JPS6025514A - 脱気装置 - Google Patents
脱気装置Info
- Publication number
- JPS6025514A JPS6025514A JP13390083A JP13390083A JPS6025514A JP S6025514 A JPS6025514 A JP S6025514A JP 13390083 A JP13390083 A JP 13390083A JP 13390083 A JP13390083 A JP 13390083A JP S6025514 A JPS6025514 A JP S6025514A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- degassing
- tube
- distribution
- ports
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007872 degassing Methods 0.000 title claims abstract description 45
- 239000007788 liquid Substances 0.000 claims abstract description 54
- 238000009826 distribution Methods 0.000 claims abstract description 48
- 239000000463 material Substances 0.000 claims abstract description 19
- 229920003002 synthetic resin Polymers 0.000 claims abstract description 5
- 239000000057 synthetic resin Substances 0.000 claims abstract description 5
- 238000009825 accumulation Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 abstract description 3
- 229920002050 silicone resin Polymers 0.000 abstract description 3
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 13
- 230000035508 accumulation Effects 0.000 description 11
- 230000006837 decompression Effects 0.000 description 11
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- 238000009849 vacuum degassing Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 239000012153 distilled water Substances 0.000 description 2
- -1 flow rate Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000008399 tap water Substances 0.000 description 2
- 235000020679 tap water Nutrition 0.000 description 2
- 229910021642 ultra pure water Inorganic materials 0.000 description 2
- 239000012498 ultrapure water Substances 0.000 description 2
- 210000004460 N cell Anatomy 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000006261 foam material Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004811 liquid chromatography Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Degasification And Air Bubble Elimination (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13390083A JPS6025514A (ja) | 1983-07-21 | 1983-07-21 | 脱気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13390083A JPS6025514A (ja) | 1983-07-21 | 1983-07-21 | 脱気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6025514A true JPS6025514A (ja) | 1985-02-08 |
| JPH0258963B2 JPH0258963B2 (cs) | 1990-12-11 |
Family
ID=15115725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13390083A Granted JPS6025514A (ja) | 1983-07-21 | 1983-07-21 | 脱気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6025514A (cs) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6227703U (cs) * | 1985-07-31 | 1987-02-19 | ||
| US5078755A (en) * | 1988-08-20 | 1992-01-07 | Nitto Denko Corporation | Method of removing dissolved gas from liquid |
| JPH0679259A (ja) * | 1989-03-02 | 1994-03-22 | Takeshi Nitami | 水道水からの酸素除去方法 |
| JPH06128757A (ja) * | 1991-02-04 | 1994-05-10 | Enthone Omi Inc | アルミニウムおよびアルミニウム合金の処理の為の改良された亜鉛酸塩溶液およびその処理方法 |
| JP2005305443A (ja) * | 2005-07-21 | 2005-11-04 | Nitto Denko Corp | 脱気装置及び脱気方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57165007A (en) * | 1981-04-06 | 1982-10-09 | Eruma Kogaku Kk | Method and apparatus for degassing dissolved gas in liquid |
| JPS59216606A (ja) * | 1983-05-21 | 1984-12-06 | Eruma Kogaku Kk | 脱気装置 |
-
1983
- 1983-07-21 JP JP13390083A patent/JPS6025514A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57165007A (en) * | 1981-04-06 | 1982-10-09 | Eruma Kogaku Kk | Method and apparatus for degassing dissolved gas in liquid |
| JPS59216606A (ja) * | 1983-05-21 | 1984-12-06 | Eruma Kogaku Kk | 脱気装置 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6227703U (cs) * | 1985-07-31 | 1987-02-19 | ||
| US5078755A (en) * | 1988-08-20 | 1992-01-07 | Nitto Denko Corporation | Method of removing dissolved gas from liquid |
| JPH0679259A (ja) * | 1989-03-02 | 1994-03-22 | Takeshi Nitami | 水道水からの酸素除去方法 |
| JPH06128757A (ja) * | 1991-02-04 | 1994-05-10 | Enthone Omi Inc | アルミニウムおよびアルミニウム合金の処理の為の改良された亜鉛酸塩溶液およびその処理方法 |
| JP2005305443A (ja) * | 2005-07-21 | 2005-11-04 | Nitto Denko Corp | 脱気装置及び脱気方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0258963B2 (cs) | 1990-12-11 |
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