986-12-16 | 1988-11-02 | Nkk Corp | オーステナイトステンレス鋼材の製造法 |
| US5192409A (en) * | 1990-03-09 | 1993-03-09 | National Research Institute For Metals | Method of sputtering a mixture of hexagonal boron nitride and stainless steel onto a steel vessel and heating the film so as to precipitate the boron nitride onto the film surface |
| US5478524A (en) * | 1992-08-24 | 1995-12-26 | Nissan Motor Co., Ltd. | Super high vacuum vessel |
| US5683523A (en) * | 1992-08-24 | 1997-11-04 | Nissan Motor Co., Ltd. | Titanium alloy for super high vacuum vessels |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6239234B2 (enrdf_load_stackoverflow) | 1987-08-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US2351798A (en) | Coating metal articles | |
| US3061462A (en) | Metallic diffusion processes | |
| US4156042A (en) | Coating articles having fine bores or narrow cavities in a pack-cementation process | |
| JPH06228769A (ja) | 被膜形成方法およびその方法によって被着される金属あるいはセラミックの物体 | |
| US4024294A (en) | Protective coatings for superalloys | |
| US1178551A (en) | Cementation and hardening of iron and steel articles. | |
| US1902503A (en) | Process for coating metals | |
| US2866724A (en) | Coated evaporating elements and method of utilizing same | |
| JPS6245305B2 (enrdf_load_stackoverflow) | ||
| US3249462A (en) | Metal diffusion coating utilizing fluidized bed | |
| Dong et al. | Fabrication of protective tantalum carbide coatings on carbon fibers using a molten salt method | |
| JPS6036648A (ja) | 高真空容器用材料及びその製造方法 | |
| US6340398B1 (en) | Oxidation protective coating for Mo-Si-B alloys | |
| JPH01165755A (ja) | 高温に敏感な製品を硬質層で被覆する方法および被覆製品 | |
| US2097024A (en) | Production of a protective layer on iron | |
| US2866725A (en) | Coated evaporating elements and method of utilizing same | |
| GB722915A (en) | Process for producing a hard and wear-resistant surface on ferrous bodies | |
| US3795537A (en) | Hard diffusion formed reaction coatings | |
| JPS61194171A (ja) | 基板上に形成させたＭｏＢＮ膜の表面に窒化ボロンを析出させた積層材料の製造方法 | |
| JPS5950177A (ja) | 密着性に優れた金属表面処理法 | |
| US3335028A (en) | Complex fluoro salt cementation method for coating refractory metallic substrates | |
| JPH07500874A (ja) | 坩堝及びその使用方法 | |
| JPS59166681A (ja) | 耐食部材 | |
| JPS59136415A (ja) | 高透磁率合金膜の製造方法 | |
| JPH0664738B2 (ja) | 磁性体薄膜の製造方法 |