JPS60206172A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS60206172A
JPS60206172A JP59063938A JP6393884A JPS60206172A JP S60206172 A JPS60206172 A JP S60206172A JP 59063938 A JP59063938 A JP 59063938A JP 6393884 A JP6393884 A JP 6393884A JP S60206172 A JPS60206172 A JP S60206172A
Authority
JP
Japan
Prior art keywords
layer
base
type gaas
mask
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59063938A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0318746B2 (enrdf_load_stackoverflow
Inventor
Kenichi Imamura
健一 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59063938A priority Critical patent/JPS60206172A/ja
Publication of JPS60206172A publication Critical patent/JPS60206172A/ja
Publication of JPH0318746B2 publication Critical patent/JPH0318746B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Bipolar Transistors (AREA)
JP59063938A 1984-03-30 1984-03-30 半導体装置の製造方法 Granted JPS60206172A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59063938A JPS60206172A (ja) 1984-03-30 1984-03-30 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59063938A JPS60206172A (ja) 1984-03-30 1984-03-30 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60206172A true JPS60206172A (ja) 1985-10-17
JPH0318746B2 JPH0318746B2 (enrdf_load_stackoverflow) 1991-03-13

Family

ID=13243785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59063938A Granted JPS60206172A (ja) 1984-03-30 1984-03-30 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60206172A (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4943583A (enrdf_load_stackoverflow) * 1972-08-30 1974-04-24
JPS5039076A (enrdf_load_stackoverflow) * 1973-08-08 1975-04-10
JPS57197862A (en) * 1981-05-29 1982-12-04 Fujitsu Ltd Active semiconductor device and manufacture thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4943583A (enrdf_load_stackoverflow) * 1972-08-30 1974-04-24
JPS5039076A (enrdf_load_stackoverflow) * 1973-08-08 1975-04-10
JPS57197862A (en) * 1981-05-29 1982-12-04 Fujitsu Ltd Active semiconductor device and manufacture thereof

Also Published As

Publication number Publication date
JPH0318746B2 (enrdf_load_stackoverflow) 1991-03-13

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