JPS60245885A - 流量制御装置 - Google Patents

流量制御装置

Info

Publication number
JPS60245885A
JPS60245885A JP9910084A JP9910084A JPS60245885A JP S60245885 A JPS60245885 A JP S60245885A JP 9910084 A JP9910084 A JP 9910084A JP 9910084 A JP9910084 A JP 9910084A JP S60245885 A JPS60245885 A JP S60245885A
Authority
JP
Japan
Prior art keywords
flow
valve seat
fluid
flow rate
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9910084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0362949B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Amemori
宏之 雨森
Shizuo Kaneko
静夫 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Tokico Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokico Ltd filed Critical Tokico Ltd
Priority to JP9910084A priority Critical patent/JPS60245885A/ja
Publication of JPS60245885A publication Critical patent/JPS60245885A/ja
Publication of JPH0362949B2 publication Critical patent/JPH0362949B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezoelectric benders

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP9910084A 1984-05-17 1984-05-17 流量制御装置 Granted JPS60245885A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9910084A JPS60245885A (ja) 1984-05-17 1984-05-17 流量制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9910084A JPS60245885A (ja) 1984-05-17 1984-05-17 流量制御装置

Publications (2)

Publication Number Publication Date
JPS60245885A true JPS60245885A (ja) 1985-12-05
JPH0362949B2 JPH0362949B2 (enrdf_load_stackoverflow) 1991-09-27

Family

ID=14238431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9910084A Granted JPS60245885A (ja) 1984-05-17 1984-05-17 流量制御装置

Country Status (1)

Country Link
JP (1) JPS60245885A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61127983A (ja) * 1984-11-27 1986-06-16 Esutetsuku:Kk 流体制御用バルブ
JPS63199978A (ja) * 1988-01-13 1988-08-18 Esutetsuku:Kk マスフローコントローラ
JPH02116071U (enrdf_load_stackoverflow) * 1989-03-06 1990-09-17
US5092360A (en) * 1989-11-14 1992-03-03 Hitachi Metals, Ltd. Flow rated control valve using a high-temperature stacked-type displacement device
JPH11265217A (ja) * 1998-03-17 1999-09-28 Omi Tadahiro 圧力式流量制御装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60139981A (ja) * 1983-12-27 1985-07-24 Saginomiya Seisakusho Inc 圧電素子を利用した弁
JPS60227078A (ja) * 1984-04-26 1985-11-12 Nippon Enraajingu Color Kk 流量制御弁

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60139981A (ja) * 1983-12-27 1985-07-24 Saginomiya Seisakusho Inc 圧電素子を利用した弁
JPS60227078A (ja) * 1984-04-26 1985-11-12 Nippon Enraajingu Color Kk 流量制御弁

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61127983A (ja) * 1984-11-27 1986-06-16 Esutetsuku:Kk 流体制御用バルブ
JPS63199978A (ja) * 1988-01-13 1988-08-18 Esutetsuku:Kk マスフローコントローラ
JPH02116071U (enrdf_load_stackoverflow) * 1989-03-06 1990-09-17
US5092360A (en) * 1989-11-14 1992-03-03 Hitachi Metals, Ltd. Flow rated control valve using a high-temperature stacked-type displacement device
JPH11265217A (ja) * 1998-03-17 1999-09-28 Omi Tadahiro 圧力式流量制御装置

Also Published As

Publication number Publication date
JPH0362949B2 (enrdf_load_stackoverflow) 1991-09-27

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