JPS60198878A - Gas laser oscillator - Google Patents

Abstract

PURPOSE:To prevent it for laser medium gas to stagnate by a method wherein a sealed chamber including an internal space of a cylindrical part is provided and this sealed chamber is provided with an air blower, and at the same time, the sealed chamber is provided with an aperture consisting of a pipe-shaped duct. CONSTITUTION:A container 1 is provided with a sealing duct 25 and a sealed chamber has been formed of the container 1, the sealing duct 25, a bellows 21 and so forth, and at the same time, a cylindrical internal space part has been provided in this sealed chamber. A pipe-shaped duct 24 is provided in parallel with the axial direction of a laser beam 8 in the sealed chamber and an aperture consisting of the duct 24 has been provided. The duct 24 has been arranged in such a way that the laser beam 8 penetrates the interior of the duct 24. Furthermore, the duct 25 has been provided with an air blower 26, which is used for sending laser medium gas within the container 1 in the duct 24. The laser medium gas 27 sent in by this air blower 26 is sent in the gap part between the bellows 21 and the duct 24, furthermore passes through the gap part between a partially transmitting mirror 7 and the duct 24 and pushes out laser medium gas replete in the interior of the duct 24 in the direction of the electrode of this element.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to improving the laser oscillation characteristics of a gas laser oscillator.゛[Prior Art] This type of arrangement has conventionally been shown in Fig. 1.

As shown in the figure, when a laser medium gas (2) is sealed in a container (1) and a voltage is applied from a source (4) between electric wires (8A) and (8B), a discharge (5) is generated and the laser medium gas Gas (2
) is excited, and laser oscillation occurs between the total reflection mirror (6) and the partial transmission mirror (7), which are opposed to each other with this discharge (5) in between, and output a laser beam (8). In addition, the laser medium gas (2), which has become high temperature due to the discharge (5), is transferred to the heat exchanger (9).
), and is cooled again by blower a1.
[It is sent and circulated between (8A) and (BB). Invar (
2) is formed so that even if the container (1) bends, it will not be noticed. The optical substrate a is held by an inverter αa to keep the parallel state stable even if there is a temperature change. Further, micrometers aυ~ (19) are attached to the optical substrate α4α0, and the micrometers ~QI are in contact with the optical substrate Q1)@.

In addition, a total reflection mirror (6) or a partial transmission mirror (7) is attached to the optical board 04) θQ, and a micrometer αd-(1(
The angle can be adjusted by adjusting the optical substrate α4αO according to the displayed value of e. bellows B) (2η is the optical substrate (14Jαυ is freely
V-the medium gas (2
) and the atmosphere.

Conventional gas laser generators are constructed as described above, so when the laser oscillates, the bellows cqaυ is filled with the laser medium gas (5)-, and
Furthermore, absorption of laser light causes a rise in temperature, and as the temperature rises further, a phenomenon occurs in which the absorption rate increases, resulting in a decrease in laser oscillation efficiency.

To explain this in terms of the third factor, (4) is the V-za output with respect to the discharge force, which has the disadvantage that even if the discharge π force is increased, the laser output does not increase and the oscillation efficiency decreases. there were.

[Summary of the invention]

This invention was made in order to eliminate the drawbacks of the conventional methods described above, and it is possible to improve the 191 oscillation efficiency by creating a flow using a blower to prevent the laser medium gas inside the bellows from stagnation. The aim is to obtain a gas laser generator.

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be explained with reference to FIG.

In the figure, the same reference numerals as those in FIG.
It is sealed and enclosed, forming a closed room. A pipe-shaped duct (2) made of aluminum, resin, or the like is provided and opened in the optical axis direction of the laser beam in this sealed chamber. The pipe-shaped duct (I'241) is arranged in the same direction as the optical axis direction of the sealed chamber and so that the V-za light is stored therein, and one end is connected to a part near the partially transmitting mirror (7). @ld! li (8A) (extends to the vicinity of 8B> b7), further outside the duct (goods) V-the medium gas (
A blower (A) is attached to the seal duct (C), which has a structure to prevent 2) from leaking, to blow the laser medium gas (2) in the container (1) into the duct ■. . An air filter (2) is provided on the suction side of the blower (a), and this air filter (to) allows the container (
1) Adsorbs dust mixed in the mirror and prevents dust from adhering to the surface of the total reflection mirror (6) and the partial transmission mirror (7).

Prevents damage. The laser medium gas cleaned by this air filter is sent to the gap between the bellows QD and the duct (C), and then further filtered through the partially transmitting mirror (7).
) and the duct (goods) through the gap between the laser medium gas (2) filling the duct (c) * # (8A
) (8B).

In this way, as shown in the laser output (to) versus discharge power in Fig. 8, there is no effect of absorption of the laser medium gas (2), and the laser output increases linearly with respect to the discharge π power. 9 laser power with higher emissivity can be increased as well. In other words, the oscillation efficiency is improved. However, the absorption rate of the laser beam (8) by the laser medium gas (2) decreases, thereby preventing instability of the laser output.

Note that the length of the duct is accelerated when the laser medium gas (2) flows through the duct (2), so a certain length is required, and if it is extremely short, the force of the flow will be less effective. In the above embodiment, the duct was made of a pipe-shaped material made of aluminum, resin, etc.
Any material that is not affected by the laser medium gas (2) or heat may be used.

Also, the blower (by LO the medium gas (2) is 1/- the medium gas (2) is 1
However, since the laser medium gas (2) is further distributed in the duct (2) by the blower, these laser medium gases (2) interfere with each other and stagnate in the container (1). There's nothing left to do.

Furthermore, in the above embodiment, a duct (
Goods) and ventilation 11! When (e) is provided, it was explained in h.

A similar structure may be used for the total reflection mirror (6) fill.
Also on the partially transparent mirror (7) side! =- It may be provided on both sides of the total reflection mirror (6), and the same effect as in the above embodiment can be obtained.

Furthermore, in the above embodiment, the laser medium gas (
2) Although the case has been described in which the water is quickly introduced into the duct (c), it may also be discharged outside the duct (the same effect as in the above embodiment can be obtained).

〔Effect of the invention〕

As described above, according to the present invention, a closed chamber including the internal space of the 4th part of the cylinder is provided, and a back wind for pressurizing or discharging the laser medium gas is provided in this closed chamber, and a pipe is also provided. Since an opening from the shaped duct is provided in the sealed chamber, the laser medium gas does not stagnate and the laser output is stabilized. ! (b) It is possible to obtain a gas laser oscillator with high efficiency.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram showing a conventional gas laser oscillator. FIG. 2 is a partially enlarged sectional view of a gas laser oscillator according to an embodiment of the present invention. FIG. 8 is a characteristic diagram for explaining the operation. In the figures, the same reference numerals indicate the same or corresponding parts, (1
) is the container, (2) (to)) is the laser medium gas, (5
) is a discharge, (6) is a total reflection mirror, (7) is a partial transmission mirror, (
8) is a laser beam, (9) is a heat exchanger, (10@ is a headwind fan, (a) Qη is a bellows, (c) is a duct, and @ is an air filter. 1 electric power

Claims (4)

[Claims] (1) A container filled with a laser medium gas, electrodes arranged facing each other in this container, and electrodes connected to the container both on the optical axis of the laser beam excited and generated by the discharge between the heating electrodes. In a gas laser oscillator comprising a first cylindrical part having a total reflection mirror on an end face and a second cylindrical part having a partially transmitting mirror on an MA surface, a sealed chamber including an internal space of one of the cylindrical parts. The sealed chamber is provided with a blower for pressurizing or discharging the V-za medium gas, and an opening consisting of a pipe-shaped duct through which the laser beam passes in the optical axis direction of the laser beam. A gas laser oscillator, characterized in that the gas laser oscillator is provided on the side opposite to the R5 of the sealed chamber. (2) The gas laser oscillator according to claim 1, wherein the pipe-like duct is inserted up to the cylindrical portion. (3) The gas laser oscillator according to claim 1 and claim 2, wherein the pipe-shaped duct is made of aluminum. (4) The gas laser oscillator according to claim 1, 2, or 8, wherein the blower has a filter for the laser medium gas.