JPS60245224A - 半導体装置製造用マスク合せ方法 - Google Patents
半導体装置製造用マスク合せ方法Info
- Publication number
- JPS60245224A JPS60245224A JP59100585A JP10058584A JPS60245224A JP S60245224 A JPS60245224 A JP S60245224A JP 59100585 A JP59100585 A JP 59100585A JP 10058584 A JP10058584 A JP 10058584A JP S60245224 A JPS60245224 A JP S60245224A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- pattern
- alignment
- mask alignment
- aligned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000000034 method Methods 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 20
- 238000000206 photolithography Methods 0.000 claims description 10
- 238000010586 diagram Methods 0.000 abstract 3
- 230000004048 modification Effects 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 16
- 238000005530 etching Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 241000251468 Actinopterygii Species 0.000 description 1
- 235000008375 Decussocarpus nagi Nutrition 0.000 description 1
- 244000309456 Decussocarpus nagi Species 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59100585A JPS60245224A (ja) | 1984-05-21 | 1984-05-21 | 半導体装置製造用マスク合せ方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59100585A JPS60245224A (ja) | 1984-05-21 | 1984-05-21 | 半導体装置製造用マスク合せ方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60245224A true JPS60245224A (ja) | 1985-12-05 |
| JPH0544815B2 JPH0544815B2 (enrdf_load_stackoverflow) | 1993-07-07 |
Family
ID=14277958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59100585A Granted JPS60245224A (ja) | 1984-05-21 | 1984-05-21 | 半導体装置製造用マスク合せ方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60245224A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6858947B2 (en) | 2001-06-11 | 2005-02-22 | Oki Electric Industry Co., Ltd. | Semiconductor device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911578A (enrdf_load_stackoverflow) * | 1972-06-02 | 1974-02-01 | ||
| JPS56169329A (en) * | 1980-05-30 | 1981-12-26 | Oki Electric Ind Co Ltd | Manufacture of integrated circuit |
-
1984
- 1984-05-21 JP JP59100585A patent/JPS60245224A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4911578A (enrdf_load_stackoverflow) * | 1972-06-02 | 1974-02-01 | ||
| JPS56169329A (en) * | 1980-05-30 | 1981-12-26 | Oki Electric Ind Co Ltd | Manufacture of integrated circuit |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6858947B2 (en) | 2001-06-11 | 2005-02-22 | Oki Electric Industry Co., Ltd. | Semiconductor device |
| US7247522B2 (en) | 2001-06-11 | 2007-07-24 | Oki Electric Industry Co., Ltd | Semiconductor device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0544815B2 (enrdf_load_stackoverflow) | 1993-07-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |