JPS60239007A - 非晶質軟磁性薄膜 - Google Patents
非晶質軟磁性薄膜Info
- Publication number
- JPS60239007A JPS60239007A JP9530284A JP9530284A JPS60239007A JP S60239007 A JPS60239007 A JP S60239007A JP 9530284 A JP9530284 A JP 9530284A JP 9530284 A JP9530284 A JP 9530284A JP S60239007 A JPS60239007 A JP S60239007A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- soft magnetic
- saturation
- flux density
- magnetic flux
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 168
- 239000010409 thin film Substances 0.000 title claims description 73
- 239000000203 mixture Substances 0.000 claims abstract description 46
- 230000004907 flux Effects 0.000 abstract description 55
- 229910052735 hafnium Inorganic materials 0.000 abstract description 14
- 238000000034 method Methods 0.000 abstract description 13
- 229910052697 platinum Inorganic materials 0.000 abstract description 11
- 229920006395 saturated elastomer Polymers 0.000 abstract description 5
- 230000003247 decreasing effect Effects 0.000 abstract description 3
- 238000004544 sputter deposition Methods 0.000 description 24
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 19
- 239000000956 alloy Substances 0.000 description 11
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 230000035699 permeability Effects 0.000 description 10
- 229910045601 alloy Inorganic materials 0.000 description 9
- 239000010408 film Substances 0.000 description 9
- 230000007423 decrease Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 229910052752 metalloid Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000005294 ferromagnetic effect Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- -1 Co and Ni Chemical class 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000010791 quenching Methods 0.000 description 2
- 230000000171 quenching effect Effects 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910020641 Co Zr Inorganic materials 0.000 description 1
- 229910020520 Co—Zr Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/12—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
- H01F1/14—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
- H01F1/147—Alloys characterised by their composition
- H01F1/153—Amorphous metallic alloys, e.g. glassy metals
- H01F1/15316—Amorphous metallic alloys, e.g. glassy metals based on Co
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Magnetic Heads (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9530284A JPS60239007A (ja) | 1984-05-12 | 1984-05-12 | 非晶質軟磁性薄膜 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9530284A JPS60239007A (ja) | 1984-05-12 | 1984-05-12 | 非晶質軟磁性薄膜 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60239007A true JPS60239007A (ja) | 1985-11-27 |
| JPH0343768B2 JPH0343768B2 (enrdf_load_stackoverflow) | 1991-07-03 |
Family
ID=14133975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9530284A Granted JPS60239007A (ja) | 1984-05-12 | 1984-05-12 | 非晶質軟磁性薄膜 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60239007A (enrdf_load_stackoverflow) |
-
1984
- 1984-05-12 JP JP9530284A patent/JPS60239007A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0343768B2 (enrdf_load_stackoverflow) | 1991-07-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS60220914A (ja) | 磁性薄膜 | |
| US4891278A (en) | Ferrromagnetic thin film and magnetic head using it | |
| CA1261177A (en) | Amorphous soft magnetic thin film | |
| US4747888A (en) | Amorphous soft magnetic thin film | |
| JPH0199203A (ja) | 軟磁性積層膜 | |
| JPS6129105A (ja) | 磁性合金薄膜 | |
| JPS60239007A (ja) | 非晶質軟磁性薄膜 | |
| JPS60132305A (ja) | 鉄−窒素系積層磁性体膜およびそれを用いた磁気ヘツド | |
| JP2570337B2 (ja) | 軟磁性積層膜 | |
| JPS58100412A (ja) | 軟質磁性材料の製法 | |
| JPH0485716A (ja) | 磁気ヘッド用磁性薄膜 | |
| JP2551008B2 (ja) | 軟磁性薄膜 | |
| Katori et al. | Soft magnetic properties for Fe-Al-Nb-NO films | |
| JPH05251236A (ja) | 軟磁性膜 | |
| JPS6313256B2 (enrdf_load_stackoverflow) | ||
| JPS6255911A (ja) | 軟磁性薄膜 | |
| JPH04214831A (ja) | 軟磁性膜 | |
| JPS60218820A (ja) | Ｆｅ−Ａｌ−Ｓｉ系合金薄膜の製造方法 | |
| JP2546275B2 (ja) | 軟磁性薄膜 | |
| JPH04368104A (ja) | 軟磁性膜 | |
| JPS63126208A (ja) | 組織変調軟磁性積層膜 | |
| JPH0376102A (ja) | 多層磁性薄膜およびこれを用いた磁気ヘッド | |
| JPS61290703A (ja) | 軟磁性薄膜 | |
| JPS6399507A (ja) | 軟磁性膜 | |
| JPS62104107A (ja) | 結晶質軟磁性薄膜 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |