JPS60257053A - 荷電粒子ビ−ム装置 - Google Patents
荷電粒子ビ−ム装置Info
- Publication number
- JPS60257053A JPS60257053A JP59112469A JP11246984A JPS60257053A JP S60257053 A JPS60257053 A JP S60257053A JP 59112469 A JP59112469 A JP 59112469A JP 11246984 A JP11246984 A JP 11246984A JP S60257053 A JPS60257053 A JP S60257053A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- charged particle
- image
- electron
- particle beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59112469A JPS60257053A (ja) | 1984-06-01 | 1984-06-01 | 荷電粒子ビ−ム装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59112469A JPS60257053A (ja) | 1984-06-01 | 1984-06-01 | 荷電粒子ビ−ム装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60257053A true JPS60257053A (ja) | 1985-12-18 |
JPH039581B2 JPH039581B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-08 |
Family
ID=14587417
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59112469A Granted JPS60257053A (ja) | 1984-06-01 | 1984-06-01 | 荷電粒子ビ−ム装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60257053A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018011946A1 (ja) * | 2016-07-14 | 2018-01-18 | 株式会社日立ハイテクノロジーズ | イオンミリング装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5835852A (ja) * | 1981-08-28 | 1983-03-02 | Agency Of Ind Science & Technol | 荷電ビ−ム用レンズ |
-
1984
- 1984-06-01 JP JP59112469A patent/JPS60257053A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5835852A (ja) * | 1981-08-28 | 1983-03-02 | Agency Of Ind Science & Technol | 荷電ビ−ム用レンズ |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2018011946A1 (ja) * | 2016-07-14 | 2018-01-18 | 株式会社日立ハイテクノロジーズ | イオンミリング装置 |
KR20190002590A (ko) * | 2016-07-14 | 2019-01-08 | 가부시키가이샤 히다치 하이테크놀로지즈 | 이온 밀링 장치 |
CN109314031A (zh) * | 2016-07-14 | 2019-02-05 | 株式会社日立高新技术 | 离子铣削装置 |
JPWO2018011946A1 (ja) * | 2016-07-14 | 2019-04-04 | 株式会社日立ハイテクノロジーズ | イオンミリング装置 |
CN109314031B (zh) * | 2016-07-14 | 2020-12-22 | 株式会社日立高新技术 | 离子铣削装置 |
US11257654B2 (en) | 2016-07-14 | 2022-02-22 | Hitachi High-Tech Corporation | Ion milling apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPH039581B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-02-08 |