JPS60191015A - モノシランの製造方法 - Google Patents

モノシランの製造方法

Info

Publication number
JPS60191015A
JPS60191015A JP4495584A JP4495584A JPS60191015A JP S60191015 A JPS60191015 A JP S60191015A JP 4495584 A JP4495584 A JP 4495584A JP 4495584 A JP4495584 A JP 4495584A JP S60191015 A JPS60191015 A JP S60191015A
Authority
JP
Japan
Prior art keywords
monosilane
mixture
catalyst
dbu
dichlorosilane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4495584A
Other languages
English (en)
Japanese (ja)
Other versions
JPS64325B2 (enrdf_load_stackoverflow
Inventor
Muneo Asami
浅見　宗男
Kazuo Tsunoda
角田　一雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JNC Corp
Original Assignee
Chisso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chisso Corp filed Critical Chisso Corp
Priority to JP4495584A priority Critical patent/JPS60191015A/ja
Publication of JPS60191015A publication Critical patent/JPS60191015A/ja
Publication of JPS64325B2 publication Critical patent/JPS64325B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Catalysts (AREA)
JP4495584A 1984-03-09 1984-03-09 モノシランの製造方法 Granted JPS60191015A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4495584A JPS60191015A (ja) 1984-03-09 1984-03-09 モノシランの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4495584A JPS60191015A (ja) 1984-03-09 1984-03-09 モノシランの製造方法

Publications (2)

Publication Number Publication Date
JPS60191015A true JPS60191015A (ja) 1985-09-28
JPS64325B2 JPS64325B2 (enrdf_load_stackoverflow) 1989-01-06

Family

ID=12705905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4495584A Granted JPS60191015A (ja) 1984-03-09 1984-03-09 モノシランの製造方法

Country Status (1)

Country Link
JP (1) JPS60191015A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006276194A (ja) * 2005-03-28 2006-10-12 Nikon Corp 顕微鏡用コンデンサ及び顕微鏡

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006276194A (ja) * 2005-03-28 2006-10-12 Nikon Corp 顕微鏡用コンデンサ及び顕微鏡

Also Published As

Publication number Publication date
JPS64325B2 (enrdf_load_stackoverflow) 1989-01-06

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