JPS6031081Y2 - バツクプレ−ト装置 - Google Patents

バツクプレ−ト装置

Info

Publication number
JPS6031081Y2
JPS6031081Y2 JP12439978U JP12439978U JPS6031081Y2 JP S6031081 Y2 JPS6031081 Y2 JP S6031081Y2 JP 12439978 U JP12439978 U JP 12439978U JP 12439978 U JP12439978 U JP 12439978U JP S6031081 Y2 JPS6031081 Y2 JP S6031081Y2
Authority
JP
Japan
Prior art keywords
front surface
wafer
back plate
wafers
support frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12439978U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5542049U (enExample
Inventor
信博 吉岡
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP12439978U priority Critical patent/JPS6031081Y2/ja
Publication of JPS5542049U publication Critical patent/JPS5542049U/ja
Application granted granted Critical
Publication of JPS6031081Y2 publication Critical patent/JPS6031081Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12439978U 1978-09-12 1978-09-12 バツクプレ−ト装置 Expired JPS6031081Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12439978U JPS6031081Y2 (ja) 1978-09-12 1978-09-12 バツクプレ−ト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12439978U JPS6031081Y2 (ja) 1978-09-12 1978-09-12 バツクプレ−ト装置

Publications (2)

Publication Number Publication Date
JPS5542049U JPS5542049U (enExample) 1980-03-18
JPS6031081Y2 true JPS6031081Y2 (ja) 1985-09-18

Family

ID=29084377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12439978U Expired JPS6031081Y2 (ja) 1978-09-12 1978-09-12 バツクプレ−ト装置

Country Status (1)

Country Link
JP (1) JPS6031081Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58185766A (ja) * 1982-04-21 1983-10-29 Jeol Ltd 膜作成方法

Also Published As

Publication number Publication date
JPS5542049U (enExample) 1980-03-18

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