JPS60207138A - Image forming method - Google Patents
Image forming methodInfo
- Publication number
- JPS60207138A JPS60207138A JP6422284A JP6422284A JPS60207138A JP S60207138 A JPS60207138 A JP S60207138A JP 6422284 A JP6422284 A JP 6422284A JP 6422284 A JP6422284 A JP 6422284A JP S60207138 A JPS60207138 A JP S60207138A
- Authority
- JP
- Japan
- Prior art keywords
- composition layer
- photopolymerizable composition
- support
- layer
- image forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
- H05K3/184—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
Description
【発明の詳細な説明】
この発明はプリント基板などの製造に適用される画像形
成方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an image forming method applied to manufacturing printed circuit boards and the like.
一般にプリント基板を製造する際のノセターン形成手段
として、透明支持体上に光重合性組成物層を設けたドラ
イフィルムレジストと称される画像形成材料を使用し、
これを光重合組成物側が当接面となるように画像形成用
基板の表面に積層し、所定パターンの露光を行ったのち
、光重合性組成物層の未露光部分を上記支持体の剥離後
に現像液によって溶解除去するか、あるいは支持体を剥
離する過程で支持体への被着部分として剥離除去するこ
とにより、基板表面に露光硬化した光重合性組成物層か
らなる画像パターンを形成する方法が採用されている。Generally, an image forming material called a dry film resist in which a photopolymerizable composition layer is provided on a transparent support is used as a nosetan forming means when manufacturing printed circuit boards.
This was laminated on the surface of the image forming substrate so that the photopolymerizable composition side was the contact surface, and after exposure in a predetermined pattern, the unexposed part of the photopolymerizable composition layer was removed after peeling off the support. A method of forming an image pattern consisting of a photopolymerizable composition layer that has been cured by exposure to light on the surface of a substrate, by dissolving and removing it with a developer, or by peeling and removing it as a part attached to the support in the process of peeling the support. has been adopted.
ところが、上記ドライフィルムレジストでは必要特性の
うちでとくに解像性を重視することから光重合性組成物
層の厚みが一般に1.0ミル、1.5ミノへ2.0ミル
、3.0ミルなどに限定されているものが多い。このた
め画像パターンの形成後、上記厚み以上の電極メッキの
厚付けを行うと、第1図で示すようにメッキ金属1が基
板2上に形成された光重合性組成物層の硬化部分3の表
面上まで流延シてマツシュルーム状になるオーパーツ1
ングと称される現象を生じるという問題がある。However, in the above-mentioned dry film resist, resolution is particularly important among the required characteristics, so the thickness of the photopolymerizable composition layer is generally 1.0 mil, 1.5 mm, 2.0 mil, 3.0 mil. There are many things that are limited to. For this reason, if the electrode plating is applied thicker than the above thickness after forming the image pattern, the plating metal 1 will form on the cured portion 3 of the photopolymerizable composition layer formed on the substrate 2, as shown in FIG. Oparts 1 that is cast onto the surface and becomes like a pine mushroom
There is a problem in that a phenomenon called ``singing'' occurs.
そこで、このような現象を防止する方法として、ドライ
フィルムレジストによる画像形成工程を2回繰り返して
硬化部分3の厚みを増大させることが考えられる。しか
し、この方法では工程が複雑となりとくに湿式現像方式
では問題がちシ、しかも2回の露光パターンを精密に一
致させる必要があることから2度目の露光時におけるフ
ォトマスクの位置合わせに非常に困難を伴うことが予測
される。Therefore, as a method of preventing such a phenomenon, it is conceivable to increase the thickness of the cured portion 3 by repeating the image forming process using a dry film resist twice. However, this method complicates the process and is prone to problems, especially in wet development methods.Moreover, it is necessary to precisely match the exposure patterns of the two times, making it extremely difficult to align the photomask during the second exposure. It is expected that this will occur.
この発明者らは、上記観点からオーパーツ・ング現象を
生起させずに電極メッキの厚付けを行うことを可能とす
るために光重合性組成物層の硬化部分の厚みを増大させ
る方法について鋭意検討を重ねた結果、最初の画像形成
工程によって形成された硬化部分にのみ新だな光重合性
組成物層を付着させる特定手段を採用すれば、簡単な操
作で硬化部分の厚みを増大させることが可能となシ、し
かも2度目の露光は全面露光でよいから前述した画像形
成工程の2回縁シ返しにおける困難なフォトマスクの位
置合わせが不要となることを見い出し、この発明をなす
に至った。From the above point of view, the inventors have worked hard to find a method for increasing the thickness of the cured portion of the photopolymerizable composition layer in order to make it possible to thicken the electrode plating without causing the overparting phenomenon. As a result of repeated studies, we found that by adopting a specific method that attaches a new photopolymerizable composition layer only to the cured area formed by the first image forming process, it is possible to increase the thickness of the cured area with a simple operation. The present inventors have discovered that the second exposure can be carried out over the entire surface, eliminating the need for the difficult alignment of the photomask during the two-time edge turning in the image forming process described above, and have thus come up with this invention. Ta.
すなわちこの発明は、画像形成用基板の表面に、透明支
持体上に設けられた第1の光重合性組成物層を積層し、
パターン状の露光を行ったのち、上記光重合性組成物層
の未露光部分を上記支持体剥離後に現像液で溶解除去す
るかもしくは支持体剥離時に支持体と共に除去すること
により、上記基板表面に第1の光重合性組成物層の硬化
部分からなる画像パターンを形成し、さらに該画像パタ
ーン上に支持体に被着された第2の光重合性組成物層を
積層してなじませたのち、この支持体を剥離することに
より、第1の光重合性組成物層の硬化部分上にのみ第2
の光重合性組成物層を付着残留させ、その後全面露光す
ることを特徴とする画像形成方法に係る。That is, this invention laminates a first photopolymerizable composition layer provided on a transparent support on the surface of an image forming substrate,
After patterned exposure, the unexposed portions of the photopolymerizable composition layer are removed by dissolving them in a developer after peeling off the support, or are removed together with the support when peeling off the support, thereby forming a layer on the surface of the substrate. After forming an image pattern consisting of the cured portion of the first photopolymerizable composition layer, and further laminating and blending the second photopolymerizable composition layer adhered to the support on the image pattern, By peeling off this support, the second photopolymerizable composition layer is deposited only on the cured portion of the first photopolymerizable composition layer.
The present invention relates to an image forming method characterized by allowing a photopolymerizable composition layer to remain attached and then exposing the entire surface to light.
この発明において使用する透明支持体上に第1の光重合
性組成物層を設けた材料としては、従来より画像形成工
程として知られるもの、すなわち有機溶剤などの現像液
にて現像を行う一般的なドライフィルムレジスト、なら
びに剥離現像型ドライフィルムレジストをいずれも使用
できる。・・このような画像形成材料の具体例を挙げる
と、有機溶剤現像型ドライフィルムレジストとして商品
名でデュポン社製リストン、ダイナケム社製ラミナー、
日立化成工業社製フオテツクなどがあり、また剥離現像
型ドライフィルムレジストとして商品名で日東電気工業
社製ネオドロックなどがある。The material used in this invention, on which the first photopolymerizable composition layer is provided on the transparent support, is a material that is conventionally known as an image forming process, that is, a general method in which development is performed using a developer such as an organic solvent. Both dry film resists and peel-and-develop dry film resists can be used. Specific examples of such image-forming materials include organic solvent-developed dry film resists such as Liston manufactured by DuPont, Laminar manufactured by Dynachem, etc.
There are products such as Fotec made by Hitachi Chemical Co., Ltd., and there are also products such as Peel-off type dry film resists such as NeoDrock made by Nitto Electric Industries Co., Ltd.
そしてこのような画像形成材料による画像パターンの形
成は、それぞれの現像方式に応じた従来の画像形成方法
と同様にして行えばよい。すなわち、画像形成用基板の
表面に画像形成材料をその光重合性組成物層側を接合面
として積層し、パターン状の露光を行ったのち、現像液
による現像方式では透明支持体の剥離後に光重合性組成
物層の未露光部分を現像液にて溶解除去することにより
、剥離現像方式では透明支持体の剥離過程で上記未露光
部分を該支持体に被着した状態で同時に剥離除去するこ
とによシ、基板表面に第1の光重合性組成物層の硬化部
分からなる画像パターンを形成する。Formation of an image pattern using such an image forming material may be performed in the same manner as a conventional image forming method according to each developing method. That is, the image forming material is laminated on the surface of the image forming substrate with the photopolymerizable composition layer side as the bonding surface, and then exposed to light in a pattern. By dissolving and removing the unexposed portion of the polymerizable composition layer with a developer, in the peeling development method, in the process of peeling off the transparent support, the unexposed portion is simultaneously peeled off and removed while being adhered to the support. Then, an image pattern consisting of the cured portion of the first photopolymerizable composition layer is formed on the surface of the substrate.
この発明ではかくして形成された画像パターン上に、支
持体に被着された第2の光重合性組成物層を積層してな
じませたのち、該支持体を剥離することによシ、第1の
光重合性組成物層の硬化部分上にのみ第2の光重合性組
成物層を付着残留させ、その後全面露光を行う。すなわ
ち、第2図で示すように画像形成用基板2上に形成され
た第1の光重合性組成物層の硬化部分3上に支持体4に
被着された第2の光重合性組成物層5を積層し、この第
2の光重合性組成物層5と硬化部分3とが強固に接着す
るようにたとえば加温下で圧着するなどの手段で充分に
なじませたのち、第3図で示すように支持体4を剥離す
ることによって硬化部分3上にのみ第2の光重合性組成
物層5を刺着残留させる。次に全面露光を行って付着残
留した第2の光重合性組成物層5を硬化させると、画像
パターンの厚みはこの硬化部分5a分だけ増大するから
、第4図で示すようにオーバーハング現象を生じない状
態でメッキ金属1を厚付けすることができる。In this invention, the second photopolymerizable composition layer adhered to the support is laminated and blended onto the image pattern thus formed, and then the support is peeled off. The second photopolymerizable composition layer is left attached only on the cured portion of the photopolymerizable composition layer, and then the entire surface is exposed to light. That is, as shown in FIG. 2, the second photopolymerizable composition is deposited on the support 4 on the cured portion 3 of the first photopolymerizable composition layer formed on the image forming substrate 2. After the layers 5 are laminated and the second photopolymerizable composition layer 5 and the cured portion 3 are sufficiently blended together by, for example, pressure bonding under heating, so that the second photopolymerizable composition layer 5 and the cured portion 3 are firmly bonded, the layer 5 shown in FIG. By peeling off the support 4 as shown in , the second photopolymerizable composition layer 5 is stuck and remains only on the cured portion 3 . Next, when the entire surface is exposed to light and the remaining second photopolymerizable composition layer 5 is cured, the thickness of the image pattern increases by the amount of the cured portion 5a, resulting in an overhang phenomenon as shown in FIG. The plated metal 1 can be thickened without causing any damage.
なお、上述の方法が実現するには、第2図および第3図
で示すように第2の光重合性組成物層5の支持体4に対
する接着力をFl、同じく第1の光重合性組成物層の硬
化部分3に対する接着力をF2、同じく基板2に対する
接着力をF8とし、まだ第2の光重合性組成物層5の凝
集破壊による切断に要する力をF4 とすると、F2
> Fl > FaでかつF2 > Ft +F4であ
ればよい。従って、第2の光重合性組成物層として、そ
の支持体、第1の光重合性組成物層および基板の種類に
応じて上記条件を満足する組成を適宜選択すると共に、
第2の光重合性組成物層を第1の光重合性組成物層の硬
化部分になじ捷せるだめの圧着力や温度条件などを適当
に設定することが望まれる。In order to realize the above method, as shown in FIG. 2 and FIG. Let F2 be the adhesive force of the photopolymerizable composition layer to the cured portion 3, F8 be the adhesive force to the substrate 2, and F4 be the force required to cut the second photopolymerizable composition layer 5 due to cohesive failure.
> Fl > Fa and F2 > Ft + F4. Therefore, as the second photopolymerizable composition layer, a composition that satisfies the above conditions is appropriately selected depending on the type of the support, the first photopolymerizable composition layer, and the substrate, and
It is desirable to appropriately set the pressure and temperature conditions to allow the second photopolymerizable composition layer to blend into the cured portion of the first photopolymerizable composition layer.
このような第2の光重合性組成物層としては、一般的な
画像形成材料であるドライフィルムレジストの光重合性
組成物層が主としてアクリル系ないしメタクリル系ポリ
マーもしくはその共重合体と付加重合性不飽和結合を分
子中に少なくとも1個有する付加重合性化合物と共重合
開始剤とを含むものであるだめ、これを第1の光重合性
組成物層として用いた場合にその硬化部分と相溶性がよ
く強固に接着するように、前記条件を満足する範囲で上
述とほぼ同様の組成構成とすることが好ましい。As such a second photopolymerizable composition layer, the photopolymerizable composition layer of a dry film resist, which is a general image forming material, is mainly an acrylic or methacrylic polymer or a copolymer thereof and addition polymerizable. Since it contains an addition-polymerizable compound having at least one unsaturated bond in the molecule and a copolymerization initiator, when it is used as the first photopolymerizable composition layer, it has good compatibility with the cured part. In order to ensure strong adhesion, it is preferable to use a composition similar to that described above within a range that satisfies the above conditions.
この組成構成の目安としては、その支持体や基板の種類
によっである程度変動するが、たとえば有機溶剤現像型
や剥離現像型ドライフィルムレジストにて第1の光重合
性組成物層が構成される場合、アクリル系ないしメタク
リル系ポリマーもしくはその共重合体100重量部に対
して、前記付加重合性化合物が100〜1,000重量
部程度、他のポリマー成分が25〜400重量部程度と
し、光重合開始剤は上記付加重合性化合物100重量部
に対して3〜8重量部程度とするのがよい。As a guideline for this composition, the first photopolymerizable composition layer is composed of an organic solvent development type or peel development type dry film resist, for example, although it varies to some extent depending on the type of support and substrate. In the case of photopolymerization, the amount of the addition polymerizable compound is about 100 to 1,000 parts by weight, and the other polymer components are about 25 to 400 parts by weight, per 100 parts by weight of the acrylic or methacrylic polymer or its copolymer. The amount of the initiator is preferably about 3 to 8 parts by weight based on 100 parts by weight of the addition polymerizable compound.
そしてこれら成分中、アクリル系ないしメタクリル系ポ
リマーもしくはその共重合体、付加重合性化合物、光重
合開始剤は、いずれも従来のドライフィルムレジストの
光重合性組成物層に使用されているものを種々使用でき
る。また他のポリマー成分としては、剥離現像型ドライ
フィルムレジストに使用されているものと同様な成分、
たとえば塩素化ポリエチレン、飽和ボリエスノペ塩素化
ポリプロピレン、塩化ゴムなどが挙げられ、これらの使
用量によりとくに支持体に対する第2の光重合性組成物
層の投錨力すなわち前記Flが大きく左右され、支持体
の剥離によるパターン状の付着残留の可否がある程度定
まる。Among these components, acrylic or methacrylic polymers or their copolymers, addition polymerizable compounds, and photopolymerization initiators are all various types that are used in the photopolymerizable composition layer of conventional dry film resists. Can be used. Other polymer components include components similar to those used in peel-and-develop dry film resists,
Examples include chlorinated polyethylene, saturated polyethylene chlorinated polypropylene, chlorinated rubber, etc., and the amount of these used greatly influences the anchoring force of the second photopolymerizable composition layer to the support, that is, the above-mentioned Fl. It is determined to some extent whether or not a pattern of adhesion remains due to peeling.
一方、第2の光重合性組成物層を被着させる支持体とし
ては、透明である必要はないが、通常のドライフィルム
レジストに使用されるポリエチレンテレフタレートフィ
ルムなどのように伸びが少なくて強度の大きな厚みが1
2〜50 txm程度のものが好適である。On the other hand, the support on which the second photopolymerizable composition layer is applied does not need to be transparent, but it has low elongation and strength, such as polyethylene terephthalate film used in ordinary dry film resists. Large thickness is 1
Approximately 2 to 50 txm is suitable.
なお、これらの点から、第2の光重合性組成物層を支持
体に被着した材料として、通常の剥離現像型ドライフィ
ルムレジストは前記条件を満足するものとして一般的に
使用可能であるが、現像液を使用するドライフィルムレ
ジストは光重合性組成物層の支持体に対する投錨力が不
足するので不適であると言える。In addition, from these points, as the material for applying the second photopolymerizable composition layer to the support, a normal peel-and-develop type dry film resist can generally be used as a material that satisfies the above conditions. A dry film resist using a developer is said to be unsuitable because the anchoring force of the photopolymerizable composition layer to the support is insufficient.
以上のように、この発明の方法によれば、通常の画像形
成方法と同様にして形成した画像パターンの上から支持
体に被着された新だな光重合性組成物層を積層して該支
持体を剥離したのち全面露光する簡単な操作によシ、画
像パターンを有する基板に対してオーバーハング現象を
生じずに電極メッキの厚付けを可能とすることができる
。なおこの発明は前述したようなプリント基板の製造以
外に、装飾板などの作製にも適用できる。As described above, according to the method of the present invention, a new photopolymerizable composition layer adhered to a support is laminated on top of an image pattern formed in the same manner as a normal image forming method. By a simple operation of peeling off the support and then exposing the entire surface to light, it is possible to thicken the electrode plating without causing an overhang phenomenon on the substrate having an image pattern. Note that the present invention can be applied not only to the production of printed circuit boards as described above but also to the production of decorative boards and the like.
次に、この発明を実施例にて具体的に示す。以下におい
て部とあるのは重量部を意味する。Next, the present invention will be specifically illustrated with examples. In the following, parts mean parts by weight.
実施例1
銅張シ積層基板の清浄化した銅表面に、剥離現像型ドラ
イフィルムレジスト(日東電気工業社製商品名 ネオト
四ツク;光重合性組成物層の厚み約1.5ミル)を60
°Cの加温下で15 kg/lJ1にて加圧積層し、パ
ターン状の光透過部分を有するフォトマスクを密着させ
、超高圧水銀灯にて露光を行ったのち、基板温度を30
〜35°Cに維持して16μn2 厚のポリエチレンテ
レフタレートフィルムからなる透明支持体を剥離して第
1の光重合性組成物層の硬化部分からなる画像パターン
を形成した。Example 1 A peel-and-developable dry film resist (trade name: Neoto Yotsuku, manufactured by Nitto Electric Industries, Ltd.; photopolymerizable composition layer thickness: approximately 1.5 mils) was applied to the cleaned copper surface of a copper-clad laminated board at 60°C.
The substrate was laminated under a pressure of 15 kg/lJ1 under heating at °C, a photomask with a patterned light-transmitting part was attached, and after exposure with an ultra-high pressure mercury lamp, the substrate temperature was lowered to 30 °C.
The transparent support consisting of a 16 .mu.n@2 thick polyethylene terephthalate film was peeled off while maintaining the temperature at .about.35 DEG C. to form an image pattern consisting of the cured portions of the first photopolymerizable composition layer.
次に、この画像パターン上に上記と同じ剥離現像型ドラ
イフィルムレジストを60°Cの加温下で15 kq/
ctA にて加圧積層し、この状態を60分間維持して
レジスト同志をなじませたのち、常温下で支持体を剥離
したところ、画像パターンを構成する第1の光重合性組
成物層の硬化部分上にのみ第2の光重合性組成物層が付
着残留した。次いで超高圧水銀灯によシ全面露光を行っ
たところ、厚さ3ミルの光重合性組成物層の硬化部分か
らなる画像パターンが得られた。この基板に厚さ2.5
ミルの銅メッキの厚付けを行ったがオーバーハング現象
を生じなかった。Next, on this image pattern, the same peelable developable dry film resist as above was applied at a rate of 15 kq/distance at 60°C.
After laminating under pressure using ctA and maintaining this state for 60 minutes to blend the resists together, the support was peeled off at room temperature, and the first photopolymerizable composition layer constituting the image pattern was cured. The second photopolymerizable composition layer remained attached only on some portions. Full-surface exposure to an ultra-high pressure mercury lamp then resulted in an image pattern consisting of a 3 mil thick cured portion of the photopolymerizable composition layer. This board has a thickness of 2.5
Although the copper plating of the mill was thickened, no overhang phenomenon occurred.
実施例2
銅張り積層基板の清浄化した銅表面に、有機溶剤現像型
ドライフィルムレジスト(デュポン社製商品名R15t
on 1220 ;光重合性組成物層の厚み2ミノりを
110°Cの加温下で15 kti/caにて加圧積層
し、パターン状の光透過部分を有するフォトマスクを密
着させ、超高圧水銀灯にて露光を行ったのち、25μm
厚のポリエステルフィルムからなる透明支持体を剥離し
、■・1・1−トリクロルエタンにて未露光部分を溶解
除去して第1の光重合性組成物層の硬化部分からなる画
像パターンを形成した。Example 2 An organic solvent-developed dry film resist (product name: R15t manufactured by DuPont) was applied to the cleaned copper surface of a copper-clad laminate.
on 1220; A photopolymerizable composition layer with a thickness of 2 mm was laminated under pressure at 15 kti/ca under heating at 110°C, a photomask having a patterned light-transmitting part was attached, and ultra-high pressure was applied. After exposure with a mercury lamp, 25 μm
The transparent support made of a thick polyester film was peeled off, and the unexposed portion was dissolved and removed with 1-1-1-trichloroethane to form an image pattern consisting of the cured portion of the first photopolymerizable composition layer. .
次に、このパターン上に、25μ772厚のポリエチレ
ンテレフタレートフィルムからなる支持体に被着された
下記組成を有する第2の光重合性組成物層を60°Cの
加温下で15 kg/Cdにて加圧積層し、この状態を
60分間維持してレジスト同志を充分になじませた。Next, on top of this pattern, a second photopolymerizable composition layer having the following composition, which was adhered to a support made of a polyethylene terephthalate film with a thickness of 25μ772, was heated to 15 kg/Cd at 60°C. The resists were laminated under pressure, and this state was maintained for 60 minutes to fully blend the resists together.
〈第2の光重合性組成物層の組成〉
ベンゾフェノン ・・5部
ミヒラーズケトン ・・・0.5部
P−メトキシフェノール ・・・0.1 部次に、支持
体を常温下で剥離したところ、画像パターンを構成する
第1の光重合性組成物層の硬化部分上にのみ第2の光重
合性組成物層か伺着残留した。そののち超高圧水銀灯に
より全面露光を行ったところ、厚さ3.5ミルの光重合
性組成物層の硬化部分からなる画像パターンが得られた
。この基板に厚さ3ミルの銅メッキの厚付けを行ったが
オーバーハング現象を生じなかった。<Composition of second photopolymerizable composition layer> Benzophenone...5 parts Michler's ketone...0.5 part P-methoxyphenol...0.1 part Next, when the support was peeled off at room temperature, The second photopolymerizable composition layer remained only on the cured portion of the first photopolymerizable composition layer constituting the image pattern. Thereafter, the entire surface was exposed to light using an ultra-high pressure mercury lamp, resulting in an image pattern consisting of a cured portion of the photopolymerizable composition layer having a thickness of 3.5 mils. This board was plated with copper to a thickness of 3 mils, but no overhang occurred.
比較例
実施例2と同様にして第1の光重合性組成物層の硬化部
分からなる画像パターンを形成したのち、この画像パタ
ーン上に同じ有機溶剤現像型ドライフィルムレジストを
第1回目と同様にして積層し、パターン露光、支持体の
剥離、■・l−1−)IJクロルエタンによる現像を行
った。この方法によって2ミルの厚みを有する光重合性
組成物層の硬化部分からなる画像パターンが得られだが
、工程が複雑で多大の労力と時間が費され、また第2回
目の露光時にフ第1・マスクの位置合わせが第1回目の
画像パターンによる凹凸のために非常に困難であった。Comparative Example After forming an image pattern consisting of the cured portion of the first photopolymerizable composition layer in the same manner as in Example 2, the same organic solvent developable dry film resist was applied on this image pattern in the same manner as the first time. After lamination, pattern exposure, peeling off of the support, and development using IJ chloroethane were carried out. Although this method yields an image pattern consisting of a cured portion of the photopolymerizable composition layer having a thickness of 2 mils, it is a complex process, requires a great deal of labor and time, and also - It was very difficult to align the mask due to the unevenness caused by the first image pattern.
さらに細線部においては現像後の銅表面にスカム(目視
できない程度にレジストがイ」着残存している状態)が
発生し、のちに電極メッキの厚付けを行ったところ密着
性が不良となった。Furthermore, in the thin wire areas, scum (a state in which the resist remains attached to an extent that cannot be seen with the naked eye) was generated on the copper surface after development, and when the electrode plating was later applied thicker, the adhesion was poor. .
第1図は従来の画像形成方法にて得られた画像パターン
を有する基板に電極メッキの厚伺けを行った状態を示す
概略断面図、第2図および第3図はこの発明の画像形成
方法における第2の光重合性組成物層の付着残留操作を
示す概略断面図、第4図はこの発明の画像形成方法にて
得られた画像パターンを有する基板に電極メッキの厚付
けを行った状態を示す概略断面図である。
2・・・画像形成用基板、3・・・第1の光重合性組成
物層の硬化部分、4・・・支持体、5・・・第2の光重
合性組成物層、5a・・・第2の光重合性組成物層の硬
化部分。
特許出願人 日東電気工業株式会社
第1図
第2図FIG. 1 is a schematic cross-sectional view showing a state in which thick electrode plating has been applied to a substrate having an image pattern obtained by a conventional image forming method, and FIGS. 2 and 3 show an image forming method according to the present invention. FIG. 4 is a schematic cross-sectional view showing the operation of adhering and remaining the second photopolymerizable composition layer in FIG. FIG. 2... Image forming substrate, 3... Cured portion of first photopolymerizable composition layer, 4... Support, 5... Second photopolymerizable composition layer, 5a... - Cured portion of the second photopolymerizable composition layer. Patent applicant Nitto Electric Industry Co., Ltd. Figure 1 Figure 2
Claims (1)
れた第1の光重合性組成物層を積層し、パターン状の露
光を行ったのち、上記光重合性組成物層の未露光部分を
上記支持体剥離後に現像液で溶解除去するかもしくは支
持体剥離時に支持体と共に除去することにより、上記基
板表面に第1の光重合性組成物層の硬化部分からなる画
像パターンを形成し、さらに該画像パターン上に支持体
に被着された第2の光重合性組成物層を積層してなじま
せたのち、この支持体を剥離することにより、第1の光
重合性組成物層の硬化部分上にのみ第2の光重合性組成
物層をイ」着残留させ、その後全面露光することを特徴
とする画像形成方法。(1) After laminating the first photopolymerizable composition layer provided on the transparent support on the surface of the image forming substrate and exposing the photopolymerizable composition layer in a pattern, Forming an image pattern consisting of the cured portion of the first photopolymerizable composition layer on the surface of the substrate by dissolving and removing the exposed portion with a developer after peeling off the support, or removing it together with the support when peeling the support. Then, after laminating and blending the second photopolymerizable composition layer adhered to the support on the image pattern, the first photopolymerizable composition layer is peeled off. An image forming method characterized by leaving a second photopolymerizable composition layer only on the cured portion of the layer and then exposing the entire surface to light.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6422284A JPS60207138A (en) | 1984-03-31 | 1984-03-31 | Image forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6422284A JPS60207138A (en) | 1984-03-31 | 1984-03-31 | Image forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS60207138A true JPS60207138A (en) | 1985-10-18 |
Family
ID=13251857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6422284A Pending JPS60207138A (en) | 1984-03-31 | 1984-03-31 | Image forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60207138A (en) |
-
1984
- 1984-03-31 JP JP6422284A patent/JPS60207138A/en active Pending
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