JPS60199758A - Transfer mechanism - Google Patents
Transfer mechanismInfo
- Publication number
- JPS60199758A JPS60199758A JP5645584A JP5645584A JPS60199758A JP S60199758 A JPS60199758 A JP S60199758A JP 5645584 A JP5645584 A JP 5645584A JP 5645584 A JP5645584 A JP 5645584A JP S60199758 A JPS60199758 A JP S60199758A
- Authority
- JP
- Japan
- Prior art keywords
- plane bearing
- air
- guideway
- guide way
- air supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
Description
【発明の詳細な説明】
〔技術分野）
本発明は半導体装置等に使用される移動機構に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a moving mechanism used for semiconductor devices and the like.
（従来技術）
従来、半導体装置のガイドウェー上に両側に車輪全取付
けた平面軸受全載置し該ガイドウェー上を移動させる移
動機構が知られている。(Prior Art) Conventionally, there has been known a moving mechanism in which a plane bearing with all wheels attached to both sides is entirely placed on a guideway of a semiconductor device and the device is moved on the guideway.
しかしながら、かかる移動機構では車輪とガイドウェー
との間の摩擦により騒音が発生することは勿論のこと摩
耗により塵埃が生じ半導体装置全劣化させるという欠点
を有していた。まだ、該平面軸受の移動抵抗も大きく円
滑な移動が妨げられていた。However, such a moving mechanism has the disadvantage that not only noise is generated due to friction between the wheels and the guideway, but also dust is generated due to wear and the semiconductor device is completely deteriorated. However, the movement resistance of the plane bearing was large and prevented smooth movement.
（発明の目的）
不発−的は前記従来の欠点に鑑み、平面軸受とガイドウ
ェーとを非接触状態に保持し、該ガイドウェー上を平面
軸受が円滑に移動することができる移動機構を提供しよ
うとするものである。(Objective of the Invention) In view of the above-mentioned drawbacks of the conventional art, it is an object of the present invention to provide a moving mechanism that maintains a plane bearing and a guideway in a non-contact state and allows the plane bearing to move smoothly on the guideway. That is.
（発明の構成）
本発明は上記目的を達成するだめ、拘束子を取付けると
共に底面に所定幅を有する空気溜を形成した平面軸受と
、前記拘束子に対向する位置にガイ）’ ｌ／−ルを設
けると共に空気供給管の複数の空気供給口全前記平面軸
受の空気溜との対向面に開口しかつ該平面軸受の移動方
向に所定間隔をおいて配置させたガイドウェーと金備え
、前記拘束子と前記ガイドレールとを磁気的の
結合手段構成したことを特徴とする。(Structure of the Invention) In order to achieve the above-mentioned object, the present invention includes a plane bearing to which a restraint is attached and an air pocket having a predetermined width formed on the bottom surface, and a guide at a position facing the restraint. a plurality of air supply ports of the air supply pipe are all opened at the surface facing the air reservoir of the plane bearing and are arranged at predetermined intervals in the direction of movement of the plane bearing, and a guideway and a metal fitting, and the restraint. The device is characterized in that the child and the guide rail are configured as a magnetic coupling means.
〔実施例）
第１図乃至第４図は本発明の一実施例を示すもので、Ｉ
Ｏは偏平な直方体形状に形成された平面軸受、ｌｌａ、
ｌｌｂは永久磁石からなる一対の拘束子で、前記平面軸
受１０の長手方向両側の一端寄りに対向して埋設されて
いる。１２は後述する空気供給管３０から供給された空
気を溜める空気溜で、前記平面軸受１０の裏面の幅方向
中央を長手方向に沿って所定幅、所定長さだけ陥没尽せ
て形成している。１３は前記空って略丁字状に形成され
、空気溜１２の空気全噴出させる。これによって平面軸
受１０’（ｒいわゆる表面絞り形の静圧気体軸受とし軸
受剛性を発揮させている。[Example] Figures 1 to 4 show an example of the present invention.
O is a flat bearing formed in the shape of a flat rectangular parallelepiped, lla,
llb is a pair of restrainers made of permanent magnets, which are buried facing each other near one end of both sides of the plane bearing 10 in the longitudinal direction. Reference numeral 12 denotes an air reservoir for storing air supplied from an air supply pipe 30, which will be described later, and is formed by recessing the widthwise center of the back surface of the plane bearing 10 by a predetermined width and a predetermined length along the longitudinal direction. Reference numeral 13 is formed in the shape of a substantially T-shape, and causes all of the air in the air reservoir 12 to be blown out. As a result, the plane bearing 10' (r) is a so-called surface drawing type static pressure gas bearing and exhibits bearing rigidity.
２０は前記平面軸受１０をガイドするガイドウニ〜で、
該平面軸受ｌＯを中央に載置したとき前記拘束子１１
ａ 、 ｌ １１）と対応する上面に磁性部材（軟鉄、
パーマロイ、磁心用フェライト等）からなるガイドレー
ル２１を長手方向に沿って延設している。20 is a guide urchin for guiding the plane bearing 10;
When the plane bearing lO is placed in the center, the restrainer 11
A magnetic member (soft iron,
A guide rail 21 made of permalloy, ferrite for magnetic core, etc.) extends along the longitudinal direction.
３０は図示しない空気供給ポンプ等に連結した複数の空
気供給管で、先ｉの空気供給口３０ａ相互間の間隔ｗ’
２前記平面軸受１０の空気溜１２の長手方向の長さより
多少小さくして、前記ガイドウェー２０の長手方向（平
面軸受１０の移動方向）に埋設すると共に、空気供給口
３０ａ寄りを上方に屈曲して該ガイ１ウエー２０の上面
略中央から空気を噴出する如く形成している。Reference numeral 30 denotes a plurality of air supply pipes connected to an air supply pump (not shown), etc., and the distance w' between the air supply ports 30a is
2. The guideway 20 is buried in the longitudinal direction of the guideway 20 (the direction of movement of the plane bearing 10) so as to be slightly smaller than the length in the longitudinal direction of the air reservoir 12 of the plane bearing 10, and the side near the air supply port 30a is bent upward. The guide 1 way 20 is formed so that air is blown out from approximately the center of the upper surface thereof.
４０は前記各空気供給管３０に数句けられたバルブで、
前記ガイドレール２１に取付けられた近接スイッチ（図
示しない）［て前記平面用■受１０ｉ検知したとき該平
面軸受１０の空気溜１２に対向する空気供給管３０のバ
ルブ４ｏが開放するよう設定されている。40 is several valves installed in each of the air supply pipes 30;
When a proximity switch (not shown) attached to the guide rail 21 detects the plane bearing 10i, the valve 4o of the air supply pipe 30 facing the air reservoir 12 of the plane bearing 10 is set to open. There is.
本発明に係る移動機構は前述の如く、平面軸受１０の空
気溜１２に対向する空気供給管３゜がら空気溜１２へ空
気が噴出すると共に浅溝１３からガイドウェー２０ＶＣ
向けて空気が噴出することから、平面軸受ｌＯはガイド
ウェー２０から浮上し非接触状態となり、また平面軸受
１０の永久磁石からなる拘束子１１ａ、ｌｌｂは磁性部
材からなるガイドレール２１を吸引することから、平面
軸受ｌＯはガイドウェー２０上に保持され、平面軸受１
０はガイドウェー２０上金非接触状態で移動することが
可能となる。As described above, in the moving mechanism according to the present invention, air is ejected from the air supply pipe 3° facing the air reservoir 12 of the plane bearing 10 to the air reservoir 12, and at the same time air is ejected from the shallow groove 13 to the guideway 20VC.
Since the air is ejected towards the guideway 20, the plane bearing 1O floats up from the guideway 20 and becomes in a non-contact state, and the restrainers 11a and llb made of permanent magnets of the plane bearing 10 attract the guide rail 21 made of a magnetic member. , the plane bearing lO is held on the guideway 20, and the plane bearing 1
0 can move on the guideway 20 without contacting the gold.
また、空気供給管３０は平面軸受１０に配設することな
くガイドウェー２０１Ｃ設けていることから、空気供給
管３０より平面軸受ｌＯの移動が阻害されることなく円
滑な移動が可能となる。Further, since the air supply pipe 30 is not disposed on the plane bearing 10 but is provided in the guideway 201C, the movement of the plane bearing IO is not hindered by the air supply pipe 30, and smooth movement is possible.
更に、ガイドウェー２０が直線的に形成されているとき
は勿論のこと複雑に湾曲している場合であっても、第４
図に示すようにガイ１ウエー２０の空気供給口３０ａ相
互間の距離を前記ＸｒｌｄＨｉＩＮ＋−”Ｉ’−＋ｎｎ
）ゲｎＧ５”Ｃｎ４ｎ４＼Ｅつ一−１−Ｓ＋ｈ１０（＋
Ｗ４にり多小短い間隔Ｗで配設し、かつ、空気溜１２の
幅を多少広く形成して−ることから、空気供給管３０の
いずれか一つは常時空気溜１２に空気を供給し、移動板
１０とガイドウェー２０とは常時無接触状態に保持され
る。Furthermore, even if the guideway 20 is formed linearly, or even if it is complicatedly curved, the fourth guideway 20
As shown in the figure, the distance between the air supply ports 30a of the guy 1 way 20 is set as XrldHiIN+-"I'-+nn
)gennG5”Cn4n4\Etsuichi-1-S+h10(+
Since the air supply pipes 30 are arranged at a somewhat short interval W4 and the width of the air reservoir 12 is made somewhat wide, any one of the air supply pipes 30 constantly supplies air to the air reservoir 12. , the movable plate 10 and the guideway 20 are always maintained in a non-contact state.
更にまた、本発明に係る移動機構はガイドウェー２０と
無接触状態で平面軸受１０の移動が可能となるから、従
来の移動機構の如く平面軸受の車輪とガイドウェーとの
間の摩擦により騒音及び塵埃が発生することはないし、
また平面″軸受の移動抵抗も小さくなる。Furthermore, since the moving mechanism according to the present invention allows the plane bearing 10 to move without contacting the guideway 20, noise and noise due to friction between the wheels of the plane bearing and the guideway are reduced unlike in the conventional moving mechanism. No dust is generated,
Furthermore, the movement resistance of the plane bearing is also reduced.
尚、前記実施例においては平面軸受１０の拘束子１１ａ
、１ｌｂｋ永久磁石とし、ガイドウェー２０のガイドレ
ール２１′ｆ！：磁性部材から形成しているが、拘束子
１１ ａ 、 ｌ １１） ｆ磁性部材から形成しガイ
ドレール２１を永久磁石により形成しても良いことは勿
論であるし、またガイドレール２１を拘束子１１ａ、ｌ
ｌｂの磁極と異なる磁極を対向させた永久磁石としても
良（発明の効果）
以上説明した如く本発明は拘束子を数句けると共に底面
に所定幅を有する空気溜を形成した平面軸受と、前記拘
束子に対向する位置にガイドレールを設けると共に空気
供給管の複数の空気供給口を前記平面軸受の空気溜との
対向面に開口しかつ該平面軸受の移動方向に所定間隔を
おいて配置させたガイド、ウェーとを備え、前記拘束子
と前記ガイドレールとを磁気的結合手段て０
１話成しだので、空気供給管の空気供給口から平面軸受
の空気溜へ空気が噴出し、平面軸受をガイドウェーから
浮上させ非接触状態とすると共に、平面軸受の拘束子と
ガイドウニ＝のガイドウェールとが吸引し平面軸受をガ
イｌ−″ウェー」二に保持することから、平面軸受はガ
イドウェー上を非接触状態で移動することが可能となる
。従って、騒音及び塵埃を発生させることがないことは
勿論のこと平面軸受の移動抵抗も小さな移動機構を提供
することができるという利点等を有する。Incidentally, in the above embodiment, the restrainer 11a of the plane bearing 10
, 1lbk permanent magnet, and guide rail 21'f of guideway 20! :Although the restrainers 11a, l11) f are formed from a magnetic member, it goes without saying that the guide rail 21 may be formed from a permanent magnet, and the guide rail 21 may also be formed from a restrainer. 11a,l
It can be used as a permanent magnet with magnetic poles different from the magnetic poles of lb. A guide rail is provided at a position facing the restrainer, and a plurality of air supply ports of the air supply pipe are opened on a surface facing the air reservoir of the plane bearing and are arranged at predetermined intervals in the direction of movement of the plane bearing. Since the restrainer and the guide rail are provided with a magnetic coupling means, air is ejected from the air supply port of the air supply pipe to the air reservoir of the plane bearing, and the plane The bearing floats above the guideway and is in a non-contact state, and the restrainer of the plane bearing and the guide wale of the guide urchin attract each other and hold the plane bearing in the guideway. It becomes possible to move around the top without contact. Therefore, it has the advantage that it is possible to provide a moving mechanism that does not generate noise or dust, and also has a small movement resistance of the plane bearing.
図面は本発明に係る移動機構の一実施例金示すもので、
第１図は一部省略斜視図、第２図は平面軸受の底面を示
す底面図、第３図は空気供給管の配設状態を示す一部省
略斜視図、第４図は湾曲したガイドウェー上における平
面軸受の移動状態を示す平面図である。
図中、１０・・・平面軸受、ｌｌａ、１ｌｌ）・・・拘
束子、１２・・・空気溜、２０・・・ガイドウェー、２
１・・・ガイドレール、３０・・・空気供給管、３０ａ
・空気供給口。
特許出願人 日本電信電話公社
代理人弁理士 吉 １）精 孝The drawing shows one embodiment of the moving mechanism according to the present invention.
Fig. 1 is a partially omitted perspective view, Fig. 2 is a bottom view showing the bottom of the plane bearing, Fig. 3 is a partially omitted perspective view showing the arrangement of the air supply pipe, and Fig. 4 is a curved guideway. It is a top view which shows the moving state of the plane bearing in the upper part. In the figure, 10... Plane bearing, lla, 1ll)... Restrictor, 12... Air reservoir, 20... Guideway, 2
1... Guide rail, 30... Air supply pipe, 30a
・Air supply port. Patent applicant: Yoshi, patent attorney representing Nippon Telegraph and Telephone Public Corporation 1) Takashi Sei
Claims (1)
形成した平面軸受と、前記拘束子に対向する位置にガイ
ＩＳレールを設けると共に空気供給管の複数の空気供給
口を前記平面軸受の空気溜との対向面に開口りかつ該平
面軸受の移動方向に所定間隔全おいて配置させたガイト
ウ移動機構。A plane bearing is provided with a restrainer attached thereto and has a full air pocket having a predetermined width formed on the bottom surface, a guide IS rail is provided at a position facing the restrainer, and a plurality of air supply ports of an air supply pipe are connected to the air reservoir of the plane bearing. A guide moving mechanism having an opening on a surface facing the plane bearing and disposed at a predetermined interval in the moving direction of the plane bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5645584A JPS60199758A (en) | 1984-03-24 | 1984-03-24 | Transfer mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5645584A JPS60199758A (en) | 1984-03-24 | 1984-03-24 | Transfer mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60199758A true JPS60199758A (en) | 1985-10-09 |
Family
ID=13027578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5645584A Pending JPS60199758A (en) | 1984-03-24 | 1984-03-24 | Transfer mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60199758A (en) |
-
1984
- 1984-03-24 JP JP5645584A patent/JPS60199758A/en active Pending
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