JPS60195437A - 結晶の評価方法 - Google Patents
結晶の評価方法Info
- Publication number
- JPS60195437A JPS60195437A JP5085384A JP5085384A JPS60195437A JP S60195437 A JPS60195437 A JP S60195437A JP 5085384 A JP5085384 A JP 5085384A JP 5085384 A JP5085384 A JP 5085384A JP S60195437 A JPS60195437 A JP S60195437A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- light
- transmittance
- sample
- dislocation density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 61
- 238000011156 evaluation Methods 0.000 title description 4
- 238000009826 distribution Methods 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims description 31
- 238000002834 transmittance Methods 0.000 claims description 27
- 238000005259 measurement Methods 0.000 claims description 11
- 239000012535 impurity Substances 0.000 claims description 10
- 238000011896 sensitive detection Methods 0.000 claims description 2
- 239000011011 black crystal Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 abstract description 5
- 239000013307 optical fiber Substances 0.000 abstract description 4
- 230000007704 transition Effects 0.000 abstract 2
- 235000012431 wafers Nutrition 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 8
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 6
- 238000000149 argon plasma sintering Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 241000238557 Decapoda Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229940056932 lead sulfide Drugs 0.000 description 1
- 229910052981 lead sulfide Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 235000011118 potassium hydroxide Nutrition 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000003325 tomography Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N21/5907—Densitometers
- G01N21/5911—Densitometers of the scanning type
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5085384A JPS60195437A (ja) | 1984-03-19 | 1984-03-19 | 結晶の評価方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5085384A JPS60195437A (ja) | 1984-03-19 | 1984-03-19 | 結晶の評価方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60195437A true JPS60195437A (ja) | 1985-10-03 |
| JPH0410578B2 JPH0410578B2 (enrdf_load_stackoverflow) | 1992-02-25 |
Family
ID=12870276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5085384A Granted JPS60195437A (ja) | 1984-03-19 | 1984-03-19 | 結晶の評価方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60195437A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62102702U (enrdf_load_stackoverflow) * | 1985-12-19 | 1987-06-30 | ||
| WO2002009839A1 (de) * | 2000-07-28 | 2002-02-07 | Basf Aktiengesellschaft | Regelung einer waschkolonne in einem schmelzkristallisationsprozess |
-
1984
- 1984-03-19 JP JP5085384A patent/JPS60195437A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62102702U (enrdf_load_stackoverflow) * | 1985-12-19 | 1987-06-30 | ||
| WO2002009839A1 (de) * | 2000-07-28 | 2002-02-07 | Basf Aktiengesellschaft | Regelung einer waschkolonne in einem schmelzkristallisationsprozess |
| US7323016B2 (en) | 2000-07-28 | 2008-01-29 | Basf Aktiengesellschaft | Regulation of a wash column in a melt crystallization process |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0410578B2 (enrdf_load_stackoverflow) | 1992-02-25 |
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