JPS6029952A - Electron beam recording disk - Google Patents

Abstract

PURPOSE:To obtain an electronic disk which can guide easily an electron beam onto a track with a large recording capacity per unit area, by forming belt- shaped projected or hollowed areas spirally or concentrically on the disk in the form of an information recording track. CONSTITUTION:The belt-shaped projected or hollowed areas are formed spirally or concentrically on a disk as an information recording track A. It is desirable to use tellurium, selenium, antimony or a compound of these elements. While a silicon disk member is used desirably to the disk. The means C and C' which detect the electron beams, X rays, etc. are set at both sides of the track A and the areas near the positions where an electron beam B is irradiated to the disk. There is no difference between the outputs of both means C and C' while the beam B is irradiated on the track A. While if the beam B has a shift toward B' or B'', the input of the detecting means where the beam B has the shift is increased compared with the other detecting means. Therefore the beam B is deflected to the side where the output of the means is small. As a result, the beam B is always irradiated on the track A.

Description

Detailed Description of the Invention (1) Technical Field of the Invention The present invention relates to an electron beam recording medium which is an information recording medium used in an electron beam recording and reproducing device that records and reproduces information using an electron beam. Concerning improvements to discs.

(2) Background of the Technology Magnetic disk devices, optical disk devices, and even laser disk devices are known as devices for recording and reproducing information provided in the form of electrical pulse signals and the like.

These information recording and reproducing devices convert information input as electrical signals into magnetic flux signals, optical signals, laser signals, etc.
Using these converted signals, physical and chemical changes are applied to the disk-shaped information recording medium to write information, and changes in some physical quantity caused by these physical and chemical changes are detected to read the information. This is the basic principle.

With the information writing/reading medium described above, the recording capacity per unit area of the information recording disk serving as the information recording medium was not satisfactory.

This drawback is caused by the various signal media mentioned above, namely magnetic flux, light,
Focusing on the fact that there is a limit to the lower limit of the cross-sectional area when forming a fine beam using a laser, etc., we developed an electron beam recording/reproducing device that uses an electron beam as a signal medium, which can produce a finer beam. In this electron beam recording/reproducing device, the area required for 1 bit is reduced to 5
It has been confirmed that it will decrease to about 00A x 500A. This electron beam recording and reproducing apparatus writes information on an information recording disk by using a fine electron beam that embodies information to create a fine aperture based on physical and chemical changes such as melting of the electron beam irradiation point. Difference between a certain physical quantity obtained from an area where information is written and the same physical quantity obtained from an area where information is not written, such as secondary electron emission amount, backscattered electron emission amount, X-ray emission amount, fluorescence amount, and phosphorescence amount The information is read by detecting the difference between the two.

3. Problems with the prior art However, the electron beam recording disk in the prior art has
Since a flat disk with no irregularities on its surface was used, it was difficult to guide the electron beam onto a track with a minute width, and as a result, the information recording track on which information was recorded was difficult to guide. Even though it is difficult to reduce the width to less than about 1 l, and the diameter of the electron beam itself can be reduced to about 50A, the recording capacity per unit area of the electron beam information recording disk can be sufficiently improved. The drawback was that it could not be done.

(4) Purpose of the Invention The purpose of the present invention is to eliminate this drawback, and to provide an electron beam recording disk in which it is easy to guide an electron beam onto a track and which has a large recording capacity per unit area. It is in.

(5) Structure of the Invention The structure of the present invention resides in an electron beam recording disk in which an information recording track is a belt-like convex or concave region formed in a spiral or concentric manner on the disk. The band-shaped convex portions or concave portions constituting the information recording track are preferably made of tellurium, selenium, antimony, or a compound thereof, and the disk is preferably a disk member made of silicon.

In the present invention, as shown in FIG. 1, tracks A of an electron beam recording disk are arranged in a spiral or concentric manner.

At least two electron beams are formed in a circular belt-like convex part (or concave part), and sandwich the track A in the vicinity of the position where the electron beam B is irradiated onto the electron beam recording disk. , X-rays, or means for detecting light c.
, c' are provided, and when the electron beam B is irradiated onto the track A as shown in the figure, two detection means c,
There is no difference in the output of c', but when the electron beam B shifts to the right in the figure as shown with Bo, the input of the detection means C becomes larger than the input of the detection means C°, so the detection means c is always , c' are compared, and the electron beam is polarized to the side with the smaller output (to the right in the figure) so that the track A is always irradiated with the electron beam B. When the electron beam B shifts to the right in the figure as shown by 8'', the above relationship is completely reversed and the electron beam B is pulled back to the left in the figure.

Since the electron beam can be focused to a diameter of about 50A, the width of the top of track 1 is 0. It can be reduced to the level of Ig intestine. In addition, the distance between the tracks is also 0.1
Since the recording capacity per unit area can be increased to about 108 bits/2, the recording capacity per disk can be about 1011 bits. Additionally, the track can also be configured with four parts instead of the belt-like convex part.

(6) Embodiment of the Invention An electron beam recording disk according to an embodiment of the present invention will be further described below with reference to one drawing.

Refer to Figure 2, it is made of silicone with a thickness of 2.0cm and is deposited on a disk 1 with a diameter of 20cm to a thickness of 500λ using magnetron sputtering.
A tellurium thin film 2 is formed, and a resist (PM
MA) was dissolved in a solvent (MEK), spin-coded, and 0
．． A resist film 3 having a thickness of 1 g is formed.

This circular plate is prebaked at a temperature of about 170° C. for about 30 minutes to sufficiently bond the resist film 3 and the tellurium thin film 2.

Refer to FIGS. 3 and 4. Using the electron beam lithography method, the resist film 3 is
After exposure in a concentric or spiral pattern with a width of 0.1 gm and an interval of 0.1 gm, the exposed area was treated with isopropyl alcohol and methyl impropyl alcohol (3 = 1).
The mixture is dissolved and removed to form an etching mask 3° having this shape.

Refer to Fig. 5. After post-baking at a temperature of about 130°C for about 30 minutes, the tellurium thin film 2 is etched by a plasma etching method to form a tellurium layer 2° consisting of spiral or concentric belt-shaped protrusions. Form. At this time, it is essential that the side surfaces of the tellurium layer 2° are sloped as shown in the figure, but when etching is performed using the above method, the above requirements are satisfied without any special considerations.

The resist mask 3' is dissolved and removed by immersion in acetone for about 5 minutes.

When recording and reproducing information using the electron beam recording disk manufactured as described above, it is necessary to use an electron beam recording and reproducing apparatus as shown in FIG.

Referring to FIG. 6, reference numeral 11 denotes a tungsten filament type electron gun, which emits an electron beam 12 accelerated to about 50 KeV. Reference numeral 13 denotes an electron beam focusing device, which focuses the electron beam 12 to a diameter of about 500A. A deflector 14 tracks or changes the information recording track in accordance with the clock 15. 1B is an information recording disk,
As mentioned above, a tellurium film is formed to a thickness of 500 Å on a silicon wafer having a diameter of 20 cm, and information recording tracks are provided in a spiral or concentric pattern. l? is a disk rotation motor and rotates following the clock 15. 18 is an information readout control device and an electron beam.

It detects X-rays, light, etc. 12' and outputs an information signal in synchronization with the clock 15.

18. 18° is a means for detecting an electron beam, an X-ray, or a light beam, and is provided with a track in between near the area where the electron beam 12 is irradiated onto the disk 18, and its output is compared by a comparison circuit 20. The polarizer 14 is controlled according to the difference, so that the electron beam 12 is always kept on track.

Note that the internal pressure of this device is maintained at a vacuum state of about 1 G-3 Pa. Therefore, vacuum pump 22 and valve 2
2° is provided.

Note that information is written from the electron gun 11 to the disk 1B, which is also rotating in synchronization with the clock 15 signal, by writing binary information that embodies the information in synchronization with the clock 15 signal.
This is done by irradiating an electron beam 12 toward the disk 16 to form an opening on the disk 16.

On the other hand, to read information, an electron beam 12 is irradiated from an electron gun 11 toward a disk 16 rotating in synchronization with a clock 15 signal, and secondary electrons, reflected electrons, A detector 1 that detects X-rays, fluorescence, phosphorescence, etc. also operates in synchronization with a clock 15.
8 to detect and output.

In either operation, the detectors 1B and 19° detect the reflected signals of the disk 16, calculate the difference between them, and apply a correction signal to the polarizer 14, so that the electron beam 12' is always track-shaped. Functions to be retained.

(7) As described in detail, according to the present invention, it is possible to easily guide an electron beam onto a track, and to provide an electron beam recording disk having a large recording capacity per unit area.

[Brief explanation of drawings]

FIG. 1 is an explanatory diagram for explaining the present invention in detail. 2.3.4.5 are a cross-sectional view, a cross-sectional view, a plan view, and a cross-sectional view, respectively, after completion of the main manufacturing process of the electron beam recording disk according to the embodiment of the present invention. FIG. 6 is an explanatory diagram for explaining the usage state of the electron beam recording disk according to the embodiment of the present invention. A...Track of an electron beam recording disk, B. Electron beam, c, c'...Means for detecting electron beams, X-rays, and light rays, l-...Silicon substrate, 2...Tellurium. Thin film, 2′Φ...tellurium.

Claims (3)

[Claims] (1) An electron beam recording disk in which an information recording track is a band-shaped convex or concave area formed in a spiral or concentric manner on the disk. (2) The band-shaped convex or concave regions are made of tellurium, selenium,
The electron beam recording disk according to claim 1, which is antimony or a compound thereof. (3) The electron beam recording disk according to claim 1 or 2, wherein the disk is a disk-shaped member made of silicon.