JPS60190803A - 位置検出方法 - Google Patents

位置検出方法

Info

Publication number
JPS60190803A
JPS60190803A JP59149452A JP14945284A JPS60190803A JP S60190803 A JPS60190803 A JP S60190803A JP 59149452 A JP59149452 A JP 59149452A JP 14945284 A JP14945284 A JP 14945284A JP S60190803 A JPS60190803 A JP S60190803A
Authority
JP
Japan
Prior art keywords
pattern
circuit
partial
patterns
dimensional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59149452A
Other languages
English (en)
Japanese (ja)
Other versions
JPS633244B2 (enrdf_load_stackoverflow
Inventor
Seiji Kashioka
誠治 柏岡
Masakazu Ejiri
江尻　正員
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59149452A priority Critical patent/JPS60190803A/ja
Publication of JPS60190803A publication Critical patent/JPS60190803A/ja
Publication of JPS633244B2 publication Critical patent/JPS633244B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Analysis (AREA)
JP59149452A 1984-07-20 1984-07-20 位置検出方法 Granted JPS60190803A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59149452A JPS60190803A (ja) 1984-07-20 1984-07-20 位置検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59149452A JPS60190803A (ja) 1984-07-20 1984-07-20 位置検出方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58005904A Division JPS6017152B2 (ja) 1983-01-19 1983-01-19 位置検出方法及びその装置

Publications (2)

Publication Number Publication Date
JPS60190803A true JPS60190803A (ja) 1985-09-28
JPS633244B2 JPS633244B2 (enrdf_load_stackoverflow) 1988-01-22

Family

ID=15475427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59149452A Granted JPS60190803A (ja) 1984-07-20 1984-07-20 位置検出方法

Country Status (1)

Country Link
JP (1) JPS60190803A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288908A (ja) * 1988-09-26 1990-03-29 Nec Corp 位置検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288908A (ja) * 1988-09-26 1990-03-29 Nec Corp 位置検出装置

Also Published As

Publication number Publication date
JPS633244B2 (enrdf_load_stackoverflow) 1988-01-22

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