JPS6310917B2 - - Google Patents
Info
- Publication number
- JPS6310917B2 JPS6310917B2 JP55036155A JP3615580A JPS6310917B2 JP S6310917 B2 JPS6310917 B2 JP S6310917B2 JP 55036155 A JP55036155 A JP 55036155A JP 3615580 A JP3615580 A JP 3615580A JP S6310917 B2 JPS6310917 B2 JP S6310917B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- solid
- output window
- laser beam
- envelope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 20
- 239000007787 solid Substances 0.000 claims description 16
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/0401—Arrangements for thermal management of optical elements being part of laser resonator, e.g. windows, mirrors, lenses
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Description
【発明の詳細な説明】
本発明はレーザ発生装置に係わり、特にレーザ
出力光が透過する固体出力窓の冷却手段に関す
る。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a laser generator, and more particularly to cooling means for a solid state output window through which laser output light passes.
一般にレーザ装置では、第１図に示すようにレ
ーザ媒質１たとえばCO2、N2、Heを封入した外
囲器２中に凹面反射鏡３と平面反射鏡４を対向さ
せてレーザ共振器を構成する。この平面反射鏡４
に一定の透過率を持たせることによつて、共振器
内を往復反射するレーザ光５の一部は、平面反射
鏡から成る固体出力窓４を透過して、レーザ光６
として外囲器２の外に取り出される。この場合、
固体出力窓４はレーザ共振器の構成要素であると
ともに、レーザ媒質の密閉手段および透過形固体
出力窓として機能している。 Generally, in a laser device, a laser resonator is constructed by arranging a concave reflecting mirror 3 and a flat reflecting mirror 4 to face each other in an envelope 2 in which a laser medium 1 such as CO 2 , N 2 , or He is sealed, as shown in FIG. do. This plane reflecting mirror 4
By giving a certain transmittance to the laser beam 5, a part of the laser beam 5 that is reflected back and forth within the resonator is transmitted through the solid output window 4 made of a flat reflecting mirror and becomes the laser beam 6.
It is taken out of the envelope 2 as a. in this case,
The solid-state output window 4 is a component of the laser resonator, and also functions as a sealing means for the laser medium and a transmission-type solid-state output window.
この固体出力窓４ではレーザ光６が通過する際
にその一部が吸収されるので、熱を発生するた
め、周辺冷却手段７が設けられている。すなわ
ち、矢印８および９のように冷却水１０を固体出
力窓４の周辺に循環させ、周辺部を一定温度T1
に保つている。レーザ光６のパワーが大になると
固体出力窓４の中央部の温度T2（T2＞T1）が上
昇し、同図に示すように固体出力窓４は凸状の熱
変形１１をきたすようになる。この結果、固体出
力窓４は最早平面反射鏡として機能せず。レーザ
発振は停止する。或いは、さらにレーザ光６のパ
ワーが大きい場合は、熱破損を生じることがあ
る。上述のように透過形の固体出力窓によれば取
り出すレーザ出力に上限があり、従来ではこの上
限値は数kW以下であつた。 This solid state output window 4 absorbs a portion of the laser beam 6 when it passes through, and therefore generates heat, so peripheral cooling means 7 is provided. That is, the cooling water 10 is circulated around the solid output window 4 as shown by arrows 8 and 9, and the surrounding area is kept at a constant temperature T 1
I'm keeping it. As the power of the laser beam 6 increases, the temperature T 2 (T 2 >T 1 ) at the center of the solid-state output window 4 increases, and the solid-state output window 4 undergoes a convex thermal deformation 11 as shown in the figure. It becomes like this. As a result, the solid output window 4 no longer functions as a flat reflector. Laser oscillation stops. Alternatively, if the power of the laser beam 6 is even higher, thermal damage may occur. As mentioned above, there is an upper limit to the laser output that can be extracted by the transmission-type solid-state output window, and in the past, this upper limit was several kilowatts or less.
従つて10kW以上のレーザ出力を発生するガス
レーザ装置では、透過形固体出力窓に依らず、第
２図に示すような空気力学窓によつて高出力レー
ザ光を取り出している。ガス供給装置１２から供
給されるガス状レーザ媒質１を充たした外囲器２
には、凹面反射鏡３とリング状平面出力鏡１３で
レーザ共振器が構成される。出力鏡１３からのレ
ーザ光６は、凹面反射鏡１４および空気力学窓１
５を介して、外部に取り出される。この窓１５は
微小径ビームが通過する小孔１５ａ，１５ｂと空
隙部１５ｃからなり、空隙部１５ｃには排気装置
１６が接続される。 Therefore, in a gas laser device that generates a laser output of 10 kW or more, high-power laser light is extracted using an aerodynamic window as shown in FIG. 2, rather than relying on a transmission-type solid-state output window. An envelope 2 filled with a gaseous laser medium 1 supplied from a gas supply device 12
A laser resonator is constituted by a concave reflecting mirror 3 and a ring-shaped plane output mirror 13. The laser beam 6 from the output mirror 13 passes through the concave reflector 14 and the aerodynamic window 1.
5 to the outside. This window 15 consists of small holes 15a and 15b through which the small diameter beam passes and a cavity 15c, and an exhaust device 16 is connected to the cavity 15c.
共振器内を往復反射するレーザ光５の一部は、
リング状平面反射鏡１３の中央穴１３ａを通過
し、凹面反射鏡１４によつて微小径ビームに絞ら
れた後、空気力学窓１５、すなわち小孔１５ａ、
空隙部１５ｃ、および小孔１５ｂを通過し、レー
ザ光６として外囲器２外に取り出される。ここ
で、排気装置１６によつて空隙部１５ｃ内を吸引
すると、外囲器２内のガス１は小孔１５ａを介し
て（矢印１７）、外囲器２外の大気１８は穴１５
ｂを介して（矢印１９）、それぞれ排気装置１６
側に吸引される。このようにして外囲器２内外の
ガス１と大気１８の隔離が行われる。 A part of the laser beam 5 reflected back and forth within the resonator is
After passing through the center hole 13a of the ring-shaped plane reflector 13 and narrowed down to a minute diameter beam by the concave reflector 14, the aerodynamic window 15, that is, the small hole 15a,
It passes through the cavity 15c and the small hole 15b, and is taken out of the envelope 2 as a laser beam 6. Here, when the inside of the cavity 15c is sucked by the exhaust device 16, the gas 1 inside the envelope 2 passes through the small hole 15a (arrow 17), and the atmosphere 18 outside the envelope 2 passes through the hole 15.
b (arrow 19), respectively exhaust device 16
is attracted to the side. In this way, the gas 1 inside and outside the envelope 2 and the atmosphere 18 are isolated.
しかし、上述のように高出力レーザ光を取り出
すために空気力学窓１５を用いると、排気装置１
６によつてガス１を常時吸引、排出するために、
ガス１の消費量が多くなり、レーザ装置が大形化
するという欠点がある。また、ガス１の圧力が数
10Torrと大気１８の圧力760Torrに比べて十分
低い場合は、大気１８がレーザ媒質１に混入し易
くなるという致命的な欠点を生ずる。 However, if the aerodynamic window 15 is used to extract high-power laser light as described above, the exhaust system 1
In order to constantly suck and discharge gas 1 by 6,
This has the disadvantage that the amount of gas 1 consumed increases and the size of the laser device increases. Also, the pressure of gas 1 is several
If the pressure of 10 Torr is sufficiently lower than the pressure of the atmosphere 18 of 760 Torr, a fatal drawback will occur in that the atmosphere 18 will easily mix into the laser medium 1.
本発明の目的は、固体出力窓を用いて高出力の
レーザ光を取り出すことができるレーザ発生装置
を提供することにある。 An object of the present invention is to provide a laser generator that can extract high-power laser light using a solid-state output window.
本発明の固体出力窓は、一部にレーザ光の照射
しない部分たとえば中央部に冷却手段を設けて、
固体出力窓を中心部と外周部に設けた冷却手段で
冷却する。従つて、固体出力窓は熱変形を生じに
くく、高出力のレーザ光を通過させることができ
る。 The solid state output window of the present invention is provided with a cooling means in a part of the part that is not irradiated with laser light, for example, in the center part,
The solid output window is cooled by cooling means provided at the center and outer periphery. Therefore, the solid output window is less likely to undergo thermal deformation and can pass high-power laser light.
以下、本発明の実施例を第３図に示すレーザ発
生電圧により説明する。 Hereinafter, embodiments of the present invention will be explained using the laser generated voltage shown in FIG.
内部にレーザ媒質１を充填した外囲器２は、細
長い円筒状の本体部分２Ａと、本体部の一方面よ
り一方側に突出する突出部２Ｂとから構成されて
いる。本体内の両端には、凹面状の反射鏡３と凸
面状の反射鏡２０とを対応配置している。両反射
鏡間の本体内には、中間反射鏡２１を傾斜状に配
設している。中間反射鏡２１は、中央部にレーザ
光５を通過させる中空状の貫通穴２２を、貫通穴
の外周には反射部２３を、それぞれ形成する。反
射部２３はレーザ光５の一部を突出部２Ｂ内に取
付けられた固体出力窓２４を照射する。 The envelope 2, which is filled with the laser medium 1, is composed of an elongated cylindrical body portion 2A and a protruding portion 2B that protrudes from one side of the body portion to one side. A concave reflecting mirror 3 and a convex reflecting mirror 20 are arranged correspondingly at both ends of the main body. An intermediate reflecting mirror 21 is arranged in an inclined manner within the main body between both reflecting mirrors. The intermediate reflecting mirror 21 has a hollow through hole 22 in the center thereof through which the laser beam 5 passes, and a reflecting portion 23 on the outer periphery of the through hole. The reflector 23 irradiates a portion of the laser beam 5 onto a solid output window 24 installed within the protrusion 2B.
固体出力窓２４は、貫通穴２２と対応する中央
部分に取付部２５をＯ−リング２６を介して挿嵌
する。取付部２５の外周部にはレーザ光５を透過
する透過部２７を形成し、透過部の周囲には矢印
方向に冷却水２８を流す冷却路１０を設ける。取
付部２５に設けられた冷却手段２９としては、熱
伝導性の良好なアルミニウム（Al）や銅（Cu）
から成る冷却フインを使用する。他の冷却手段と
しては、第５，６図に示す如くヒートパイプ３０
を設けてもよい。これらの冷却手段を使用すれ
ば、レーザ光に照射される心配がなく、冷却手段
が熱破損を生ずることがない。 The solid output window 24 has a mounting portion 25 inserted into a central portion corresponding to the through hole 22 via an O-ring 26 . A transmitting section 27 through which the laser beam 5 passes is formed on the outer periphery of the mounting section 25, and a cooling path 10 through which cooling water 28 flows in the direction of the arrow is provided around the transmitting section. The cooling means 29 provided in the mounting part 25 is made of aluminum (Al) or copper (Cu), which has good thermal conductivity.
Use cooling fins consisting of. As another cooling means, a heat pipe 30 as shown in FIGS. 5 and 6 is used.
may be provided. If these cooling means are used, there is no fear that the cooling means will be irradiated with laser light, and the cooling means will not be damaged by heat.
このように本発明では、貫通穴２２と対応する
レーザ光を照射しない固体出力窓２４の中央部に
冷却手段２９を設けることができる。この結果、
固体出力窓２４に設けた冷却手段２９がレーザ光
６により熱的に破損することなく、透過部２７を
冷却路１０と冷却手段２９とにより、冷却できる
ようになり、透過部２７での冷却がよくなり、透
過部２７に高出力のレーザ光を通過てせることが
できると共に、冷却手段２９を設けた分だけ、透
過部２７の面積を縮小でき、透過部２７での熱変
量を縮小できるので、更に高出力のレーザ光を通
過させることができる。したがつて、透過部２７
に高出力のレーザ光を通過させることができる。 As described above, in the present invention, the cooling means 29 can be provided at the center of the solid output window 24, which corresponds to the through hole 22 and is not irradiated with laser light. As a result,
The cooling means 29 provided in the solid state output window 24 is not thermally damaged by the laser beam 6, and the transmission section 27 can now be cooled by the cooling path 10 and the cooling means 29. In addition, the area of the transmitting section 27 can be reduced by the provision of the cooling means 29, and the thermal variation in the transmitting section 27 can be reduced. , it is also possible to pass high-output laser light. Therefore, the transparent part 27
can pass high-power laser light through.
次に、第７図に示す実施例は、中間反射鏡３１
を改良した場合である。中間反射鏡３１は、反射
鏡３にレーザ光５を共振させ、かつレーザ光の方
向を変える第１反射部３２と、第１反射部からの
レーザ光を透過部２７に照射する第２反射部３３
とから構成する。第１反射部３２と対応する取付
部２５には、上述と同様に冷却手段２９を取付け
る。レーザ光５は反射鏡３と第１反射部３２との
間で共振させ、かつ、レーザ光の方向を変えて第
２反射部３３を介して透過部２７を照射するよう
に、中間反射鏡を構成したので、固体出力窓２４
を第３図の如く突出部に設ける必要がない。従つ
て、レーザ発生装置をより小形化できる。 Next, in the embodiment shown in FIG.
This is the case when the . The intermediate reflecting mirror 31 includes a first reflecting section 32 that causes the reflecting mirror 3 to resonate the laser beam 5 and changes the direction of the laser beam, and a second reflecting section that irradiates the transmitting section 27 with the laser beam from the first reflecting section. 33
It consists of The cooling means 29 is attached to the attachment section 25 corresponding to the first reflection section 32 in the same manner as described above. The intermediate reflecting mirror is arranged so that the laser beam 5 resonates between the reflecting mirror 3 and the first reflecting section 32, and the direction of the laser beam is changed to irradiate the transmitting section 27 via the second reflecting section 33. As configured, the solid output window 24
There is no need to provide the protrusion as shown in FIG. Therefore, the laser generator can be made more compact.
以上のように本発明では、10kW以上の高出力
レーザ発生装置に透過形の固体出力窓を用いて、
レーザ光を取り出すことができるようになつた。 As described above, in the present invention, a transmission-type solid-state output window is used in a high-power laser generator of 10 kW or more,
It is now possible to extract laser light.
第１図ないし第２図は従来のレーザ発生装置を
示す側断面図、第３図は本発明の実施例として示
したレーザ発生装置の側断面図、第４図は第３図
のＡ−Ａ線断面図、第５図は本発明の他の実施例
として示した固体出力窓の断面図、第６図は第５
図のＡ−Ａ線断面図、第７図は本発明の他の実施
例として示したレーザ発生装置の側断面図であ
る。
１…レーザ媒質、２…外囲器、３，２０…反射
鏡、５，６…レーザ光、２１…中間反射鏡、２２
…貫通穴、２３…反射部、２４…固体出力窓、２
７…透過部、２９…冷却手段。
1 and 2 are side sectional views showing a conventional laser generating device, FIG. 3 is a side sectional view of a laser generating device shown as an embodiment of the present invention, and FIG. 4 is a line AA in FIG. 3. A line sectional view, FIG. 5 is a sectional view of a solid output window shown as another embodiment of the present invention, and FIG.
7 is a sectional view taken along the line A--A in the figure, and a side sectional view of a laser generator shown as another embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Laser medium, 2... Envelope, 3, 20... Reflecting mirror, 5, 6... Laser light, 21... Intermediate reflecting mirror, 22
...Through hole, 23...Reflector, 24...Solid output window, 2
7... Transmission section, 29... Cooling means.
Claims (1)
振させる少なくとも一対の反射鏡を取付け、両反
射鏡間の外囲器内に一方の反射鏡からのレーザ光
を反射する中間反射鏡を取付け、中間反射鏡から
のレーザ光を外部に照射する固体出力窓を外囲器
に取付け、固体出力窓の外囲側に冷却路を設けた
ものにおいて、上記中間反射鏡の中央部と外周と
にレーザ光を反射しない無反射部とレーザ光を反
射する反射部とを設け、上記無反射部と反射部と
に対応する固体出力窓に冷却手段とレーザ光を透
過する透過部とを設けることを特徴とするレーザ
発生装置。1 At least a pair of reflecting mirrors that resonate the laser beam are installed in an envelope having a laser medium, and an intermediate reflecting mirror that reflects the laser beam from one of the reflecting mirrors is installed in the envelope between both reflecting mirrors, A solid-state output window for irradiating the laser beam from the intermediate reflector to the outside is attached to the envelope, and a cooling path is provided on the outer side of the solid-state output window. A non-reflective part that does not reflect light and a reflective part that reflects laser light are provided, and a solid output window corresponding to the non-reflective part and the reflective part is provided with a cooling means and a transmitting part that transmits laser light. Laser generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3615580A JPS56133889A (en) | 1980-03-24 | 1980-03-24 | Laser generating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3615580A JPS56133889A (en) | 1980-03-24 | 1980-03-24 | Laser generating apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56133889A JPS56133889A (en) | 1981-10-20 |
| JPS6310917B2 true JPS6310917B2 (en) | 1988-03-10 |
Family
ID=12461879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3615580A Granted JPS56133889A (en) | 1980-03-24 | 1980-03-24 | Laser generating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56133889A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0789591B2 (en) * | 1984-06-26 | 1995-09-27 | 株式会社東芝 | Carbon dioxide laser device |
| US4719639B1 (en) * | 1987-01-08 | 1994-06-28 | Boreal Laser Inc | Carbon dioxide slab laser |
| KR100437800B1 (en) * | 2002-04-08 | 2004-06-30 | 엘지전자 주식회사 | Apparatus for cooling of solid state laser |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5061197A (en) * | 1973-09-24 | 1975-05-26 | ||
| JPS52156642A (en) * | 1976-06-21 | 1977-12-27 | Nec Corp | Laser mirror supporting device |
-
1980
- 1980-03-24 JP JP3615580A patent/JPS56133889A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5061197A (en) * | 1973-09-24 | 1975-05-26 | ||
| JPS52156642A (en) * | 1976-06-21 | 1977-12-27 | Nec Corp | Laser mirror supporting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56133889A (en) | 1981-10-20 |
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