JPS6023456B2 - 熱電子陰極装置 - Google Patents

熱電子陰極装置

Info

Publication number
JPS6023456B2
JPS6023456B2 JP53133795A JP13379578A JPS6023456B2 JP S6023456 B2 JPS6023456 B2 JP S6023456B2 JP 53133795 A JP53133795 A JP 53133795A JP 13379578 A JP13379578 A JP 13379578A JP S6023456 B2 JPS6023456 B2 JP S6023456B2
Authority
JP
Japan
Prior art keywords
support
cathode device
chip
thermionic cathode
thermionic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53133795A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5562639A (en
Inventor
宏彰 丹治
光明 斎藤
正司 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Denki Kagaku Kogyo KK
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK, Shingijutsu Kaihatsu Jigyodan filed Critical Denki Kagaku Kogyo KK
Priority to JP53133795A priority Critical patent/JPS6023456B2/ja
Priority to DE19792944083 priority patent/DE2944083A1/de
Priority to FR7926977A priority patent/FR2440610A1/fr
Priority to GB7937723A priority patent/GB2038541B/en
Publication of JPS5562639A publication Critical patent/JPS5562639A/ja
Publication of JPS6023456B2 publication Critical patent/JPS6023456B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/15—Cathodes heated directly by an electric current
    • H01J1/18—Supports; Vibration-damping arrangements

Landscapes

  • Solid Thermionic Cathode (AREA)
  • Electron Sources, Ion Sources (AREA)
JP53133795A 1978-11-01 1978-11-01 熱電子陰極装置 Expired JPS6023456B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP53133795A JPS6023456B2 (ja) 1978-11-01 1978-11-01 熱電子陰極装置
DE19792944083 DE2944083A1 (de) 1978-11-01 1979-10-31 Kathodeneinrichtung zur abgabe von thermionen
FR7926977A FR2440610A1 (fr) 1978-11-01 1979-10-31 Ensemble de cathode thermionique
GB7937723A GB2038541B (en) 1978-11-01 1979-10-31 Thermionic cathode and method of making same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53133795A JPS6023456B2 (ja) 1978-11-01 1978-11-01 熱電子陰極装置

Publications (2)

Publication Number Publication Date
JPS5562639A JPS5562639A (en) 1980-05-12
JPS6023456B2 true JPS6023456B2 (ja) 1985-06-07

Family

ID=15113190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53133795A Expired JPS6023456B2 (ja) 1978-11-01 1978-11-01 熱電子陰極装置

Country Status (4)

Country Link
JP (1) JPS6023456B2 (enExample)
DE (1) DE2944083A1 (enExample)
FR (1) FR2440610A1 (enExample)
GB (1) GB2038541B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008166265A (ja) * 2006-12-04 2008-07-17 Denki Kagaku Kogyo Kk 電子放出源

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147945A (ja) * 1982-02-25 1983-09-02 Toshiba Corp 電子銃の使用方法
WO2023001480A1 (en) * 2021-07-22 2023-01-26 Asml Netherlands B.V. System and apparatus for stabilizing electron sources in charged particle systems

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3532923A (en) * 1969-03-17 1970-10-06 Ibm Pyrolytic graphite support for lanthanum hexaboride cathode emitter
JPS5277661A (en) * 1975-12-24 1977-06-30 Jeol Ltd Electron gun
US4054946A (en) * 1976-09-28 1977-10-18 Bell Telephone Laboratories, Incorporated Electron source of a single crystal of lanthanum hexaboride emitting surface of (110) crystal plane
JPS53128971A (en) * 1977-04-18 1978-11-10 Hitachi Ltd Manufacture of electron radiation cathode
CH617793A5 (enExample) * 1977-09-02 1980-06-13 Balzers Hochvakuum

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008166265A (ja) * 2006-12-04 2008-07-17 Denki Kagaku Kogyo Kk 電子放出源
WO2009069335A1 (ja) 2007-11-30 2009-06-04 Denki Kagaku Kogyo Kabushiki Kaisha 電子放出源及び電子放出源の製造方法

Also Published As

Publication number Publication date
FR2440610B1 (enExample) 1984-03-16
DE2944083A1 (de) 1980-05-14
JPS5562639A (en) 1980-05-12
GB2038541B (en) 1983-03-23
DE2944083C2 (enExample) 1987-09-17
FR2440610A1 (fr) 1980-05-30
GB2038541A (en) 1980-07-23

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