JPS60190803A - Method and apparatus for detecting position - Google Patents

Abstract

PURPOSE:To detect the position of a desired object highly accurately at a high speed, by selecting a partial pattern, where a partial pattern of the object is cut out and agrees with a standard partial pattern that is stored in advance most closely with each other, and detecting the specified position of the object by using the position of the pattern. CONSTITUTION:Partial patterns are cut out of an image signal 4 from an image sensor 1 in parallel by a two-dimensional pattern cutting circuit 7 through a pre- processing circuit 5 and a temporary memory circuit 6. The degree of agreement of the cut pattern and a standard partial pattern, which is stored in a memory circuit 8, is detected by an agreement detecting circuit 9. Said degree of agreement is compared with the past degree of agreement in a memory circuit 12 by a comparing circuit 10. When the present degree of agreement is good, the content of the memory circuit 12 is updated. The output of the circuit 10 is sent to a coordinate memory circuit 14, and the past coordinate values are updated. The coordinate values are sent to an operating circuit 25 through a judging circuit 23 and a selecting circuit 24. The coordinates of the specified point of the object are obtained. Thus the coordinates of the position of the object are detected highly accurately at a high speed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a position detection method and apparatus for automatically detecting the position of a two-dimensional pattern in a two-dimensional plane without contact.

[Background of the invention]

Conventionally, in order to detect the two-dimensional position of an object without contact,
If the object is simple, such as a rectangle, the X direction, Y direction
There is a method of differentially extracting the output from photocathode such as solar cells arranged two in each direction, but there is a problem with accuracy. Also, this method is essentially a method called the zero position method, in which the object is brought to the center using a servo mechanism so that the differential output from the photocathode becomes O, and from the movement of the servo mechanism at that time, For example, it is necessary to detect the position by means of a code plate.

Therefore, the time required for detection is long, and since it is a zero-position method, even if a distant object enters the detector, the likely position can be detected in response to it. Resulting in. In other words, conventional methods do not have the ability to even recognize whether a target exists or not.

[Purpose of the invention]

The object of the present invention is, for example, a transistor, an IC.

The object of the present invention is to provide a method and device that can accurately and rapidly detect the position of objects with complex patterns in order to automate the assembly and detection processes of LSIs and the like.

[Summary of the invention]

In order to achieve the above object, in the position detection method of the present invention, a two-dimensional pattern having a rotation angle with respect to a specific part of the target is stored as a standard pattern, and this local pattern and a The method is characterized in that a partial pattern of a two-dimensional pattern of an object inputted by an imaging device is compared, and a specific position of the object is detected using the position of the most matching partial pattern.

[Embodiments of the invention]

Hereinafter, the present invention will be explained in detail with reference to Examples.

FIG. 1 is a diagram showing a transistor bellet, which is an example of an object to which the present invention is applied.

In the figure, the shaded area is the silicon oxide surface, and the non-shaded area is the electrode part formed by vapor deposition of aluminum.

When such transistors are supplied one after another to an assembly machine, the positions P1+P2 at which the gold wire of the electrode part should be crimped are automatically detected, and the coordinate values are given to the machine, and the gold wire is crimped using a servo mechanism. It is necessary to accurately position the crimping bonder.

In this transistor, a local pattern with no pattern is selected among the overall complex patterns. In this example, three local patterns surrounded by dotted lines can be selected.

The representative positions of these three local patterns may be, for example, their central positions, but for the sake of explanation here, positions mA, B, and C on the lower right side are assumed.

The coordinate relationship at this time is extracted and drawn in FIG.

If the transistor is provided precisely in the field of view of the detector such that there is only a deviation in the XY direction and no rotation (i.e., tilt) in the Once the coordinates X, .

However, in this case, there is no guarantee whether the detected coordinates XA, YA are really A, or not. may be more consistent.

In order to avoid this drawback, it is sufficient to detect the positions of two local patterns, for example A and B. If the coordinates of points A and B are correct, check whether the distance and direction between points A and B are within a certain range, and if so, the coordinates of points A and B are certainly For example, A and B are determined to be local patterns.

Based on the center coordinates of the line connecting B, ``!'' (This may average out the errors in the detection of A and 13 points.)
The coordinates of point PIyP2 can be found.

In this case, since the direction of the line of Δ and point B is known, some O! t, the coordinates of P1+P2 can be calculated as a corrected value, and more precise position detection becomes possible.

If either the distance or the angle between points A and B exceeds the predetermined range, A.

Either or both of B are erroneously detected and indicate the coordinates of a false point. In this case, detect the coordinate C of another local pattern and perform the test between A and 0. If the result is good, the coordinate of I) 1 + J + 2 will be detected; Then, it is sufficient to perform the -J2 test between 13 and 0.

In general, as the number of local patterns to be memorized increases, the number of combinations of verification increases, increasing the reliability. ~The angular position of the transistor pellet changes, and the coordinates of PI+P2 can be calculated as a value corrected for this supply error.

This verification may be performed sequentially, or may be performed simultaneously by providing arithmetic circuits in parallel for several possible combinations. Further, even if the transistor is supplied with a slight inclination in the XY plane, the position can be sufficiently detected based on the degree of coincidence with the standard pattern at the stored normal position. Of course, the degree of matching at that time will be somewhat worse, but since there is a larger difference than in other parts of the pattern, a normal position can be detected.

However, the slope of the transistor becomes larger,
For example, if the pattern is tilted by about 20 degrees, the standard pattern at the normal position will no longer match well, and other parts may become more similar. To do this, as shown in Figure 3, in addition to the local patterns a, b, and c at the normal position, a pattern d, which is tilted to the left by about 10 degrees, is required.
Prepare patterns gt h+ 1 tilted to the right as e and f,
In this example, 819 marks 7 (position F by the li pattern)
t can be detected. In this case, when testing between tilted patterns, for example (1, t:), another predetermined Set the range,
Check whether it is within this range.

Convert this tilted local pattern back to the standard pattern 7
(By equipping f8, 1-transistor Yang pick\±
It has been experimentally verified that the position can be detected sufficiently even with a supply angle error of about 20°. if,[·
If it is possible for the transistor to be upside down, then the upside down +7p f(, +! pattern is
Of course, by preparing 'ifi' you will be out of luck.

In the following description, the characteristics of detecting the coordinates of the final position 1)llP2 using one or more local patterns have been explained, and the calculation method thereof has been explained. For this calculation, if the position is detected as an analog signal or as a digital signal of several pins, then
It is extremely easy to build a dedicated arithmetic circuit that uses the signals manually.

At J. Sugachika, mini-computers have been used extensively in this type of one-herald transistor production process, and if used for this purpose, the above calculations can be performed at high speed with this general-purpose arithmetic unit without any difficulty.

In addition, although the above-mentioned distance and angle tests were described using strict formulas, if the supply angle error of 1 Heransister is as small as about ±20' or less, various approximate J1 formulas can be used, and root calculations, It goes without saying that the square J1 calculation and the arctangent calculation can be omitted, and various modifications can be made to the dj calculation method. Also, during the above test,
If the product fails during the silk fitting process before preparation, it is usually the case that there is no target, or even if there is, it is often a defective product that is extremely dirty. can.

FIG. 4 is an embodiment for realizing the position detection method described below, and is an overall block diagram showing the principle (111) of the present invention. 1 performs raster scanning A like a normal imaging device using the output from the synchronization signal generation circuit 2 for driving it.The position of the scanning beam at that time is always determined by the coordinate generation circuit 3. It is assumed that the X and Y coordinates are being changed every moment.

A video signal 4 from the imaging device 1 is inputted to a temporary storage circuit 6, which includes, for example, a shift 1 register, via a preprocessing circuit 5, such as a binarization circuit. This temporary storage circuit 6 is a so-called dynamic memory as will be described later, and is configured so that two-dimensional information is read out in parallel from this memory by the next two-dimensional pattern cutting circuit fl.

In addition to the video signal at the current scanning position of the imaging device 1, the two-dimensional pattern cutting circuit 7 also takes out information at positions scanned in the past, as if the field of view of the imaging device is Window frame white information is always obtained in parallel, as when a rectangular window frame of a certain size in both the vertical and horizontal directions is sequentially scanned. This window frame white information is updated one after another as the scanning progresses. A specific example of the circuit will be described later.

When local two-dimensional patterns within the field of view of the imaging device are input one after another to the two-dimensional pattern extraction circuit 7 as scanning progresses, this information is stored in the partial pattern storage circuit 8 in which standard partial patterns are stored in advance. , and the degree of coincidence between the two is detected by the coincidence detection circuit 9.

In an actual design example, when the vertical and horizontal fields of the imaging device are divided into 240 and 320 pixels, respectively, in a grid pattern, the size of the pattern cut out by the two-dimensional pattern cutting circuit 7 is:
It can be a square area of 12×12 pixels. In this case, the selection of this area does not necessarily have to be square, and it goes without saying that it can be arbitrarily designed depending on the purpose, such as Q x 1.4 or 8x7, for example.

Now, in the case of 12×12, it is convenient to increase the size of the partial pattern storage circuit 8 to 12×12 Ehiro. That is, here is 12X12=14
/1 piece of information is stored, and each piece of information corresponding to 1/14 pieces of information from the two-dimensional pattern cutting circuit is stored.
The degree of coincidence of the entire partial pattern is detected by the coincidence degree detection circuit as the sum of the degrees.

The output of this -j preparation detection circuit 9 is at the detection start stage,
That is, at the beginning of the frame, the comparison circuit 10 compares the matching degree information corresponding to a large degree of mismatch, which has been previously sent to the -comparison circuit 12.

If the current level is better than the content A stored in the coincidence degree storage circuit 12 in the past, the output of the comparison circuit 10 outputs a logically ON output, and the circuits 1 to 11 are opened. The current degree of coincidence is sent to the degree of coincidence memory circuit 12, and the contents of the degree of coincidence memory circuit 12 are updated. The output of this ratio 1 limb circuit 10 is further sent to circuits 1 to 13, and then
The output of the vote generation circuit 3, that is, the XY coordinate value corresponding to 4.11 in the digit 111 of the scanning beam is led to the coordinate storage circuit 14,
Update previously stored coordinate values.

In this way, at the end of the frame when scanning ends, the coordinate position
(2) It is memorized and retained together with the - level at that time.

In this way, for one standard partial pattern, 1
The coordinates of the maximum correlation position are rounded in one frame time.

Therefore, if the contents of the partial pattern storage circuit 8 are updated one after another for each frame, for example, the coordinates of point A in FIG. 1 in the first frame, the coordinates of point B in the second frame,
The coordinates of the 0 point can be determined in each frame, such as the coordinates of the 0 point in the third frame. To do this, the contents of the partial pattern storage circuits 26, 27, and 28 provided in advance in the load-on memory in the processing device 30 or in the main storage device may be sent to the partial pattern storage circuit 8 through the switching circuit 29 for each frame. . The timing signal at this time is as shown in FIG.

In other words, using the four rules of the image device (1), (7), the first frame (1), in which the array of transistors (1 to 1) receive the inserted signal (I3) and move independently of the inserted signal (I3), Signal C5, which is turned on in the second frame 11, signal d, which is turned on only in the third frame, signal 0, which is turned on only in the third frame, etc.
make. For example, to make the signal C < 5, use the signal b to trigger the flip-flop to 1, add its output a to the antgame 1, and use that output to trigger the other flip-flop to 1. , create a circuit to reset this flip-flop by ANDing its output and a.
It is a good idea to provide a control circuit that turns on at the falling edge of A, and is reset at the next a.

Furthermore, with respect to the synchronization signal a, a synchronization signal f whose phase is slightly delayed and a synchronization signal g whose phase is advanced are prepared, c, cl, c
The switching circuit 29 shown in Figure 4 can be opened and closed according to (i:F).In other words, 29 is made up of three gates 1-, and the switches 29, 29, and 29, which open and close gates 1- C+
Using d 1 e, it is also possible to use the AND output of f, c, d, and e as a transfer start signal.

On the other hand, this signal f is used to previously reset the contents of the coincidence degree storage circuit 12 of FIG. 4 to a value with a small negative degree. That is, each frame is first manually entered with large discrepancy information 2, and preparations are made to detect matching points in that frame. Furthermore, the signal g is AND gated with c, dle, etc. at the end of each frame, and then passed through the switching circuits 15 and 16 to the coincidence storage circuits 17 and 18.
, 19°, and the coordinate storage circuits 20, 2
It can be used as a J-input pulse to transfer information to any one of 1°22. The switching circuits 15, 1.6 can be controlled in the same manner as the switching circuit 29.

In this way, the most likely position for cutting into the three standard part patterns is detected by three frames, and the coordinate positions at that time are stored in the memory circuits (registers) 20, 21.2.
It is entering 2.

At this time, the memory circuits (registers) 17, 18, and 19 contain matching degree information for each partial pattern, and the results are compared by the determination circuit 23. This circuit is, for example, a detection circuit for the maximum value and the next largest value, and selects the two with the highest degree of coincidence, and opens and closes the selection circuit 24 according to the result.

Therefore, the output from the selection circuit 24 is 20°2], 22
2 of the coordinates, i.e. the 2 with the highest - degree
The coordinate values ll′〒 corresponding to the two partial patterns are output J
Sign. In the example of Figure 1, for example, the locus J of points A and B
, ::'i is output.

Therefore, in the arithmetic circuit 25, these two seats 4:'j
The coordinates of the final position P1+P2 are output by adding t to b, subtracting tγ, subtracting, and performing the division circuit S11. In this case, since the coordinates corresponding to the two partial patterns are found in the order of probability based on the -component, it is possible to save the process of performing the above-mentioned combinations of several patterns.

In the above explanation, the coordinate values of three partial patterns are determined from the video using three successive frames, and then the determination circuit 23, the selection circuit 24... I decided to find the coordinates using circuit 25.

However, for example, if we determine the coordinate position of pattern Δ in the first frame l\ and pattern B in the second frame, we will immediately judge by these two, and if the result does not pass the test, pattern A
The information about pattern C can be left behind and the information about pattern C can be taken in in the next frame, or the information about both patterns Δ and B can be discarded and a new pattern C,
Various modifications are possible, such as performing this on a new set called D. In this case, the determination circuit 23 based on the negative difference becomes unnecessary, and the control of information acquisition becomes only a little more complicated.

The processing in the processing circuit 30 described above can be extremely fast if it is configured with dedicated hardware, but even if it is replaced with a minicomputer, which is a general-purpose processing device, it will only last for a very short time at the end of a frame. That is, all of the above-mentioned determination processing can be performed during the retrace section of the imaging device.

Therefore, in any case, as information from a new frame is received, new combinations can be processed in real time, and the final coordinate position can be determined based on the calculation results when, for example, pattern 8 and pattern B are received. There are many cases where the object gets stuck, and in reality, unless the target is locally contaminated, the third frame and seventh frame
In the case of the agency, there is no need to perform position detection using new local patterns one after another, such as in one frame.

Furthermore, in the above description, an example in which only one matching degree detection circuit 9 is used has been described. In this case, in principle, the position of one partial pattern is detected in one frame 11. If the partial pattern is limited to the upper part of the field of view and the approximate search area is known, pattern A can be used when scanning the upper half of the screen, and pattern A when scanning the lower half of the screen. B, partial pattern description 1. α
It is also possible to switch the contents of the circuit 8.

Furthermore, the degree of coincidence detection circuit 9. Comparison circuit 10. Game 1-Circuit 11. Matching degree storage circuit 12. If three sets of gate circuits 13, $, and target memory circuits 14 are provided, it is natural that the three matching degree detection circuits 9 simultaneously determine the positions for three patterns A, B, and C in the same frame. be.

In this case, the three coincidence degree storage circuits 12 and the three coordinate memory circuits 4 correspond to the coincidence degree storage circuits 17, 18, 19, respectively.
．． and the coordinate storage circuit 20°21.22, so the switching circuits 15 and 1.6 are unnecessary.

6 to 8 are more specific examples of the main parts of the overall configuration of the present invention shown in FIG. 4.

FIG. 6 shows a specific example of the synchronization signal generation circuit 2 and the coordinate generation circuit 3 in FIG. When the value reaches a certain value, it resets itself and adds 1 to a counter 33 (also known as a Y counter). When the counter 33 reaches a certain value, it resets itself to 1 and resets itself to 1.
6”bsu”・tsuI-sun: Um 1-. ') l:, I
I”l will be formed.

When this is done, the output pulses of each counter become an X synchronization signal and a Y synchronization signal, respectively, and the voltage value is appropriately converted during the pulse using this A as a reference to drive an imaging device using a vidicon or the like. .

On the other hand, the contents of the X counter and Y counter themselves become information regarding the position of the beam, and provide coordinate values for scanning.

FIG. 7 shows a specific example of the video input system shown in FIG.

Video information 4 from the imaging device is input to a binarization circuit 35 via a differential amplifier 34.

In this case, a signal 3G that is turned on only when a certain screen part, for example, the center part, is being scanned is separately created, and only at that time, the video signal 4 is guided to the integrator through the circuit 1 to 37, and the signal is output at the end of the frame. is sampled and held by the holding circuit 39.

The output is input to the differential amplifier 34 via a suitable attenuator as required.

The function of this circuit is that it always displays the previous frame.
1, +1 The uniform brightness of the constant screen area is 1'.
This circuit and the binarization circuit 35 enable successful binarization at intermediate values between bright and dark. Including these, is it 1 for the preprocessing circuit 5 in FIG. 4? , :
It's happening.

The binarized video is transferred to shift registers 37-1 and 36-1, 36-2°..., 36 as scanning progresses.
-(n-1) shift registers 37-2, 37-3 .・
. . , 37-n. The shift 1-register 36 has a number of steps to pixel 1 corresponding to the number of picture elements in one horizontal scan, and the number n is n = for the 12×12 partial pattern described above.
It is 12. Therefore, there are 11 shift registers 36, 12 shift registers 1 to 37, and 12 shift registers 37.
One design example is that the number of bit stages is 12.

When doing this, from 36-1, the information from the previous raster, from 3G-2, the information from the two previous raster,
Therefore, the shift register 37 displays 12 pieces of information in the horizontal direction in the 12-tree raster, that is, J2×12 plane information, one after another as the scan progresses. . Therefore, this 12
It would be better if the content of picture element 1.2 could be guided to the matching degree detection circuit.

FIG. 8 shows a specific example of the detection part of the negative growth. Here, the planar partial pattern storage circuit 8 is a register 8-
1.8-2. It is displayed as multiple registers such as + 8 ri, and the shift I register 37 mentioned above is
-1 to 37-n and 4 sentences.

A logic circuit 38 which performs a negative exclusive OR for each corresponding pin 1 outputs a logical rr 1 r+small output only when the pins I~ do not match.

When these are added by an adder 39, the output is large when the patterns do not match, and is +1 deer, which is close to 1:li o when the patterns match.

Therefore, the coincidence degree storage circuit 12 digitally stores,
If the contents of the digitization circuit 42 are inputted to the differential amplifier 41 together with the contents converted into analog by the DA converter 40, the output of the binarization circuit 42 becomes 1 only when the -signal becomes good, and the output of the binarization circuit 42 becomes 1, which converts it into a pixel pulse. The sample bold circuit 45 holds the degree of coincidence through the gate 1-44 by the action of the synchronized timing pulse 43, and this is converted into digital data by the AD converter 46 and stored in the degree of coincidence storage circuit 12. degree is updated.

On the other hand, the outputs from games 1 to 44 and J open the gate circuit 13 as shown in FIG. 4, and the coordinate positions at that time are stored in the coordinate storage circuit 14.

In the example described below, the image value is binarized, but this is advantageous when applied to an object such as a transistor that has a comparatively bright and dark pattern. However, 2
It is not necessarily wood that is valued, but it is also possible to calculate it as multivalued information. In this case, the shift l-1 registers 36 and 37 in FIG. 7 need to be made into multi-value shift 1 registers with a certain depth, and the logic in FIG. The circuit 38 may be, for example, a subtracter circuit and an absolute value circuit in series, so that the difference between each pix of the pattern is added in an adder 39.

The adder may be constructed so that a current flows from a constant current source to a certain JIS resistor, and the current may be distributed without being controlled according to each difference.

In the above example, we have described the case where a local partial pattern is used as the standard from among the multiple patterns of the target itself.However, this is not necessarily the essence, and in some cases, a specific pattern may be used for detection. It can be placed in the tsuji elephant for the target.

No. 9 IA is an example of such a mark, in which a detection mark is placed on the surface of the transistor at the same position as the electrode by aluminum evaporation and photo-etching. Here, the hatched area is the silicon oxide part, and the unshaded area is the aluminum vapor deposited part. The dashed line frame at the ++-+ corner is drawn on the mark <f, to indicate the size of the local pattern to be memorized.

Since patterns A and B are made concentrically and solidly, 1
- It is advantageous because it is strong against inclination in the XY plane of the transistor, and there is no need to separately provide an inclined pattern as shown in FIG. In addition, in this example, patterns A and B are made to have the same size and opposite bright and dark parts, but in this way, the logic circuit and addition circuit in Fig. 8 can be made common, and the subsequent circuits can be used. , it is possible to provide two circuits, one for detecting the degree of coincidence based on the maximum value and the other for detecting the minimum value.

Therefore, in this case, the positions of A and 13 patterns can be placed in parallel in the same frame by simply forming two sets of circuits locally.

Pattern C in FIG. 9 is a more complex example.

The position of this shape can be detected only when a certain q, 〒 predetermined code pattern is entered.

In other words, this method can also be used to select varieties.

Further, pattern C is an example in which a part of the target original pattern and a part intentionally added are combined into one local pattern. In this way, various configurations are artificially possible for the local pattern, and the detection method of the present system can handle any of these configurations by simply storing the standard pattern.

One drawback of this method is that the video signal may be distorted when used in areas with severe ambient temperature fluctuations. In other words, even if the center of the optical system is initially adjusted to be the center of the screen, in an imaging device using a vidicon or the like, the center of the image and the optical center may be distorted due to drift of the center of the beam or fluctuations in the width of the beam. There is also a possibility that the image may shift or the enlargement ratio between the image and the subject may change. If the imaging device is a solid-state device such as a photoelectric triplet array, there will be only a temperature drift of 1 to 1 in the optical system, so this will not be a problem at all in normal use.

FIG. 10 shows a compensation method for such drifts 1 to 1 when a vidicon imaging device or the like is used.

For example, when the present invention is applied to an automatic transistor assembly machine, it is convenient to perform the drift 1 compensation approximately every hour. In this case, the processing device 30 closes the shutter 50 shown in FIG.
Open.

Usually, it is the opposite, and the imaging device 1 passes through an optical system 52 such as a lens, a half mirror 53, and a light source 54. Looking at an object 60 illuminated by lens 55. At the time of this calibration, the light from the light source 54 passes through the open shutter 51 and illuminates the reference plate 56 whose optical axis is carefully set, and the imaging device 1 looks at the reference plate 56 through the half mirror 53. configured. On this reference plate, a total of five different bright and dark binary patterns are drawn, for example, one in the center and one in each of the four corners. At this time, the video signal from the imaging device 1 is transmitted over several frames by the circuit described above, and the positions of these local patterns can be successively detected and reported to the processing device 30, for example, a minicomputer. The processing device 30 uses the fl'f information to determine, for example, the amount of deviation of the image from the center pattern, and from the average of the four corner patterns, determines, for example, the variation in the magnification of the image, and uses the calculation circuit 25 in FIG.
You can modify the parameters used in .

This enables automatic periodic calibration.

FIG. 11 is an overall configuration diagram when this apparatus method is applied to the production of transistors 1 to 1.

The parts other than the processing device 30 in FIG. 4 are shown as a single plotter as a detection device 61.

The detection device 61 includes a plurality of imaging devices 1-1.1-2.・
. . , L-rn are connected, for example, by an electronic switch 62. Each imaging device is equipped with m automatic machines 6
3-1.63-2. . . , 63-rrl and supplied to each machine are configured so as to be viewed from above.

If each machine is configured to generate a signal indicating that the target 1-transistor has been supplied, this signal becomes an interrupt signal to the processing device 30 via the bus line 64. This signal is detected by the interrupt factor detection circuit 65. After that, the detection device 61 detects the automatic machine 63-1.
The busy determination circuit 67 determines the contents of the status register 66 indicating which of the machines 63-m to 63-m is being serviced, and if the detection device 61 is servicing any machine, it issues a busy signal and interrupts the service. The command is returned to the busy factor detection circuit, and this process is repeated until the busy state is resolved. If it is not busy, the detection circuit 61 is available, and the next control signal generation circuit 68 outputs a control signal to the interrupted machine and switches the switch 62 and switch 69 to the corresponding machine. At the same time, the bit position corresponding to the interrupted machine in the status register 66 is turned on.

Indicates that the detection device 61 is busy, and masks subsequent interruptions. In this case, the interrupt factor detection circuit usually has a built-in register so that only the interrupt signal is held.

Next, the partial pattern storage circuit 70 (26.27 in FIG.
．． 28) is sent to the detection circuit 61 by the standard pattern sending circuit 71, thereby obtaining the standard partial pattern, F4::, (U
The data acquisition control circuit 72 takes in the signal and the coincidence degree signal, and thereafter uses this data to perform the calculations described above. Then, the final result is outputted by the determination circuit 73 and the knob target calculation circuit 74.

This #most coordinate position is selected by the switch 69.
According to the value, the corresponding XY servo machine 41'47G is driven based on the value.

This servo mechanism 76 is depicted as moving the object 60 in the figure, but in a transistor assembly machine, the object is stopped, the gold wire crimp bonder is positioned by this servo mechanism, and the rest is predetermined. It is preferable to perform a series of crimping steps by cam operation.

In the following explanation, the transistor has been explained. However, this is for explanation purposes only, and it goes without saying that any object may be used as long as it conforms to this method. When detecting the position of the palm or object, it is nearly impossible to memorize the entire pattern as a single pattern because of the large amount of information, and even if it could be memorized, the device would be extremely large.

The device of the present invention is characterized in that it detects a position by storing only a relatively small partial pattern, and can be effectively applied to a relatively small scale device.

In addition, in the following explanation, the partial pattern is described as a square or a rectangle.

However, for example, in a partial pattern consisting of 144 picture elements of 12×12 dimensions, the values near the four corners of this square area may be ignored and, for example, the logic circuit 38 in FIG. 8 may be omitted, or even if not omitted. The process of inhibiting output is the same as using a circular partial pattern.

Although errors occur due to the digitization of the plane in this way, it is possible to process it as a partial pattern of any shape.

〔Effect of the invention〕

As explained above, the present invention stores a tilted partial pattern as a mark r (+! pattern), so accurate pattern matching is possible even if it is aligned with a tilted partial pattern. Since this is limited to only partial patterns, the capacity of the device described in 1.α can be small.

However, if the present invention was applied, it would be nearly impossible to go back and forth! 1. It became possible to recognize the position of the J elephant using a visual device,
Moreover, since it can be realized economically, it has become easy to automate production machinery.

[Brief explanation of the drawing]

Fig. 1 is a diagram showing Belen 1~ of a 1-helangister, which is an example of the object to which the present invention is applied, Fig. 2 is a diagram showing the positional relationship of each point on J-S in Fig. 1, and Fig. 3 is a diagram showing the positional relationship of each point on J-S in Fig. Fig. 1 is a diagram showing a curved part pattern, Fig. 4 is a block diagram showing an embodiment of the position detection method of the present invention, and Fig. 5 is a diagram showing a timing signal for controlling the device shown in Fig. 4. 6 shows a specific example of the synchronization signal and coordinate signal generation circuit in the device shown in FIG. 4, while FIG. 7 shows a specific example of the input system circuit in the device shown in FIG. FIG. 8 shows I3. Figure 9 is an explanatory diagram of a partial pattern, Figure 10 is a configuration diagram of an accessory device of an imaging device used in the present invention, and Figure 11 is a diagram showing the case where the method of the present invention is applied to the production of transistors. It is an overall configuration diagram of system I~. ■... Imaging device, 2... Synchronization signal generation circuit, 3
... + pii mark generation circuit, 5 ... preprocessing circuit,
6... Temporary memory circuit, 7... Two-dimensional pattern cutting circuit, 8... Partial pattern memory circuit, 13...
・Ri-1・Circuit, I4... Coordinate memory circuit, 3o...
・・Processing circuit, 31 ・・Pixel panel generator, 32・
...X counter, 33...Y counter, 34...
... Differential amplifier, 35 ... Binarization circuit, 3G, 37
・Mountain shift 1~register, 38...-growth detection circuit,
39・Mountain adder circuit, 41...Differential amplifier, 42...
...Binarization circuit, 45...Sample hold circuit,
50.51...Shutter, 53...Half mirror 154...Light source, 56...Reference plate, 6o...
...Target, 66.69...Switching circuit,
63... automatic machine, 75... register, 76...
...Zerbo mechanism. FIG.

Claims (1)

[Claims] A two-dimensional pattern of one or more specific parts of an object having mutually different rotation angles in a one- and two-dimensional plane is stored in advance as a mark f (, Q pattern, Partial patterns are successively cut out from the two-dimensional pattern of the image including the above-mentioned counterimage, and the cut-out partial patterns are compared with a predetermined one of the above-mentioned standard patterns, and the fH that most closely matches the predetermined standard pattern is (Choose a pattern, calculate the position of that partial pattern in the input 2-dimensional pattern, and check that the positional relationship of the selected partial pattern with respect to the above specified 4 votes 7<!! pattern is within the specified range. A position detection method characterized by determining whether or not the image of the object is present, and determining the specific position of the object in the two-dimensional pattern inputted in - using the position of the partial pattern within a predetermined range. 2. Including the image of the object 2 an input means for inputting a dimensional pattern; a storage means for storing in advance two-dimensional patterns of a plurality of specific parts of an object having different rotation angle claws in a two-dimensional plane as four-vote quasi-patterns; A means for sequentially cutting out partial patterns having the same number of constituent points as the robot pattern for each mark 7 (roba pattern) stored in the storage means from the two-dimensional pattern obtained from the means; Compare the standard patterns with a predetermined one, select the 815-minute pattern that most closely matches the standard pattern from among the sequentially cut out partial patterns, and determine the position of the partial pattern in the input two-dimensional pattern. means for determining whether the positional relationship of the partial pattern set with respect to the standard pattern having any rotation angle is within a predetermined range, and the position of the partial pattern within the predetermined range. 1. A position detection device comprising means for placing a predetermined position of an object in a two-dimensional pattern inputted in J3.