JPS6034594U - 縦型タ−ボ分子ポンプ - Google Patents

縦型タ−ボ分子ポンプ

Info

Publication number
JPS6034594U
JPS6034594U JP12661383U JP12661383U JPS6034594U JP S6034594 U JPS6034594 U JP S6034594U JP 12661383 U JP12661383 U JP 12661383U JP 12661383 U JP12661383 U JP 12661383U JP S6034594 U JPS6034594 U JP S6034594U
Authority
JP
Japan
Prior art keywords
rotor
base
molecular pump
vertical turbo
turbo molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12661383U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6332393Y2 (enrdf_load_stackoverflow
Inventor
石沢　資男
Original Assignee
セイコー精機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコー精機株式会社 filed Critical セイコー精機株式会社
Priority to JP12661383U priority Critical patent/JPS6034594U/ja
Priority to GB08419569A priority patent/GB2146073B/en
Priority to DE19843429137 priority patent/DE3429137A1/de
Priority to FR8412535A priority patent/FR2550829B1/fr
Publication of JPS6034594U publication Critical patent/JPS6034594U/ja
Application granted granted Critical
Publication of JPS6332393Y2 publication Critical patent/JPS6332393Y2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/403—Casings; Connections of working fluid especially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP12661383U 1983-08-16 1983-08-16 縦型タ−ボ分子ポンプ Granted JPS6034594U (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP12661383U JPS6034594U (ja) 1983-08-16 1983-08-16 縦型タ−ボ分子ポンプ
GB08419569A GB2146073B (en) 1983-08-16 1984-08-01 Turbomolecular pumps
DE19843429137 DE3429137A1 (de) 1983-08-16 1984-08-08 Turbomolekularpumpe
FR8412535A FR2550829B1 (fr) 1983-08-16 1984-08-08 Pompe turbo-moleculaire verticale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12661383U JPS6034594U (ja) 1983-08-16 1983-08-16 縦型タ−ボ分子ポンプ

Publications (2)

Publication Number Publication Date
JPS6034594U true JPS6034594U (ja) 1985-03-09
JPS6332393Y2 JPS6332393Y2 (enrdf_load_stackoverflow) 1988-08-29

Family

ID=14939531

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12661383U Granted JPS6034594U (ja) 1983-08-16 1983-08-16 縦型タ−ボ分子ポンプ

Country Status (4)

Country Link
JP (1) JPS6034594U (enrdf_load_stackoverflow)
DE (1) DE3429137A1 (enrdf_load_stackoverflow)
FR (1) FR2550829B1 (enrdf_load_stackoverflow)
GB (1) GB2146073B (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
DE4237971B4 (de) † 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vakuumpumpe mit Wandler
CN102865250B (zh) * 2012-09-27 2017-04-19 上海华虹宏力半导体制造有限公司 用于半导体制造的泵抽吸端口的遮挡盖

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
BE619944A (fr) * 1961-08-04 1963-01-09 Snecma Pompe à vide turbomoleculaire perfectionnée
FR2224009A5 (enrdf_load_stackoverflow) * 1973-03-30 1974-10-25 Cit Alcatel
DE2349033C3 (de) * 1973-09-29 1984-08-30 Leybold-Heraeus Gmbh, 5000 Koeln Turbomolekularpumpe
DE2354046A1 (de) * 1973-10-29 1975-05-07 Battelle Institut E V Elektrisch angetriebene turbomolekularvakuumpumpe
DE2409857B2 (de) * 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
DE2554995A1 (de) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik Turbomolekularpumpe
DE3032967A1 (de) * 1980-09-02 1982-04-15 Leybold-Heraeus GmbH, 5000 Köln Molekularpumpe, insbesondere turbomolekularpumpe, und damit ausgeruestetes pumpsystem

Also Published As

Publication number Publication date
FR2550829A1 (fr) 1985-02-22
DE3429137A1 (de) 1985-03-07
JPS6332393Y2 (enrdf_load_stackoverflow) 1988-08-29
GB2146073B (en) 1987-04-01
GB2146073A (en) 1985-04-11
DE3429137C2 (enrdf_load_stackoverflow) 1993-08-05
FR2550829B1 (fr) 1988-01-08
GB8419569D0 (en) 1984-09-05

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