JPS60258918A - ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法 - Google Patents

ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法

Info

Publication number
JPS60258918A
JPS60258918A JP60056908A JP5690885A JPS60258918A JP S60258918 A JPS60258918 A JP S60258918A JP 60056908 A JP60056908 A JP 60056908A JP 5690885 A JP5690885 A JP 5690885A JP S60258918 A JPS60258918 A JP S60258918A
Authority
JP
Japan
Prior art keywords
copper
ppm
alkali metal
powder
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60056908A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6220687B2 (enExample
Inventor
Isao Sakashita
坂下　伊佐男
Nobuo Kimura
信夫 木村
Teruyasu Tamamizu
玉水　照康
Hidekazu Taji
田路　英一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP60056908A priority Critical patent/JPS60258918A/ja
Publication of JPS60258918A publication Critical patent/JPS60258918A/ja
Publication of JPS6220687B2 publication Critical patent/JPS6220687B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/90—

Landscapes

  • Carbon And Carbon Compounds (AREA)
JP60056908A 1985-03-20 1985-03-20 ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法 Granted JPS60258918A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60056908A JPS60258918A (ja) 1985-03-20 1985-03-20 ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60056908A JPS60258918A (ja) 1985-03-20 1985-03-20 ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP9823075A Division JPS5222477A (en) 1975-08-13 1975-08-13 Sic-si type equalizing tube for manufacturing gas impermeable semi conductors

Publications (2)

Publication Number Publication Date
JPS60258918A true JPS60258918A (ja) 1985-12-20
JPS6220687B2 JPS6220687B2 (enExample) 1987-05-08

Family

ID=13040552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60056908A Granted JPS60258918A (ja) 1985-03-20 1985-03-20 ガス不透過性半導体製造用ＳｉＣ−Ｓｉ系均熱管の製造方法

Country Status (1)

Country Link
JP (1) JPS60258918A (enExample)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5075600A (enExample) * 1973-11-08 1975-06-20
JPS5185374A (enExample) * 1974-12-06 1976-07-26 Norton Co
JPS5222477A (en) * 1975-08-13 1977-02-19 Toshiba Ceramics Co Ltd Sic-si type equalizing tube for manufacturing gas impermeable semi conductors
JPS5722914A (en) * 1980-07-16 1982-02-06 Nissan Motor Co Ltd Engine mount for auto-vehicle
JPS5745708A (en) * 1980-09-03 1982-03-15 Hitachi Ltd Amplifying circuit

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5075600A (enExample) * 1973-11-08 1975-06-20
JPS5185374A (enExample) * 1974-12-06 1976-07-26 Norton Co
JPS5222477A (en) * 1975-08-13 1977-02-19 Toshiba Ceramics Co Ltd Sic-si type equalizing tube for manufacturing gas impermeable semi conductors
JPS5722914A (en) * 1980-07-16 1982-02-06 Nissan Motor Co Ltd Engine mount for auto-vehicle
JPS5745708A (en) * 1980-09-03 1982-03-15 Hitachi Ltd Amplifying circuit

Also Published As

Publication number Publication date
JPS6220687B2 (enExample) 1987-05-08

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