JPS63148804A - Attraction type magnetic levitation guiding apparatus - Google Patents

Attraction type magnetic levitation guiding apparatus

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Publication number
JPS63148804A
JPS63148804A JP29515986A JP29515986A JPS63148804A JP S63148804 A JPS63148804 A JP S63148804A JP 29515986 A JP29515986 A JP 29515986A JP 29515986 A JP29515986 A JP 29515986A JP S63148804 A JPS63148804 A JP S63148804A
Authority
JP
Japan
Prior art keywords
rail
levitation
electromagnet
electromagnets
yoke
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29515986A
Other languages
Japanese (ja)
Other versions
JPH07123321B2 (en
Inventor
Toshiro Shimada
嶋田 俊郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP29515986A priority Critical patent/JPH07123321B2/en
Publication of JPS63148804A publication Critical patent/JPS63148804A/en
Publication of JPH07123321B2 publication Critical patent/JPH07123321B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)

Abstract

PURPOSE:To broaden the stable range of a control by using a rail of H-shaped section in which the legs of both ends become the elements to be attracted, projecting poles for generating attracting forces upward and downward toward the rail and oppositely disposing the levitation electromagnets coupled by a yoke. CONSTITUTION:A rail 11 of H-shaped section in which legs 11a of both ends become elements to be attracted is used as a rail. Poles 12b, 13b for generating attracting forces are projected above and below the rail 11 toward the rail 11 and levitation electromagnets 12, 13 into which coils 12a, 13a are wound on a core are oppositely disposed through an air gap. The electromagnets 12, 14 are mechanically and magnetically coupled by a yoke 14 on one side of the rail 11. Further, the interval W of the legs 11a, and intervals W1, W2 between the poles of the electromagnets 12, 13 are set to different values. The coils 12a, 13a, 15 are controlled in response to the outputs of a levitation gap sensor 3 and a guide gap sensor 8.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、吸引式磁気浮上走行システムの磁気浮上案
内装置に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magnetic levitation guide device for an attraction type magnetic levitation traveling system.

〔従来の技術〕[Conventional technology]

吸引式磁気浮上方式の鉄道や物品搬送装置等において、
浮上と同時に案内制御も行う場合に従来採られている方
法の例を第3図に示す。図の1は鉄等の強磁性体から成
るレール、2は浮上用電磁石、2aばそのコイル、3は
レール1と電磁石2との間の距離(ギャップ)を検出す
る浮上用ギャップセンサ、4は浮上用制御回路、5は電
力増幅器であり、これ等を必須の要素とする浮上系は、
ギャップセンサ3からのフィードバック信号を制御回路
4で処理し、さらに、増幅器5で増幅してを磁石2のコ
イル2aに流す電流を制御し、レール1と電磁石2との
間のギャップを一定に保つ。
In attraction type magnetic levitation type railways and goods conveyance equipment, etc.
FIG. 3 shows an example of a conventional method when guiding control is performed simultaneously with levitation. In the figure, 1 is a rail made of ferromagnetic material such as iron, 2 is a levitation electromagnet, 2a is a coil, 3 is a levitation gap sensor that detects the distance (gap) between rail 1 and electromagnet 2, and 4 is a levitation gap sensor. A levitation control circuit, 5 is a power amplifier, and a levitation system that includes these as essential elements is as follows:
The feedback signal from the gap sensor 3 is processed by the control circuit 4, further amplified by the amplifier 5, and the current flowing through the coil 2a of the magnet 2 is controlled to keep the gap between the rail 1 and the electromagnet 2 constant. .

この浮上系では、電力消費を少なくするため、電磁石2
の磁極面に永久磁石6を取付け、荷重負担の一部又は大
部分を永久磁石6の吸引力に依存する場合もある。
In this levitation system, in order to reduce power consumption, the electromagnet 2
In some cases, a permanent magnet 6 is attached to the magnetic pole surface of the magnet, and part or most of the load is borne by the attractive force of the permanent magnet 6.

一方、先の浮上系は、左右方向の水平案内力を発生し得
ないので、レールの一側部に浮上系と同一構造の、即ち
、コイル7aを巻いた電磁石7、レールの側面に対向す
るギャップセンサ8、そのフィードバック信号を処理す
る制御回路9、処理信号の増幅器10によって構成され
る案内制御系を設け、電磁石7の吸引力で案内側?11
を行う。
On the other hand, since the above-mentioned levitation system cannot generate a horizontal guiding force in the left-right direction, an electromagnet 7 having the same structure as the levitation system, that is, a coil 7a wound thereon, is placed on one side of the rail, facing the side of the rail. A guide control system consisting of a gap sensor 8, a control circuit 9 for processing its feedback signal, and an amplifier 10 for the processed signal is provided, and the attraction force of the electromagnet 7 is used to control the guide side. 11
I do.

以上の如き制御を行う従来法では、浮上用電磁石2が吸
引力しか発生しないため、安定した制御領域が狭くなり
、かつ、制御応答性も悪くなることを避けられない。た
とえば、永久磁石6によるギャップ磁場(ギャップ部の
磁束密度)をB、電磁石2によるギャップ磁場を±b(
士は電流の方向に対応する)とすると、吸引力Fはギャ
ップ磁場の2乗に比例するから、 F QC(B±b)”≧Q で示され、この式から判るように、反発力を全く生じな
いため、上述の問題が生じる。
In the conventional control method as described above, since the levitation electromagnet 2 generates only an attractive force, it is inevitable that the stable control range becomes narrow and the control response becomes poor. For example, the gap magnetic field due to the permanent magnet 6 (magnetic flux density at the gap) is B, and the gap magnetic field due to the electromagnet 2 is ±b(
(corresponds to the direction of the current), then the attractive force F is proportional to the square of the gap magnetic field, so it is shown as F QC(B±b)''≧Q, and as seen from this equation, the repulsive force Since this does not occur at all, the above-mentioned problem arises.

また、案内系も、同じ理由により電磁石7が吸引力しか
発生しないため、案内機能を得るためには、レールを2
条設ける等して浮上走行体の左右に案内装置を相反する
向きに設置する必要がある。
Also, in the guide system, for the same reason, the electromagnet 7 only generates an attractive force, so in order to obtain the guide function, it is necessary to
It is necessary to install the guide devices in opposite directions on the left and right sides of the floating vehicle by providing strips or the like.

この発明は、かかる問題点の解決策として提案された吸
引式磁気浮上案内装置である。
The present invention is an attraction type magnetic levitation guide device proposed as a solution to such problems.

〔問題点を解決するための手段〕[Means for solving problems]

この発明の装置は、少なくともギャップセンサのフィー
ドバック信号で浮上及び案内制御を行う装置において、
第1図に示すように、両端の脚部11aが被吸引部とな
る断面H形のレール11を採用し、その上下に、吸引力
を発生する磁極面12b、13bがレール側に突出し、
かつ鉄芯に巻いたコイル12a、13aが互いに直列又
は並列結線されて電流流れ方向の切換え可能な電源に接
続された浮上用電磁石12.13を上記レールと空隙を
介して対向配置し、また、各電磁石12.13はレール
11の一側部において継鉄14により機械的及び磁気的
に結合し、さらに、継鉄14の中央部には案内用電磁石
の構成コイル15を独立して巻回し、なおかつ、レール
脚部11aの間隔Wと電磁石12の磁極面間間隔W1と
、電磁石13の磁極面間間隔W2とを異なる値に設定し
たことに特徴づけられる。
The device of the present invention is a device that performs levitation and guidance control using at least a feedback signal from a gap sensor.
As shown in FIG. 1, a rail 11 with an H-shaped cross section is adopted in which the leg portions 11a at both ends are the attracted parts, and above and below the rail 11, magnetic pole surfaces 12b and 13b that generate an attractive force protrude toward the rail side.
In addition, levitation electromagnets 12 and 13, in which coils 12a and 13a wound around an iron core are connected in series or parallel to each other and connected to a power source capable of switching the direction of current flow, are arranged opposite to the rail with a gap in between, and Each electromagnet 12, 13 is mechanically and magnetically coupled by a yoke 14 on one side of the rail 11, and furthermore, a coil 15 constituting a guiding electromagnet is independently wound around the center of the yoke 14. Furthermore, it is characterized in that the distance W between the rail leg portions 11a, the distance W1 between the magnetic pole surfaces of the electromagnet 12, and the distance W2 between the magnetic pole surfaces of the electromagnet 13 are set to different values.

なお、ギャップセンサ、制御回路、増幅器は、浮上系、
案内系とも第3図と変わりがないので、同一符号を付し
て説明を省略する。
In addition, the gap sensor, control circuit, and amplifier are levitation system,
Since the guide system is also the same as that in FIG. 3, the same reference numerals are given and the explanation will be omitted.

〔作用〕[Effect]

今、第1図のように、電磁石12.13がレール11に
対して横ずれしていない状態、即ち、電磁石12.13
の中心がレール中心軸C上にある状態下では、永久磁石
6を含めたそれ等の磁石が、磁束Q9、Qtで示される
向きに励磁されているが、このときにはコイル15には
電通しないので、継鉄14は励磁されていない。
Now, as shown in FIG. 1, the electromagnet 12.13 is not shifted laterally with respect to the rail 11.
When the center of is on the rail central axis C, the magnets including the permanent magnet 6 are excited in the directions shown by the magnetic fluxes Q9 and Qt, but at this time the coil 15 is not energized. , the yoke 14 is not energized.

この場合、永久磁石6によるギャップG+、G+’中の
磁場をB1コイル12aを励磁することによって同一ギ
ャップ中に新しく発生する磁場をbI。
In this case, by exciting the B1 coil 12a, the magnetic field in the gaps G+, G+' caused by the permanent magnets 6 is converted into a new magnetic field generated in the same gap by bI.

コイル13aを励磁することによるギャップG2゜02
′中の磁場をbfとすると、レール11と電磁石12.
13との間に働く吸引力Fは、下の式4式% ここで、(11式の簡単化のために、lb+1=lbz
lであるとすると、 F (X: B ” ±2 B b 、  −・−・−
+21従って、浮上系においては、コイル12a、13
aに印加する電流の大きさと極性(方向)とをコントロ
ールすることにより上向きの力のみならず、下向きの力
も発生させることができる。このため、上向きの浮上刃
しか発生できず、下向きの力は重力に牽頁る従来の制御
方式に比べて制御の安定領域が広がり、制御応答性も向
上する。
Gap G2゜02 by exciting coil 13a
If the magnetic field in ' is bf, then the rail 11 and the electromagnet 12.
The suction force F acting between the
l, then F (X: B ” ±2 B b , −・−・−
+21 Therefore, in the levitation system, the coils 12a, 13
By controlling the magnitude and polarity (direction) of the current applied to a, it is possible to generate not only an upward force but also a downward force. For this reason, compared to the conventional control method in which only upward floating blades can be generated and downward force is counteracted by gravity, the stable control range is expanded and control responsiveness is improved.

次に、第2図に基いて、案内制御の原理を説明する。こ
の図は、電磁石がレール11に対して左に横ずれした状
態を示している。この横ずれは、ギヤツブセンサ8によ
って検出され、ここからのフィードバック信号が制御回
路S、増幅回路10を経由することにより案内用電磁石
のコイル15に電流が流れ、それによって励磁された継
鉄14に第2図に示す向きの磁束Q、が発生する。そし
てこの磁束Q3が既に存在する磁束Q+、Qzに対し加
算又は減算される結果、ギャップ01G8′の磁場は強
くなり、G+’、Gtの磁場は逆に弱くなる。
Next, the principle of guidance control will be explained based on FIG. This figure shows a state in which the electromagnet is shifted to the left with respect to the rail 11. This lateral shift is detected by the gear sensor 8, and the feedback signal from there passes through the control circuit S and the amplifier circuit 10, causing current to flow through the coil 15 of the guide electromagnet, which causes the excited yoke 14 to pass through the second yoke 14. A magnetic flux Q is generated in the direction shown in the figure. As a result of this magnetic flux Q3 being added to or subtracted from the already existing magnetic fluxes Q+ and Qz, the magnetic field of the gap 01G8' becomes stronger, and the magnetic fields of G+' and Gt become weaker.

ここで、この発明によれば、レール脚部11aの間隔W
と電磁石12の磁極面間間隔W、と電磁石13の磁極面
間間隔Wtとが異なっているので、各ギャップ磁場には
、浮上刃のほかに電磁石を横ずれさせようとする力も働
く。この力は、電磁石とレールが正常な第1図の関係に
ある場合、相反する向きとなっているギャップG+、G
t部の力とG+’ 、Gt’部の力が互いに打ち消し合
って完全に相殺されてしまうが、先に述べたように、双
方の磁場に差が生じれば、打ち勝った側の力が横ずれさ
せようとする力の方向を決定する。第2図の場合、ギャ
ップG+ 、GZ ’中の磁場による力が横ずれを是正
する方向に働き、そのために、レール11と電磁石の相
対的位置間係は第1図の状態に戻る。
Here, according to the present invention, the interval W between the rail legs 11a
Since the spacing W between the magnetic pole surfaces of the electromagnet 12 and the spacing Wt between the magnetic pole surfaces of the electromagnet 13 are different from each other, each gap magnetic field also acts on a force that causes the electromagnet to shift laterally in addition to the levitation blade. When the electromagnet and rail are in the normal relationship shown in Figure 1, this force is generated by the gaps G+ and G, which are in opposite directions.
The force on the t part and the forces on the G+' and Gt' parts cancel each other out and cancel each other out completely, but as mentioned earlier, if there is a difference in the magnetic fields on both sides, the force on the side that overcomes will cause a lateral shift. Determine the direction of the force you want to apply. In the case of FIG. 2, the force due to the magnetic fields in the gaps G+ and GZ' acts in a direction to correct the lateral shift, so that the relative positional relationship between the rail 11 and the electromagnet returns to the state shown in FIG.

電磁石が右にずれた場合にも、コイル15を03の磁束
が第2図と逆の向きになるように励磁方向をコントロー
ルすることにより、上と全く同じ原理に基いて、横ずれ
が是正される。
Even if the electromagnet shifts to the right, the lateral shift can be corrected based on the exact same principle as above by controlling the excitation direction of coil 15 so that the magnetic flux of 03 is in the opposite direction to that shown in Figure 2. .

なお、添付図には、レールの側部間間隔と、電磁石の磁
極面間間隔がW、>W>Wtの関係をなすものを示した
が、W、>W>W、等のときにも同様の作用が生まれる
。また、永久磁石6は必要に応じて設けるが、これを省
略しても同様の制御が可能である。
The attached diagram shows a case where the distance between the sides of the rail and the distance between the magnetic pole faces of the electromagnet form a relationship of W, >W>Wt, but it also applies when W, >W>W, etc. A similar effect occurs. Further, although the permanent magnet 6 is provided as necessary, the same control is possible even if this is omitted.

〔効果〕〔effect〕

以上述べたように、この発明によれば、断面H形し−ル
の上下に、レールの一例部側で継鉄により機械的、磁気
的に結合した浮上用電磁石を対向配置し、かつ、継鉄に
は案内用のコイルを巻回し、さらに、レール両端の側部
間間隔と浮上用電磁石の磁極面間間隔とを異なる値に定
めたので、浮上系においては、上下両方向の力を発生さ
せることができ、制御領域が広がると共に応答性も高め
られる。
As described above, according to the present invention, levitation electromagnets which are mechanically and magnetically coupled by a yoke on an example part side of the rail are arranged oppositely above and below an H-shaped rail, and A guiding coil is wound around the iron, and the spacing between the sides of both ends of the rail and the spacing between the magnetic pole faces of the levitation electromagnet are set to different values, so the levitation system generates forces in both the up and down directions. This expands the control range and improves responsiveness.

また、案内系においては、継鉄に巻いたコイルへの印加
電流の向き、大きさをコントロールすることで、1つの
案内用電磁石により左右両方向の案内力を発生させるこ
とができ、制御系の簡素化、低コスト化を実現できる。
In addition, in the guide system, by controlling the direction and magnitude of the current applied to the coil wound around the yoke, a single guide electromagnet can generate guiding force in both left and right directions, simplifying the control system. can realize cost reduction.

このほか、下部の浮上用m1石の磁極面に永久磁石を取
付けたものは、浮上刃の少なくとも一部を永久磁石の吸
引力に依存することが可能であるので、消費電力が少な
くて済むと云った効果が得られる。
In addition, if a permanent magnet is attached to the magnetic pole surface of the lower levitation m1 stone, at least a part of the levitation blade can rely on the attraction force of the permanent magnet, so power consumption can be reduced. The effect mentioned above can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この発明の装置の基本構造を示す線図、第2
図は、その案内力発生の原理図、第3図は従来の浮上案
内装置を示す線図である。 3・・・・・・浮上用ギャップセンサ、4・・・・・・
浮上用制御回路、5・・・・・・電力増幅器、6・・・
・・・永久磁石、8・・・・・・案内用ギャップセンサ
、S・・・・・・案内用?tJf in回路、10・・
・・・・電力増幅器、11・・・・・・レール、lla
・・・・・・脚部、12.13・・・・・・浮上用電磁
石、12a、13a・・・・・・コイル、12b、13
b・・・・・・磁極面、14・・・・・・継鉄、15・
・・・・・案内用電磁石のコイル。 特許出願人 住友電気工業株式会社 同 代理人  鎌   1)  文   二第10 第2図 第3図 手続補正書は式) %式% 2、発明の名称 吸引式磁気浮上案内装置 3、補正をする者 事件との関係 特許出願人 住所    大阪市東区北浜5丁目15番地氏名(名称
1  (213)住友電気工業株式会社5゜ 昭和     年     月     日  (発送
日)別紙の通り 禎  正  の  内  容 (1)明細書筒3頁2行目の「一定に保つ。」を「1に
又はある範囲を逸脱しない値に保つ。」1正します。 (2)同書筒8頁4行目、第9頁10行目の各「磁極面
」をそれぞれ「磁路中」に補正します。 (3)同書筒6頁2行目の「bl」を「±b1」に訂正
します。 (4) 添付図面の第1図を別紙の通り補正します(符
号11aの加入)。
Fig. 1 is a diagram showing the basic structure of the device of this invention, Fig. 2 is a diagram showing the basic structure of the device of the present invention;
The figure is a diagram showing the principle of generating the guiding force, and FIG. 3 is a diagram showing a conventional floating guide device. 3... Gap sensor for levitation, 4...
Levitation control circuit, 5... Power amplifier, 6...
...Permanent magnet, 8...Gap sensor for guidance, S...For guidance? tJf in circuit, 10...
...Power amplifier, 11...Rail, lla
... Legs, 12.13 ... Levitation electromagnets, 12a, 13a ... Coils, 12b, 13
b...Magnetic pole surface, 14...Yoke, 15.
...The coil of the guiding electromagnet. Patent Applicant Sumitomo Electric Industries Co., Ltd. Agent Kama 1) Letter 2 10 Figure 2 Figure 3 Procedural Amendment Form) % Formula % 2. Name of the invention Attraction type magnetic levitation guide device 3. Person making the amendment Relationship to the incident Patent applicant address 5-15 Kitahama, Higashi-ku, Osaka Name (Name 1 (213) Sumitomo Electric Industries, Ltd. 5゜Showa Date Month/Date (shipment date) As shown in the attached sheet) Contents (1) Details Correct "Keep constant" in line 2 of page 3 of the book cylinder to "keep it at 1 or a value that does not deviate from a certain range" by 1. (2) Line 4 of page 8 of book cylinder, line 10 of page 9. Correct each "magnetic pole surface" of the eye to "in the magnetic path". (3) Correct "bl" in the second line of page 6 of the book cylinder to "±b1". (4) Correct the number in the attached drawing. Figure 1 will be corrected as shown in the attached sheet (addition of code 11a).

Claims (2)

【特許請求の範囲】[Claims] (1)浮上系及び案内系の双方において、強磁性体のレ
ールと電磁石との間の距離をギャップセンサで検出し、
そのフィードバック信号により浮上及び案内制御を行う
吸引式磁気浮上案内装置において、上記レールに両端の
脚部が被吸引部となる断面H形のレールを採用し、その
上下に、吸引力を発生する磁極面がレール側に突出し、
かつ鉄芯に巻いたコイルが互いに直列又は並列結線され
て電流流れ方向の切換え可能な電源に接続された浮上用
電磁石を空隙を介して対向配置し、この上下の浮上用電
磁石はレールの一側部において継鉄により機械的及び磁
気的に結合し、さらに、継鉄には案内用電磁石のコイル
を独立して巻回し、かつ、上記レールの脚部間間隔と上
下の浮上用電磁石の磁極面間間隔の各々を異なる値に設
定したことを特徴とする吸引式磁気浮上案内装置。
(1) In both the levitation system and the guide system, the distance between the ferromagnetic rail and the electromagnet is detected by a gap sensor,
In an attraction-type magnetic levitation guide device that performs levitation and guidance control based on the feedback signal, the rail has an H-shaped cross section with legs at both ends serving as attracted parts, and magnetic poles are placed above and below the rail to generate an attraction force. The surface protrudes toward the rail,
In addition, levitation electromagnets, in which coils wound around an iron core are connected in series or parallel to each other and connected to a power source that can switch the direction of current flow, are arranged facing each other with an air gap between them, and the upper and lower levitation electromagnets are connected to one side of the rail. The yoke is mechanically and magnetically coupled by a yoke, and the coil of the guide electromagnet is independently wound around the yoke, and the spacing between the legs of the rail and the magnetic pole surfaces of the upper and lower levitation electromagnets are A suction type magnetic levitation guide device characterized in that each interval is set to a different value.
(2)上記レールと、このレールの下方に位置した上記
浮上用電磁石と、上記空隙とで形成される磁路中に存在
するように、永久磁石を上記下方電磁石に取り付けたこ
とを特徴とする特許請求の範囲第(1)項記載の吸引式
磁気浮上案内装置。
(2) A permanent magnet is attached to the lower electromagnet so as to exist in a magnetic path formed by the rail, the levitation electromagnet located below the rail, and the air gap. An attraction type magnetic levitation guide device according to claim (1).
JP29515986A 1986-12-10 1986-12-10 Suction type magnetic levitation guide device Expired - Lifetime JPH07123321B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29515986A JPH07123321B2 (en) 1986-12-10 1986-12-10 Suction type magnetic levitation guide device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29515986A JPH07123321B2 (en) 1986-12-10 1986-12-10 Suction type magnetic levitation guide device

Publications (2)

Publication Number Publication Date
JPS63148804A true JPS63148804A (en) 1988-06-21
JPH07123321B2 JPH07123321B2 (en) 1995-12-25

Family

ID=17817015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29515986A Expired - Lifetime JPH07123321B2 (en) 1986-12-10 1986-12-10 Suction type magnetic levitation guide device

Country Status (1)

Country Link
JP (1) JPH07123321B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272120A (en) * 1988-12-19 1993-12-21 Mitutoyo Corporation Block guage and method of marking ceramic material
JP2012522484A (en) * 2009-03-26 2012-09-20 アルバート スチューダー,フィリップ Method and system for transport using a magnetic bearing structure
CN111293855A (en) * 2018-12-07 2020-06-16 佳能株式会社 Conveying device and article manufacturing method
CN114954540A (en) * 2022-04-22 2022-08-30 中车工业研究院有限公司 Repulsion type electromagnetic guide structure based on permanent magnet array suspension system and vehicle

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5272120A (en) * 1988-12-19 1993-12-21 Mitutoyo Corporation Block guage and method of marking ceramic material
JP2012522484A (en) * 2009-03-26 2012-09-20 アルバート スチューダー,フィリップ Method and system for transport using a magnetic bearing structure
CN111293855A (en) * 2018-12-07 2020-06-16 佳能株式会社 Conveying device and article manufacturing method
CN111293855B (en) * 2018-12-07 2023-09-01 佳能株式会社 Conveying device and article manufacturing method
CN114954540A (en) * 2022-04-22 2022-08-30 中车工业研究院有限公司 Repulsion type electromagnetic guide structure based on permanent magnet array suspension system and vehicle
CN114954540B (en) * 2022-04-22 2024-05-03 中车工业研究院有限公司 Repulsion type electromagnetic guiding structure based on permanent magnet array suspension system and vehicle

Also Published As

Publication number Publication date
JPH07123321B2 (en) 1995-12-25

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