JPS60204876A - クラスタビ−ム蒸着装置 - Google Patents

クラスタビ−ム蒸着装置

Info

Publication number
JPS60204876A
JPS60204876A JP5823084A JP5823084A JPS60204876A JP S60204876 A JPS60204876 A JP S60204876A JP 5823084 A JP5823084 A JP 5823084A JP 5823084 A JP5823084 A JP 5823084A JP S60204876 A JPS60204876 A JP S60204876A
Authority
JP
Japan
Prior art keywords
clusters
substrate
deposited
ionized
crucible
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5823084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0536504B2 (enrdf_load_stackoverflow
Inventor
Takeoki Miyauchi
宮内　建興
Hiroshi Yamaguchi
博司 山口
Mikio Hongo
幹雄 本郷
Katsuro Mizukoshi
克郎 水越
Akira Shimase
朗 嶋瀬
Ryohei Sato
了平 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5823084A priority Critical patent/JPS60204876A/ja
Priority to KR1019840006920A priority patent/KR890002747B1/ko
Priority to DE8484113348T priority patent/DE3485563D1/de
Priority to EP84113348A priority patent/EP0141417B1/en
Priority to US06/668,843 priority patent/US4687939A/en
Publication of JPS60204876A publication Critical patent/JPS60204876A/ja
Publication of JPH0536504B2 publication Critical patent/JPH0536504B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/221—Ion beam deposition

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP5823084A 1983-11-07 1984-03-28 クラスタビ−ム蒸着装置 Granted JPS60204876A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP5823084A JPS60204876A (ja) 1984-03-28 1984-03-28 クラスタビ−ム蒸着装置
KR1019840006920A KR890002747B1 (ko) 1983-11-07 1984-11-05 이온 빔에 의한 성막방법 및 그 장치
DE8484113348T DE3485563D1 (de) 1983-11-07 1984-11-06 Vorrichtung zur herstellung eines filmes mittels ionenstrahl.
EP84113348A EP0141417B1 (en) 1983-11-07 1984-11-06 Apparatus for forming film by ion beam
US06/668,843 US4687939A (en) 1983-11-07 1984-11-06 Method and apparatus for forming film by ion beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5823084A JPS60204876A (ja) 1984-03-28 1984-03-28 クラスタビ−ム蒸着装置

Publications (2)

Publication Number Publication Date
JPS60204876A true JPS60204876A (ja) 1985-10-16
JPH0536504B2 JPH0536504B2 (enrdf_load_stackoverflow) 1993-05-31

Family

ID=13078280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5823084A Granted JPS60204876A (ja) 1983-11-07 1984-03-28 クラスタビ−ム蒸着装置

Country Status (1)

Country Link
JP (1) JPS60204876A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0536504B2 (enrdf_load_stackoverflow) 1993-05-31

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