JPH0582334A - Electromagnetic conveyor - Google Patents

Abstract

PURPOSE:To rapidly stop a conveyor base and to stably hold it. CONSTITUTION:The electromagnetic conveyor comprises an electromagnetic braking mechanism 2 formed of a stopping electromagnet 7 of a conveyor passage 1 side and a magnetic member 8 of a conveyor base 10 side, and an electromagnetic damper mechanism 3 formed of an electromagnet 13 for a damper of the passage 1 side and a plate 14 of a nonmagnetic conductor provided adjacently to the advancing direction side of the member 8.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electromagnetic carrier,
In particular, it is an electromagnetic non-contact transfer device in which the transfer base floats from the track due to magnetic force and moves in a non-contact state, and the transfer base is accurately stopped at a predetermined position, and the stopped state at that accurate position is maintained. The present invention relates to an electromagnetic transfer device that can perform.

[0002]

2. Description of the Related Art Generally, in an electromagnetic non-contact carrier device, various operations such as stopping, holding and moving of the carrier table are performed by magnetic means such as a permanent magnet or an electromagnet using a coil. Done. Since the carrier is floated from the track by magnetic means and moves while maintaining a non-contact state, it is often used in a semiconductor manufacturing facility where generation of dust is very strict.

The conventional stopping means is composed of an electromagnetic brake mechanism, and generally includes a stop electromagnet which is arranged on the conveyance path side at a predetermined interval so as to face each other on the left and right, and a conveyance table side which is arranged on the center line of the stop electromagnet. It consists of a magnetic member.
Then, the magnetic member is attracted by the electromagnet to stop the carrier at a predetermined position.

[0004]

In the conventional electromagnetic brake mechanism, it is difficult to stably stop the carrier because only the magnetic spring force is applied.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an electromagnetic transfer device capable of stably stopping a transfer table.

[0006]

In order to achieve the above object, an electromagnetic transfer apparatus according to the present invention has an electromagnetic brake mechanism including a stop electromagnet on the transfer path side and a magnetic member on the transfer table side, and an electromagnetic brake mechanism on the transfer path side. An electromagnetic damper mechanism including a damper electromagnet and a plate of a non-magnetic good conductor provided adjacent to the transporting side of the magnetic member on the side of the carrier is provided.

[0007]

According to the electromagnetic transfer device of the present invention, the magnetic attraction force acting between the magnetic member and the electromagnet in the electromagnetic brake mechanism and the eddy current generated in the plate of the non-magnetic good conductor in the electromagnetic damper mechanism. The carrier can be quickly stopped and stably held by the damping force due to.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of an electromagnetic transfer device according to the present invention will be described below with reference to the drawings.

1 to 3, an electromagnetic transfer apparatus according to the present invention comprises a transfer path 1 and a transfer table 10 which is floated up in the transfer path 1 and is installed in either one of them. Is provided with a levitation electromagnet and a guiding electromagnet (not shown), and on the other side, a magnetic member facing the electromagnets is provided. The electromagnetic transfer device includes an electromagnetic brake mechanism 2 and electromagnetic damper mechanisms 3 and 3 which are arranged so as to sandwich the electromagnetic brake mechanism 2 at a predetermined interval in the traveling direction of the transfer path 1.

The electromagnetic brake mechanism 2 is shown in FIGS.
As shown in FIG. 4, a magnetic member 4 having an approximately C-shaped cross section having an opening 4a in the upper part, and a pair of coils located at positions sandwiching the opening 4a of the magnetic member 4 and facing each other. A stopping electromagnet 7 composed of 5 and 6;
It is composed of a magnetic member 8 extending from the carrier 10 and arranged between the coils 5 and 6.

The electromagnetic damper mechanism 3 is shown in FIGS.
As shown in FIG. 7, a magnetic material 9 having an approximately C-shaped cross section having an opening 9a in the upper part, and a pair of coils provided at positions sandwiching the opening 9a of the magnetic material 9 and facing each other. A damper electromagnet 13 composed of 11 and 12, and a plate 1 made of a non-magnetic material such as aluminum or copper provided on the front and rear sides of the magnetic member 8 in the traveling direction.
It consists of 4,14. Here, the magnetic member 8 functions as a target, and the plates 14 and 14 are connected to the carrier table 10.
On the other hand, it functions as a target holder for holding the magnetic member 8.

According to the electromagnetic transfer apparatus of the present invention having the above-mentioned structure, the coils 5, 6 of the electromagnetic brake mechanism 2 are
When energized, magnetic lines of force are generated to form a magnetic field.

When the magnetic member 8 of the carrier 10 which moves in the direction of the arrow in FIGS. 1 and 2 enters this magnetic field, a magnetic attractive force is applied to apply a braking force, but the inertial force of the carrier 10 is applied. Thus, the magnetic member 8 tries to move to a position separated from the electromagnet 7. Here, since the moving direction of the magnetic member 8 is the direction of shearing the magnetic flux, the magnetic flux or the lines of magnetic force exert a restoring force in the direction of suppressing the shearing.

Due to this restoring force, the carrier 10 and the magnetic member 8 move backward toward the electromagnet 7. An inertial force is also generated during this backward movement, but this is also suppressed by the restoring force described above. Therefore, the carrier 10 and the magnetic member 8 have the openings 4a.
It stops in the center of.

On the other hand, in parallel with the above operation, since the coils 11 and 12 of the electromagnetic damper mechanism 3 are also energized, a magnetic flux is generated by these coils 11 and 12. The plate 14 made of a good non-magnetic conductor vibrates in this magnetic flux, so that an eddy current is generated between the plate 14 and the electromagnet 13, and a damping force is given to the vibration of the carrier 10. Therefore, according to the present embodiment, the carrier can be stopped quickly and stably held by the synergistic action of the electromagnetic brake mechanism and the electromagnetic damper mechanism.

FIG. 4 shows an embodiment in which a large number of slits S, S ... Are formed in the plate 14 made of a good conductor shown in FIGS.

By forming a large number of slits S in the plate 14, the flow of the eddy current is blocked by the slits S, so that the magnitude of the damping force can be adjusted.

[0018]

As is apparent from the above description, according to the electromagnetic transfer apparatus of the present invention, the magnetic attraction force acting between the magnetic member and the electromagnet in the electromagnetic brake mechanism and the non-magnetic force in the electromagnetic damper mechanism. Due to the damping force due to the eddy current generated between the plate of a good magnetic conductor and the electromagnet, the carrier table can be quickly stopped and stably held.

[Brief description of drawings]

FIG. 1 is a perspective view showing a basic configuration of an embodiment of an electromagnetic transfer device according to the present invention.

FIG. 2 is a plan view showing the basic configuration of an embodiment of the electromagnetic transfer device according to the present invention.

FIG. 3 is a side view of an embodiment of an electromagnetic transfer device according to the present invention.

FIG. 4 is a plan view showing a case where slits are provided in the plate shown in FIG.

[Explanation of symbols]

 1 Transport path 2 Electromagnetic brake mechanism 3 Electromagnetic damper mechanism 4,9 C-shaped magnetic material 5,6,11,12 Coil 7 Stopping electromagnet 8 Magnetic member 10 Transport stand 13 Damper electromagnet 14 Plate

Claims (3)

[Claims] 1. An electromagnetic brake mechanism including a stop electromagnet on the transport path side and a magnetic member on the transport base side, and a damper electromagnet on the transport path side and the magnetic member on the transport base side provided adjacent to the traveling direction side. And an electromagnetic damper mechanism including a plate made of a non-magnetic and good conductor. 2. The damper electromagnets are provided in plural at intervals in the traveling direction of the carrier, and the plates are provided on both front and rear sides of the magnetic member in the traveling direction. The electromagnetic carrier described. 3. The electromagnetic transfer device according to claim 1, wherein the plate of the non-magnetic good conductor has a slit structure.