JPS62257647A - Electron ray recording device - Google Patents

Abstract

PURPOSE:To eliminate the need for a rotating mechanism and to simplify a device by fixing a disk substrate and making scanning over the substrate by the electron rays radiated from an electron gun, thereby executing recording and reproduction. CONSTITUTION:A Te film is deposited by evaporation to 200Angstrom thickness on the Si substrate to form an electron ray recording medium. Electrons are drawn out of the electron gun 4 and are focused by an electron ray beam focusing system 7 and thereafter, the beam is concentrically scanned by a polariscope 8 to bore holes to the Te film, by which information is recorded. Reproduction is executed by scanning the tracks recorded with the information in the state of weakening the electron ray intensity so as to avert the deformation of the Te film and detecting the reflected secondary electrons by a detector 10. The information is detected from the difference in the generation quantities between the Si substrate and the Te recording medium.

Description

[Detailed Description of the Invention] [Summary] As a method for high-speed information recording and reproduction, an electron beam is constructed in which a medium is fixed and the electron beam is scanned concentrically or spirally using an electromagnetic lens and a polarizing condenser. Recording device.

[Industrial application field]

The present invention relates to the configuration of an electron beam recording device that achieves simplification of the device.

Semiconductor memories, which require less access time, are well-known as memories for recording information, but magnetic disks and optical disks are also known as file memories capable of large-capacity recording.

Here, when comparing the recording density, the area required to record one bit of information is about 10 to 100 μI compared to a magnetic disk.
12, whereas optical discs only require about lμllI2, which enables high-density recording, and is therefore being put into practical use.

On the other hand, when an electron beam is used instead of light, the beam diameter can be focused to 100 Å or less using an electromagnetic lens, so the area of one bit can be further reduced, and therefore even higher density recording is possible.

[Conventional technology]

The inventors have already filed an application for an electron beam recording device that performs recording and reproduction using electron beams.

The feature of the memory proposed here is that an electron beam is projected onto the recording medium formed on the disk substrate according to the signal, and information is recorded by making six holes in the same manner as optical memory, and blanking the holes. It is something.

On the other hand, for reproduction, an electron beam is scanned along the track on which information is recorded, and the presence or absence of holes is detected from the difference in secondary electron generation efficiency to read the information.

FIG. 2 shows a cross section of such an electron beam disk substrate, which has a high melting point and can be polished to a smooth surface.
Also, a material is selected that has a larger difference in secondary electron generation efficiency than the recording medium 2 on which the layer is formed.

Further, a necessary condition for the recording medium 2 is that it has a low melting point.

As shown in the table, combinations of materials that meet these requirements include silicon (Si) for the substrate, selenium (Se), tellurium (Te), and
Antimony (Sb) or the like is suitable.

While rotating the disk substrate with this configuration,
When an electron beam corresponding to information is projected along a track formed on a substrate, the recording medium in the projection section is melted or evaporated, and a hole as shown in FIG. 2 is made to record information.

On the other hand, reproduction is performed by scanning a low-power electron beam that does not cause melting and deformation of the recording medium along the track, and detecting secondary electrons with a detector.

However, the conventional recording/reproducing method performed by rotating the disk substrate requires a rotation mechanism, which has the problem of complicating the apparatus.

[Problem that the invention seeks to solve]

As mentioned above, the electron beam recording device proposed by the inventors is capable of higher density recording than an optical disk, but it records information by projecting an electron beam from an electron gun while rotating the disk substrate. The problem is that a rotation mechanism is required for this purpose, making the device complex.

[Means for solving problems]

The above problem can be solved by fixing the disk board.1. This problem can be solved by using an electron beam disk device that performs recording and reproduction by scanning the substrate with an electron beam emitted from an electron gun in a circular, elliptical, or spiral shape.

[Effect]

The present invention actively uses a polarizer provided in an electron beam irradiation device equipped with an electron gun, thereby scanning the electron beam with the substrate fixed, and recording and reproducing information. It is something.

In other words, as mentioned earlier, the area required to record one bit of information is becoming smaller, and the size of the substrate is gradually being reduced, making it possible to scan the recording area of an electron beam recording medium with a polarizer. Depends on being within the range.

Here, the polarizer is formed by a polarizing condenser in the X direction and a polarizing condenser in the Y direction, as is well known.
X=AXsin ωt to the polarizing capacitor in the X direction Y=A, cos act to the polarizing capacitor in the Y direction, where AXA is a voltage expressed by the peak voltage value.
A, = A, ) or an ellipse (A, ≠ A.

) can be scanned.

The present invention records information by scanning a substrate while emitting an electron beam discontinuously in accordance with a signal.

〔Example〕

T was placed on a 5-inch diameter Si substrate with a polished surface.
An electron beam recording medium was formed by depositing an e-film to a thickness of 200 mm.

The electron beam recording medium 3 was set in an electron beam recording apparatus schematically shown in FIG.

Here, the electron beam recording device includes an electron gun chamber 6 equipped with an electron gun 4 and a beam current control system 5, an electron beam focusing system 7, and a polarizer 8.
There is an electromagnetic optical system chamber 9 equipped with an electromagnetic optical system chamber 9, which is configured to be able to be evacuated.

After focusing on a person, the Te film was scanned concentrically with a polarizer 8, and information was recorded by drilling a hole in the Te film as shown in the cross section of FIG.

Next, for reproduction, the electron beam intensity is weakened to prevent deformation of the Te film, and the track where information is recorded is scanned, the reflected secondary electrons are detected by the detector 10, and the reflected secondary electrons are detected by the detector 10. Information was detected from the difference in the amount generated from the medium.

〔Effect of the invention〕

As described above, in contrast to the conventional method of recording and reproducing information by projecting an electron beam in synchronization with a rotating electron beam disk, the present invention uses a method of scanning an electron beam. By implementing the present invention, a rotation mechanism becomes unnecessary, and the apparatus can be simplified.

[Brief explanation of drawings]

Figure 1 is a schematic diagram of the electron beam recording device. Figure 2 is a cross-sectional view of the electron beam recording medium. It is. In the figure, 8 is a polarizer, and 10 is a detector.

Claims (1)

[Claims] In devices that record and reproduce information by applying physical and chemical changes to the medium using electron beams, the medium is used to record and reproduce information.
An electron beam recording device that records information as a signal train in a circular, elliptical or spiral shape on the surface of the medium without moving during reproduction.