JPS60249551A - Wafer replacing zig - Google Patents

Abstract

PURPOSE:To move wafer with high workability by arranging a casset and a silicon hanger with correspondence to one and the other slits made through one sideface and the lower face of flow transfer section. CONSTITUTION:A grooved arranging section 7 to be inserted with casset is provided while facing with one sideface of slit 6 in flow transfer section 5 and an arranging section 9 for silicon hanger 2 is provided while facing with the lower face of the slit 6. The silicon hanger 3 is supported by suspending a handle 11 from a notched section 10 to face the upper opening against the lower face of the slit 6. Casset 1 is inserted laterally while facing the opening against one sideface of the slit 6. Upon rotation of a zig by approximately 90 deg. after setting of the casset 1 and the silicon hanger 3, the wafer 2 placed in the slit will pass through the slit 6 and transferred to the slit 4 for the silicon hanger 3 or the casset 1 as it is.

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a cassette (1) as shown in FIG.
and a quartz hanger (21) as shown in FIG.
3) to a cassette (1) or a wafer (3) contained in a cassette (1) to a quartz hanger (2).

[Background technology]

When performing acid swamp cleaning (especially at high temperatures) on silicon wafers (2), the wafers (2) are placed in a quartz hanger (3) as shown in Figure 2, and the final cleaning and drying is performed as shown in Figure 1. Replace it with a cassette (1) like this.

Both the cassette (1) and the quartz hanger (2) hold the wafer (2+) by inserting it into the vertical slits (4) arranged in parallel on the opposing crosspieces, but for convenience of handling, the cassette (1) is The quartz hanger (3) is made of plastic, wood, etc., while the quartz hanger (3)
It is made of quartz glass to withstand heating, etc.

Since the cassette (1) cannot be directly transferred to pickling or the like, it is necessary to replace the wafer (2). This mutual exchange of wafers C) is carried out using a bin set, but the workability is poor, and if the wafer is grasped with tweezers, the crystallinity of that portion deteriorates, reducing the yield of good products.

"H aspect of C invention" This invention converts wafers in quartz hangers into cassettes.
To provide a wafer exchange jig capable of transferring wafers in a cassette to a quartz bunker with good workability without using tweezers.

[Disclosure of the invention]

The gist of this invention is to form a cassette arrangement section in which the cassette is arranged so that the opening corresponds to the opening of one of the slits in the advection section in which slits opening downward and on one side are arranged side by side. This wafer exchange jig is characterized in that a quartz hanger arrangement part is formed in which the quartz hanger is arranged so that the opening corresponds to the opening of either of the other slits.

Hereinafter, a wafer exchange jig according to the present invention will be provided.

The wafer exchange jig has a box shape with a hanging handle (8) provided at the top.

(5) is an advection section in which flat plates are arranged side by side to form a slit (6).

A groove-shaped arrangement part (7) into which the cassette (υ) is inserted is provided in a connected manner so as to face the negative side of the slit (6) of the advection part (5).

Arrangement m (9) of the slit (quartz bunker 2 facing the do surface of 6j) of the advection section (5) is provided.

Handle 01 of the quartz hanger (3) at the upper end of the placement part (9)
) is provided with a notch q■ that pivots.

Therefore, the quartz hanger (3) has the handle (li) at the notch QO.
) and is supported by the arrangement part (9).

At this time, the upper opening of the quartz hanger (3) is the advection part (5).
) of the slit (61") facing the F side.

The cassette stack is inserted sideways with the opening facing the -side of the slit (6) of the advection section (5).

Then, after setting the cassette (1) and quartz hanger (3) as described above, when the wafer exchange jig was rotated approximately 90 degrees, the wafer that was in the slit (4) of the cassette (11 or quartz hanger (3)) was rotated approximately 90 degrees. The wafer (2) passes through the slit (6) of the opposing advection section (5) and then passes through the slit (4) of the quartz hanger (3) or the cassette (1).
).

[Effects of the Invention] As described above, when the wafer exchange jig according to the present invention is used, when the cassette (1) or quartz hanger (3) is set thereon and turned approximately 90 degrees, the wafer exchange jig will be held in either one of the slits 4). The wafer (2) is guided by the slit (6) of the advection section (5) and is quickly replaced.

[Brief explanation of drawings]

Figures 1 to 5 are views showing embodiments of the present invention, Figures 1 to 3 are perspective views, and Figures 4 to 1#36.
The figure is a side view. (1)...Cassette, (2j...Wafer, (3;
...Quartz hanger, (4-inch...slit, (5)...
・Advection part, (6)...Slit, (7)...Arrangement part, (8)...Handle, (9shi・Arrangement@To,GO)...Notch part, 0])... ·handle. Patent applicant Matsushita Electric Works Co., Ltd. Patent attorney Toshimaru Takemoto (two idiots) Figure 1 Figure 2

Claims (1)

[Claims] (1) A cassette arrangement section is formed in which the cassette is arranged so that the opening corresponds to the opening of one of the slits of the advection section in which the slits extending downward are arranged side by side on one side, and the cassette is arranged so that the opening corresponds to the opening of one of the slits. A wafer exchange jig comprising a quartz hanger arrangement part for arranging the quartz hanger so that the opening corresponds to the opening of the slit.