JPS5542049U - - Google Patents
Info
- Publication number
- JPS5542049U JPS5542049U JP12439978U JP12439978U JPS5542049U JP S5542049 U JPS5542049 U JP S5542049U JP 12439978 U JP12439978 U JP 12439978U JP 12439978 U JP12439978 U JP 12439978U JP S5542049 U JPS5542049 U JP S5542049U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12439978U JPS6031081Y2 (ja) | 1978-09-12 | 1978-09-12 | バツクプレ−ト装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12439978U JPS6031081Y2 (ja) | 1978-09-12 | 1978-09-12 | バツクプレ−ト装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5542049U true JPS5542049U (enExample) | 1980-03-18 |
| JPS6031081Y2 JPS6031081Y2 (ja) | 1985-09-18 |
Family
ID=29084377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12439978U Expired JPS6031081Y2 (ja) | 1978-09-12 | 1978-09-12 | バツクプレ−ト装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6031081Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58185766A (ja) * | 1982-04-21 | 1983-10-29 | Jeol Ltd | 膜作成方法 |
-
1978
- 1978-09-12 JP JP12439978U patent/JPS6031081Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58185766A (ja) * | 1982-04-21 | 1983-10-29 | Jeol Ltd | 膜作成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6031081Y2 (ja) | 1985-09-18 |