JPS60247171A - 半導体流速検出器 - Google Patents

半導体流速検出器

Info

Publication number
JPS60247171A
JPS60247171A JP59103030A JP10303084A JPS60247171A JP S60247171 A JPS60247171 A JP S60247171A JP 59103030 A JP59103030 A JP 59103030A JP 10303084 A JP10303084 A JP 10303084A JP S60247171 A JPS60247171 A JP S60247171A
Authority
JP
Japan
Prior art keywords
temp
detection element
flow velocity
flow speed
semiconductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59103030A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0334827B2 (enEXAMPLES
Inventor
Masayuki Sekimura
関村　雅之
Shunji Shiromizu
白水　俊次
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP59103030A priority Critical patent/JPS60247171A/ja
Priority to US06/733,796 priority patent/US4637253A/en
Priority to DE19853518409 priority patent/DE3518409A1/de
Publication of JPS60247171A publication Critical patent/JPS60247171A/ja
Publication of JPH0334827B2 publication Critical patent/JPH0334827B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
    • G01P5/10—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring thermal variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/696—Circuits therefor, e.g. constant-current flow meters
    • G01F1/698—Feedback or rebalancing circuits, e.g. self heated constant temperature flowmeters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
  • Engineering & Computer Science (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Indicating Or Recording The Presence, Absence, Or Direction Of Movement (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP59103030A 1984-05-22 1984-05-22 半導体流速検出器 Granted JPS60247171A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP59103030A JPS60247171A (ja) 1984-05-22 1984-05-22 半導体流速検出器
US06/733,796 US4637253A (en) 1984-05-22 1985-05-14 Semiconductor flow detector for detecting the flow rate and flowing direction of fluid
DE19853518409 DE3518409A1 (de) 1984-05-22 1985-05-22 Halbleiter-stroemungsmesser zur bestimmung von stroemungsmenge und -richtung eines stroemungsmittels

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59103030A JPS60247171A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Publications (2)

Publication Number Publication Date
JPS60247171A true JPS60247171A (ja) 1985-12-06
JPH0334827B2 JPH0334827B2 (enEXAMPLES) 1991-05-24

Family

ID=14343250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59103030A Granted JPS60247171A (ja) 1984-05-22 1984-05-22 半導体流速検出器

Country Status (1)

Country Link
JP (1) JPS60247171A (enEXAMPLES)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006319153A (ja) * 2005-05-13 2006-11-24 Sony Corp 半導体集積回路及びその制御方法
RU177768U1 (ru) * 2017-07-31 2018-03-12 Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" Датчик бокового потока и направления движения флюида в скважине
RU178345U1 (ru) * 2017-07-31 2018-03-30 Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" Устройство определения бокового потока и направления движения флюида в скважине
JP2020016465A (ja) * 2018-07-23 2020-01-30 ミネベアミツミ株式会社 流体センサ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6225940B2 (ja) * 2014-06-03 2017-11-08 株式会社デンソー 風向計、風向風量計および移動方向測定計

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5343574A (en) * 1976-10-01 1978-04-19 Rion Co Thermal flow meter
JPS55103466A (en) * 1979-02-01 1980-08-07 Nippon Denso Co Ltd Semiconductor device for flow speed electric conversion
JPS56143915A (en) * 1980-04-11 1981-11-10 Nippon Soken Inc Measuring device for gas flow rate

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5343574A (en) * 1976-10-01 1978-04-19 Rion Co Thermal flow meter
JPS55103466A (en) * 1979-02-01 1980-08-07 Nippon Denso Co Ltd Semiconductor device for flow speed electric conversion
JPS56143915A (en) * 1980-04-11 1981-11-10 Nippon Soken Inc Measuring device for gas flow rate

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006319153A (ja) * 2005-05-13 2006-11-24 Sony Corp 半導体集積回路及びその制御方法
RU177768U1 (ru) * 2017-07-31 2018-03-12 Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" Датчик бокового потока и направления движения флюида в скважине
RU178345U1 (ru) * 2017-07-31 2018-03-30 Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" Устройство определения бокового потока и направления движения флюида в скважине
JP2020016465A (ja) * 2018-07-23 2020-01-30 ミネベアミツミ株式会社 流体センサ

Also Published As

Publication number Publication date
JPH0334827B2 (enEXAMPLES) 1991-05-24

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