JPS60197876A - 真空蒸着装置 - Google Patents

真空蒸着装置

Info

Publication number
JPS60197876A
JPS60197876A JP5114184A JP5114184A JPS60197876A JP S60197876 A JPS60197876 A JP S60197876A JP 5114184 A JP5114184 A JP 5114184A JP 5114184 A JP5114184 A JP 5114184A JP S60197876 A JPS60197876 A JP S60197876A
Authority
JP
Japan
Prior art keywords
zinc
vacuum
vapor
hoop
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5114184A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6353262B2 (enrdf_load_stackoverflow
Inventor
Heizaburo Furukawa
古川　平三郎
Kanji Wake
和気　完治
Yoshio Shimozato
下里　省夫
Kenichi Yanagi
謙一 柳
Mitsuo Kato
光雄 加藤
Tetsuyoshi Wada
哲義 和田
Norio Tsukiji
築地　憲夫
Takuya Aiko
愛甲　琢哉
Toshiharu Kikko
橘高　敏晴
Koji Nakanishi
康二 中西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Nippon Steel Nisshin Co Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Nisshin Steel Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd, Nisshin Steel Co Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP5114184A priority Critical patent/JPS60197876A/ja
Priority to DE8585102965T priority patent/DE3578437D1/de
Priority to DE198585102965T priority patent/DE155643T1/de
Priority to EP85102965A priority patent/EP0155643B1/en
Priority to AU40012/85A priority patent/AU553239B2/en
Priority to KR1019850001760A priority patent/KR890004043B1/ko
Priority to US06/713,743 priority patent/US4649860A/en
Priority to CA000476897A priority patent/CA1233016A/en
Publication of JPS60197876A publication Critical patent/JPS60197876A/ja
Priority to CN198585107585A priority patent/CN85107585A/zh
Publication of JPS6353262B2 publication Critical patent/JPS6353262B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating With Molten Metal (AREA)
JP5114184A 1984-03-19 1984-03-19 真空蒸着装置 Granted JPS60197876A (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP5114184A JPS60197876A (ja) 1984-03-19 1984-03-19 真空蒸着装置
DE8585102965T DE3578437D1 (de) 1984-03-19 1985-03-14 Vorrichtung zur bedampfung.
DE198585102965T DE155643T1 (de) 1984-03-19 1985-03-14 Vorrichtung zur bedampfung.
EP85102965A EP0155643B1 (en) 1984-03-19 1985-03-14 Vacuum evaporation equipment
AU40012/85A AU553239B2 (en) 1984-03-19 1985-03-15 Preventing reevaporation and sealing strip in continuous metal vacuum evaporation
KR1019850001760A KR890004043B1 (ko) 1984-03-19 1985-03-19 진공증착장치
US06/713,743 US4649860A (en) 1984-03-19 1985-03-19 Vacuum evaporation coating equipment
CA000476897A CA1233016A (en) 1984-03-19 1985-03-19 Vacuum evaporation equipment
CN198585107585A CN85107585A (zh) 1984-03-19 1985-10-14 用于真空沉积镀层的方法和装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5114184A JPS60197876A (ja) 1984-03-19 1984-03-19 真空蒸着装置

Publications (2)

Publication Number Publication Date
JPS60197876A true JPS60197876A (ja) 1985-10-07
JPS6353262B2 JPS6353262B2 (enrdf_load_stackoverflow) 1988-10-21

Family

ID=12878540

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5114184A Granted JPS60197876A (ja) 1984-03-19 1984-03-19 真空蒸着装置

Country Status (2)

Country Link
JP (1) JPS60197876A (enrdf_load_stackoverflow)
CN (1) CN85107585A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62290868A (ja) * 1986-06-11 1987-12-17 Sumitomo Heavy Ind Ltd 連続真空蒸着装置
JPH01184270A (ja) * 1988-01-18 1989-07-21 Mitsubishi Heavy Ind Ltd 真空蒸着装置
JP2023552071A (ja) * 2020-11-13 2023-12-14 ティッセンクルップ スチール ヨーロッパ アクチェンゲゼルシャフト 改善された亜鉛コーティングを有する平鋼製品

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111270209B (zh) * 2018-12-05 2023-12-12 东君新能源有限公司 一种蒸汽溅射装置及控制系统、控制方法
CN113755797A (zh) * 2020-06-02 2021-12-07 宝山钢铁股份有限公司 一种移动加热并在带钢表面涂覆Zn层的系统及方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938382A (ja) * 1982-08-26 1984-03-02 Mitsubishi Heavy Ind Ltd 真空蒸着装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5938382A (ja) * 1982-08-26 1984-03-02 Mitsubishi Heavy Ind Ltd 真空蒸着装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62290868A (ja) * 1986-06-11 1987-12-17 Sumitomo Heavy Ind Ltd 連続真空蒸着装置
JPH01184270A (ja) * 1988-01-18 1989-07-21 Mitsubishi Heavy Ind Ltd 真空蒸着装置
JP2023552071A (ja) * 2020-11-13 2023-12-14 ティッセンクルップ スチール ヨーロッパ アクチェンゲゼルシャフト 改善された亜鉛コーティングを有する平鋼製品

Also Published As

Publication number Publication date
CN85107585A (zh) 1987-05-06
JPS6353262B2 (enrdf_load_stackoverflow) 1988-10-21

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