JPS60211752A - イオンビ−ム発生装置 - Google Patents

イオンビ−ム発生装置

Info

Publication number
JPS60211752A
JPS60211752A JP59066901A JP6690184A JPS60211752A JP S60211752 A JPS60211752 A JP S60211752A JP 59066901 A JP59066901 A JP 59066901A JP 6690184 A JP6690184 A JP 6690184A JP S60211752 A JPS60211752 A JP S60211752A
Authority
JP
Japan
Prior art keywords
state
substance
ion beam
laser
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59066901A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527212B2 (enrdf_load_stackoverflow
Inventor
Yoshihiro Ueda
植田　至宏
Koichi Ono
高一 斧
Tatsuo Omori
達夫 大森
Shigeto Fujita
重人 藤田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59066901A priority Critical patent/JPS60211752A/ja
Publication of JPS60211752A publication Critical patent/JPS60211752A/ja
Publication of JPH0527212B2 publication Critical patent/JPH0527212B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/24—Ion sources; Ion guns using photo-ionisation, e.g. using laser beam
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59066901A 1984-04-02 1984-04-02 イオンビ−ム発生装置 Granted JPS60211752A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59066901A JPS60211752A (ja) 1984-04-02 1984-04-02 イオンビ−ム発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59066901A JPS60211752A (ja) 1984-04-02 1984-04-02 イオンビ−ム発生装置

Publications (2)

Publication Number Publication Date
JPS60211752A true JPS60211752A (ja) 1985-10-24
JPH0527212B2 JPH0527212B2 (enrdf_load_stackoverflow) 1993-04-20

Family

ID=13329301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59066901A Granted JPS60211752A (ja) 1984-04-02 1984-04-02 イオンビ−ム発生装置

Country Status (1)

Country Link
JP (1) JPS60211752A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022999A (enrdf_load_stackoverflow) * 1973-06-28 1975-03-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022999A (enrdf_load_stackoverflow) * 1973-06-28 1975-03-12

Also Published As

Publication number Publication date
JPH0527212B2 (enrdf_load_stackoverflow) 1993-04-20

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