JPS6236283Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a hanger jig used for chemical treatment and water washing treatment of semiconductors in semiconductor manufacturing processes.

In the semiconductor manufacturing process, it is necessary to perform chemical treatment and water washing on wafers, so the wafers are held on a wafer carrier, and the wafer carrier is set in each device using a hanger jig. A conventional wafer carrier and hanger jig are shown in FIGS. 1 and 2. That is, in the wafer carrier 1 for holding wafers, recesses 2a and 2b are formed in both longitudinal walls 1a and 1b, and the space between the both walls 1a and 1b is substantially open. On the other hand, the hanger jig 3 is a gate-shaped holder 3 that can be opened and closed by a spring action.
A is provided with flanges 4, 4 that fit into the recesses 2a, 2b. This hanger jig 3, as shown in FIG.
Fit the collars 4, 4 into the recesses 2a, 2b of the wafer carrier 1 from the outside of the wafer carrier 1,
The wafer carrier 1 is held by a spring action. In this way, the conventional hanger jig 3 has the collars 4, 4 due to its spring action.
Since the wafer carrier 1 is held by pressing the wafer carrier 1 into the recesses 2a and 2b, there is an advantage that the wafer carrier 1 is hard to come off from the hanger jig 3. , it was necessary to apply force to the hanger jig 3, making it troublesome to attach and detach the hanger jig 3, resulting in poor work efficiency. Further, since the flanges 4, 4 are pushed open and fitted into the recesses 2a, 2b of the side walls 1a, 1b of the wafer carrier 1, only one wafer carrier 1 is required for one hanger jig 3. Therefore, the number of wafer carriers that can be set in an apparatus and subjected to chemical or water washing treatment using one hanger jig 3 is limited.

The present invention solves the above-mentioned problems and makes it possible to hold two or more wafer carriers in one hanger jig. Two or more sets of wafer carriers are fitted into recesses provided on both side walls of each wafer carrier. and a horizontal rod that regulates the support position of two or more wafer carriers fitted to the collar, and a concave portion of the wafer carrier is formed on the terminal end side of each collar with respect to the fitting direction of each wafer carrier. This hanger jig for semiconductor manufacturing equipment is characterized in that a recess is formed to receive an upper convex portion.

An embodiment of the present invention will be described below with reference to the drawings.

In FIG. 3, 1 is a conventionally used wafer carrier, and 5 is a hanger jig according to the present invention. FIG. 3 shows a hanger jig 5 for holding two wafer carriers 1, 1 at the same time. That is, the hanger jig 5 has three legs 6,
7, 8, each leg 6, 7, 8 has a horizontal rod 9, 10
The distance between them is kept constant by
The lower end rear portion of each leg 6, 7, 8 is fixed with a horizontal rod 11. At the lower end of each leg 6, 7, 8, a collar 12, 13, 14, 15 is attached to fit into the recess 2a, 2b of each wafer carrier 1. Tsuba 12 and 1
3, 14, and 15 each form a pair, and the flanges 13 and 14 located in the middle are made to protrude on both sides and are attached to the legs 7.
Attach to. Further, a depression 16 is provided on the terminal end side of each of the flanges 12 to 15 in correspondence with the convex portions 2c and 2d of the wafer carrier 1. This recess 16 is used to prevent the wafer carrier 1 from falling from the hanger jig 5 due to vibration, rocking, etc. when the collar and the recess are connected, and to position the wafer carrier 1 using the horizontal rod 11. . Also each tsuba 12～
A chamfer 17 is attached to the front end of 15. This chamfer 17
are for guiding the flanges 12 to 15 so that they fit smoothly into the recesses 2a and 2b. In addition, since the chemical solution used in the wet process is often used at an elevated temperature, the reinforcing plate 18 is installed to prevent the legs 6, 7, 8, etc. of the hanger jig 5 from causing errors in their dimensions due to thermal deformation. Attach between each leg 6, 7, and 8. In consideration of quality, heat resistance, acid resistance, etc., it is desirable that the hanger jig 5 be made of fluororesin.

In the example, two wafer carriers 1
are arranged adjacent to each other, and the flanges 12 to 15 of the hanger jig 5 are inserted into each of the recesses 2a and 2b of the wafer carrier 1 from the opening edges thereof. In this case, opposing recesses 2a, 2b of adjacent wafer carriers 1, 1
The integral flanges 13 and 14 are fitted inside, and two wafer carriers 1 and 1 are attached to one hanger jig 5.
is supported. Although the embodiment has been described with reference to two sets of flanges, two or more sets of flanges may be installed in series in the same manner.

As described above, in the present invention, the wafer carrier is held on the hanger jig by inserting two or more sets of flanges of the hanger jig into the recesses of the wafer carrier from one side, making the work easier. Moreover, it is possible to hold two or more wafer carriers at the same time when they are lined up horizontally, and a large number of wafer carriers can be set in the equipment with one hanger jig, which increases the wafer chemical solution and water washing processing capacity. You can improve. Furthermore, since the wafer carrier is held on the hanger jig by positioning it with a horizontal rod and fitting the flanges into recesses provided on both side walls of the wafer carrier, a ready-made wafer carrier can be used. The wafer carrier does not come off from the hanger jig unless the collar is removed from the recess, and it has the effect of stably supporting the wafer carrier.

[Brief explanation of the drawing]

1 and 2 are diagrams showing the relationship between a conventional wafer carrier and a hanger jig, and FIG. 3 is a perspective view showing an embodiment of the present invention. 1... Wafer carrier, 5... Hanger jig, 12, 13, 14, 15... Tsuba.

Claims (1)

[Scope of utility model registration request] Two or more pairs of flanges are provided to fit into recesses provided in parallel side walls of the wafer carrier, and the end of each flanges opposite to the end that fits into the wafer carrier is attached to a horizontal rod. The horizontal rod is used as a stopper for fitting the wafer carrier, and furthermore, a recess is formed at the opposite end of each collar to receive each upper convex part forming the recess on both side walls of the wafer carrier, so that two or more wafer carriers can be fitted. A hanger jig for semiconductor manufacturing equipment, characterized by being able to set a hanger jig for semiconductor manufacturing equipment.