JPS6036648A - Material for high vacuum vessel - Google Patents
Material for high vacuum vesselInfo
- Publication number
- JPS6036648A JPS6036648A JP14441983A JP14441983A JPS6036648A JP S6036648 A JPS6036648 A JP S6036648A JP 14441983 A JP14441983 A JP 14441983A JP 14441983 A JP14441983 A JP 14441983A JP S6036648 A JPS6036648 A JP S6036648A
- Authority
- JP
- Japan
- Prior art keywords
- boron nitride
- alloy
- vacuum
- high vacuum
- heated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 title claims description 8
- 229910052582 BN Inorganic materials 0.000 claims description 16
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 16
- 229910045601 alloy Inorganic materials 0.000 claims description 12
- 239000000956 alloy Substances 0.000 claims description 12
- 229910000963 austenitic stainless steel Inorganic materials 0.000 claims description 4
- 239000002244 precipitate Substances 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012611 container material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 241001174990 Boros Species 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001257 Nb alloy Inorganic materials 0.000 description 1
- 229910000979 O alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
本発明は高實空容器用、特に超高貢空容器用に好適な材
料に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a material suitable for high-density empty containers, particularly for ultra-high-density empty containers.
従来、真空容器用材料と（７てｒａｔ通常ステンレス鋼
が用１ハられている。ステンレス鋼￥ｔその表面に包、
体が付５ａ（〜易く、超高真空にするためには容器全体
を１５０〜２ｏｏ℃、場合によって約５００℃にまで加
熱する必要があり、かつ超高真空に達するまでに長時間
を必賛とする欠点があつだ。Traditionally, stainless steel has been used as a material for vacuum containers.
The body is 5a (easy to do, in order to create an ultra-high vacuum it is necessary to heat the entire container to 150-200°C, in some cases up to about 500°C, and it is necessary to take a long time to reach an ultra-high vacuum. There are some drawbacks.
そのため、容器材料の表面に気体の付着に対して不活性
になるような表面処理を行う必要がある。ｑ、化ボロン
は気体の付着に対１−２で不活性な性質を有するが、こ
れを従来技術である化学的気相蒸着法により表面に呻覆
しようとすると、材料を１０１１０〜２０００℃という
非常に高い温度に細針しなけれげなら々く、その操作も
面倒である欠点がある。Therefore, it is necessary to perform a surface treatment on the surface of the container material to make it inactive against gas adhesion. Q. Boron chloride has a property of being inert with respect to gas adhesion, but when trying to coat it on the surface using the conventional chemical vapor deposition method, the temperature of the material is 10110-2000℃. The drawback is that the needle must be heated to a very high temperature and the operation is troublesome.
本発明はこのようた欠点がなく、比較的低温で、目一つ
容易に窒化ボロン皮膜を析出し得られ、表面をヴ体の付
着に対して不活性なものとしだ高真空容器用材料を提供
するにある。The present invention does not have such drawbacks, and can easily deposit a boron nitride film at a relatively low temperature, making the surface inert to the adhesion of substances, and providing a material for high vacuum containers. It is on offer.
本発明者は前記目的を達成すべく鉄量研究の結果 チタ
ンを含まないオーステナイト系ステｙ し７鋼の成分に
、Ｎ ’！＜ ０．１〜０．３ ％ 、Ｂを０００５へ
−０，０２係、Ｃ（・を０００１〜０．１係を添加し２
″＃Ｏ合金を真空中で７００℃程背に加熱すると、合金
内部から表面に窒化ボロンが析出１７て均一な皮膜が形
成し得らね、これにより合金表面を気体の付着に対して
不活性になし得られることを究明し得た。この知見に基
づいて本発明を完成した。In order to achieve the above object, the present inventor conducted research on the amount of iron and found that N'! < 0.1~0.3%, B to 0005 by -0.02 parts, C(・0001~0.1 parts added to 2
``When #O alloy is heated to about 700℃ in a vacuum, boron nitride precipitates from inside the alloy to the surface17 and a uniform film cannot be formed.This makes the alloy surface inert to gas adhesion. The present invention was completed based on this knowledge.
本発明の高真空容器用材料は、チタンを含まないオース
テナイト系ステンレス鋼の成分に１Ｎを０．１〜０．３
％、Ｂ ｆｃＯ，ｎ Ｏ５〜０．０２ ％、Ｃ】ｅを０
００１〜０．１チを添加した合金を、真空中で加熱して
表面に窒化ボロンを析出させて皮膜を形成させたもので
ある。The high-vacuum container material of the present invention contains 0.1 to 0.3 1N of titanium-free austenitic stainless steel.
%, B fcO,n O5 ~ 0.02 %, C】e 0
An alloy to which 0.001 to 0.1 h is added is heated in a vacuum to precipitate boron nitride on the surface to form a film.
オーステナイト系ステンレス鋼成分中にチタンが含まれ
ていると、真空中での加熱によりチタン炭化物が表面に
析出して窒化ボロンの析出が困難となるので、チタンが
含着れていてはいけない。If titanium is included in the austenitic stainless steel components, titanium carbide will precipitate on the surface when heated in vacuum, making it difficult to precipitate boron nitride, so titanium must not be included.
チタンを含着ないオーステナイト系ステンレス鋼の成分
は、炭素ｎ、ｔ５循以下、Ｓｉ１．００係以下、Ｍ’ｎ
２．００ ％以下、Ｐｏ、０４０１以下、５００３０
チ以下で、Ｎｉ６〜２６％、（］ｒ１６〜２６％、Ｅｌ
（・残り、の基本成分に、Ｎｂ、Ｍｏ等を加えたもので
ある。The composition of austenitic stainless steel that does not contain titanium is carbon n, t5 cycle or less, Si 1.00 coefficient or less, M'n
2.00% or less, Po, 0401 or less, 50030
Ni6-26%, (]r16-26%, El
(・Nb, Mo, etc. are added to the basic components of the remainder.
これらの鋼成分に添加するＮ、Ｂは表面に析ａ
出する窒化ボロンの原料であり参千は均一に窒化ボロン
を析出させる作用をする。Ｎ、Ｂ及びＯｅの添加量は、
それぞれ、０．１〜０３チ、０００５〜０．０２％、０
００１〜０１％であることが必要である。Ｎが０３チ、
Ｉ３がｎ（１２’％、Ｏｅが０．１％を超えると、加工
ｉ４ユが悲くなり、才だ、ＮがＥｌチ、■３が０．００
５％ｕ：り少ないと真空中で加熱ｊ〜ても窒化ボロンが
析出しなく、Ｏｅがｏ、ｏｏｘ％より少ないと窒化ボロ
ンを均一に析出し得々くなる。表面に窒化ボロンを析出
させるには、１０４Ｉ）ａ以下、好ｔ １．、 ＜ばｌ
Ｏ−’、ｌ ｆｌ ’ Ｆ’ａ （Ｊ’）真空中で７
００℃Ｌノ、−ヒに加熱する。これにより合金内部から
表面に窒化ボロンが析出（−７て皮膜が形成される。N and B added to these steel components are the raw materials for boron nitride that precipitates on the surface, and act to uniformly precipitate boron nitride. The amounts of N, B and Oe added are:
respectively, 0.1~03chi, 0005~0.02%, 0
It is necessary that it is 001 to 01%. N is 03chi,
When I3 exceeds n(12'%, Oe exceeds 0.1%, processing i4yu becomes sad, it is sai, N is Elchi, ■3 is 0.00
If Oe is less than 5% U, boron nitride will not precipitate even if heated in vacuum, and if Oe is less than O or Oox%, boron nitride will be uniformly precipitated. In order to precipitate boron nitride on the surface, 104I)a or less, preferably t1. , <bal
O-', l fl 'F'a(J') 7 in vacuum
Heat to 00°C. As a result, boron nitride is deposited from the inside of the alloy to the surface (-7) and a film is formed.
本発明の♀化ボロン皮暎により被覆された合金を用いた
真空容器は、窒化ボロンが気体の付着に対し７て不活性
なため、容器全体を気体を脱着でせ７．−＃、めに加熱
する必要はなく、オた短時間で超高真空に達し２得られ
る。The vacuum container using the alloy coated with the boron nitride of the present invention is inert to the adhesion of gas, so the entire container can be used for desorption of gas. - #, There is no need to heat it, and ultra-high vacuum can be reached in a short time.
また、合金表面に窒化ボロン皮膜を形成させるに際（−
５２、高価な蒸着装置を必要とせず、真空中での加熱に
より容易に得られ、しかも合金内部から表面に窒化ボロ
ン皮膜を析出させるため、複雛な形状のものでも、極め
て均一に皮膜を形成し得られる。また、使用中に窒化ボ
ロン皮膜が破損しても外部からの加熱だけで再び該皮膜
を析出させることによって補修し得られる等、優れた効
果を奏し得られる。In addition, when forming a boron nitride film on the alloy surface, (-
52. It does not require expensive vapor deposition equipment and can be easily obtained by heating in a vacuum, and since the boron nitride film is deposited from the inside of the alloy to the surface, it forms an extremely uniform film even on complex shapes. can be obtained. In addition, even if the boron nitride film is damaged during use, it can be repaired by depositing the film again simply by applying external heat, resulting in excellent effects.
実施例
５ＵＳ３０４ステンレス鋼成分に、Ｎを０１７俤、Ｂを
ｏ、ｏｏｓｓ、及びＯｅをｏ、ｏｏ４％添加した合金（
以下、８ＵＳ３０４−ＮＢｎｅ合金と言う）、 及び５
ＴＪＳ３０４ステンレス鋼成分にＮを０１６％、Ｂを０
．０１％添加した合金（以下５ＵＳ３０４−ＮＢ合金と
言う）を使用した。これらの合金の網成は表１５−
これらの合金を真空中（ｌｏ’Ｐａ）で７００℃以上に
加熱したところ、両方の合金とも合金内部から表面に窒
化ボロンが析出し皮膜を形成（−７た。しかし、５ＵＳ
３０４−ＮＢの表面上に析出し、た窒化ボロ／皮膜は下
記表に示すように不均一であったが、８Ｕ８３０４−Ｎ
ＢＯｅの表面上に析出したそれは均一であった。Example 5 An alloy in which 0.17% of N, 0.01% of B, 4% of Oe, and 4% of Oe were added to US304 stainless steel (
(hereinafter referred to as 8US304-NBne alloy), and 5
TJS304 stainless steel ingredients include 0.16% N and 0 B.
．． 01% (hereinafter referred to as 5US304-NB alloy) was used. The network composition of these alloys is shown in Table 15. However, 5 US
The nitride boros/film deposited on the surface of 304-NB was non-uniform as shown in the table below, but 8U8304-N
It was uniformly deposited on the surface of BOe.
これらの表面に窒化ボロｙを析出させた合金及び５ＵＳ
３０４の各々に空気を触れさせた後、表面に付着した気
体の量を測定り、 ＋結果は表２に示す通特許出願人
科学技術庁金属材料技術研究所長−〇−Alloys with boron nitride precipitated on these surfaces and 5US
After exposing each of 304 to air, the amount of gas attached to the surface was measured, and the results are shown in Table 2.
Director, Institute of Metals and Materials Technology, Science and Technology Agency -〇-
Claims (1)
にＮを０．１−１１．３％、Ｂを０．００５〜００２チ
、Ｏｅを０．００１〜０．１．４を添加した合金を、勇
空中で加熱して表面に窒化ボロン皮膜を析出させて皮膜
を形成させたものからなる高真空容器用材料、An alloy containing titanium-free austenitic stainless steel with 0.1-11.3% of N, 0.005-002% of B, and 0.001-0.1.4% of Oe is heated in the hot air. A material for high vacuum containers, which is made of a material that is heated to form a boron nitride film on the surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441983A JPS6036648A (en) | 1983-08-09 | 1983-08-09 | Material for high vacuum vessel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14441983A JPS6036648A (en) | 1983-08-09 | 1983-08-09 | Material for high vacuum vessel |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6036648A true JPS6036648A (en) | 1985-02-25 |
| JPS6239234B2 JPS6239234B2 (en) | 1987-08-21 |
Family
ID=15361734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14441983A Granted JPS6036648A (en) | 1983-08-09 | 1983-08-09 | Material for high vacuum vessel |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6036648A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63266057A (en) * | 1986-12-16 | 1988-11-02 | Nkk Corp | Manufacturing method of austenitic stainless steel material |
| US5192409A (en) * | 1990-03-09 | 1993-03-09 | National Research Institute For Metals | Method of sputtering a mixture of hexagonal boron nitride and stainless steel onto a steel vessel and heating the film so as to precipitate the boron nitride onto the film surface |
| US5478524A (en) * | 1992-08-24 | 1995-12-26 | Nissan Motor Co., Ltd. | Super high vacuum vessel |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06346221A (en) * | 1993-06-15 | 1994-12-20 | Tadahiro Omi | Member or parts for ultrahigh purity gas feeding system |
-
1983
- 1983-08-09 JP JP14441983A patent/JPS6036648A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63266057A (en) * | 1986-12-16 | 1988-11-02 | Nkk Corp | Manufacturing method of austenitic stainless steel material |
| US5192409A (en) * | 1990-03-09 | 1993-03-09 | National Research Institute For Metals | Method of sputtering a mixture of hexagonal boron nitride and stainless steel onto a steel vessel and heating the film so as to precipitate the boron nitride onto the film surface |
| US5478524A (en) * | 1992-08-24 | 1995-12-26 | Nissan Motor Co., Ltd. | Super high vacuum vessel |
| US5683523A (en) * | 1992-08-24 | 1997-11-04 | Nissan Motor Co., Ltd. | Titanium alloy for super high vacuum vessels |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6239234B2 (en) | 1987-08-21 |
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