JPS60189231A - ワイヤボンデイング装置 - Google Patents
ワイヤボンデイング装置Info
- Publication number
- JPS60189231A JPS60189231A JP59044303A JP4430384A JPS60189231A JP S60189231 A JPS60189231 A JP S60189231A JP 59044303 A JP59044303 A JP 59044303A JP 4430384 A JP4430384 A JP 4430384A JP S60189231 A JPS60189231 A JP S60189231A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- camera
- height
- bonding
- capillary
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 239000004065 semiconductor Substances 0.000 claims abstract description 10
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000008400 supply water Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/7825—Means for applying energy, e.g. heating means
- H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
- H01L2224/78301—Capillary
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
- H01L2224/786—Means for supplying the connector to be connected in the bonding apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/851—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59044303A JPS60189231A (ja) | 1984-03-08 | 1984-03-08 | ワイヤボンデイング装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59044303A JPS60189231A (ja) | 1984-03-08 | 1984-03-08 | ワイヤボンデイング装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60189231A true JPS60189231A (ja) | 1985-09-26 |
JPH0367338B2 JPH0367338B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-10-22 |
Family
ID=12687724
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59044303A Granted JPS60189231A (ja) | 1984-03-08 | 1984-03-08 | ワイヤボンデイング装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60189231A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998054545A3 (en) * | 1997-05-28 | 1999-03-04 | Scient Generics Ltd | Position transducer and method of manufacture |
US6304014B1 (en) | 1997-10-02 | 2001-10-16 | Synaptics (Uk) Limited | Motor control system |
US6489899B1 (en) | 1994-05-14 | 2002-12-03 | Synaptics (Uk) Limited | Position detector |
US6522128B1 (en) | 1997-10-15 | 2003-02-18 | Synaptics (Uk) Limited | Position sensor having compact arrangement of coils |
US6534970B1 (en) | 1998-05-22 | 2003-03-18 | Synaptics (Uk) Limited | Rotary position sensor and transducer for use therein |
US6888538B2 (en) | 1994-05-14 | 2005-05-03 | Synaptics (Uk) Limited | Position sensor |
US6980134B2 (en) | 1996-06-28 | 2005-12-27 | Synaptics (Uk) Limited | Signal processing apparatus and method |
US7019672B2 (en) | 1998-12-24 | 2006-03-28 | Synaptics (Uk) Limited | Position sensor |
US7030782B2 (en) | 1994-05-14 | 2006-04-18 | Synaptics (Uk) Limited | Position detector |
US7133793B2 (en) | 2003-07-24 | 2006-11-07 | Synaptics (Uk) Limited | Magnetic calibration array |
US7406393B2 (en) | 2002-03-05 | 2008-07-29 | Synaptics (Uk) Limited | Position sensor |
US7511705B2 (en) | 2001-05-21 | 2009-03-31 | Synaptics (Uk) Limited | Position sensor |
US7812268B2 (en) | 2003-08-26 | 2010-10-12 | Synaptics (Uk) Limited | Digitizer system |
US7907130B2 (en) | 2002-06-05 | 2011-03-15 | Synaptics (Uk) Limited | Signal transfer method and apparatus |
US9410791B2 (en) | 2010-12-24 | 2016-08-09 | Cambridge Integrated Circuits Limited | Position sensing transducer |
US9470505B2 (en) | 2012-06-13 | 2016-10-18 | Cambridge Integrated Circuits Limited | Position sensing transducer |
-
1984
- 1984-03-08 JP JP59044303A patent/JPS60189231A/ja active Granted
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7030782B2 (en) | 1994-05-14 | 2006-04-18 | Synaptics (Uk) Limited | Position detector |
US6489899B1 (en) | 1994-05-14 | 2002-12-03 | Synaptics (Uk) Limited | Position detector |
US6888538B2 (en) | 1994-05-14 | 2005-05-03 | Synaptics (Uk) Limited | Position sensor |
US6980134B2 (en) | 1996-06-28 | 2005-12-27 | Synaptics (Uk) Limited | Signal processing apparatus and method |
US6705511B1 (en) | 1997-05-28 | 2004-03-16 | Synaptics (Uk) Limited | Transducer and method of manufacture |
WO1998054545A3 (en) * | 1997-05-28 | 1999-03-04 | Scient Generics Ltd | Position transducer and method of manufacture |
US6304014B1 (en) | 1997-10-02 | 2001-10-16 | Synaptics (Uk) Limited | Motor control system |
US6522128B1 (en) | 1997-10-15 | 2003-02-18 | Synaptics (Uk) Limited | Position sensor having compact arrangement of coils |
US6534970B1 (en) | 1998-05-22 | 2003-03-18 | Synaptics (Uk) Limited | Rotary position sensor and transducer for use therein |
US7019672B2 (en) | 1998-12-24 | 2006-03-28 | Synaptics (Uk) Limited | Position sensor |
US7511705B2 (en) | 2001-05-21 | 2009-03-31 | Synaptics (Uk) Limited | Position sensor |
US8243033B2 (en) | 2001-05-21 | 2012-08-14 | Synaptics (Uk) Limited | Position sensor |
US7406393B2 (en) | 2002-03-05 | 2008-07-29 | Synaptics (Uk) Limited | Position sensor |
US7907130B2 (en) | 2002-06-05 | 2011-03-15 | Synaptics (Uk) Limited | Signal transfer method and apparatus |
US7133793B2 (en) | 2003-07-24 | 2006-11-07 | Synaptics (Uk) Limited | Magnetic calibration array |
US7812268B2 (en) | 2003-08-26 | 2010-10-12 | Synaptics (Uk) Limited | Digitizer system |
US8022317B2 (en) | 2003-08-26 | 2011-09-20 | Synaptics (Uk) Limited | Digitizer system |
US9410791B2 (en) | 2010-12-24 | 2016-08-09 | Cambridge Integrated Circuits Limited | Position sensing transducer |
US9470505B2 (en) | 2012-06-13 | 2016-10-18 | Cambridge Integrated Circuits Limited | Position sensing transducer |
Also Published As
Publication number | Publication date |
---|---|
JPH0367338B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-10-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS60189231A (ja) | ワイヤボンデイング装置 | |
US5084959A (en) | Chip mounting apparatus | |
US4444349A (en) | Wire bonding apparatus | |
US5060841A (en) | wire bonding method and apparatus and method of producing semiconductor device by use of wire bonding apparatus | |
US4340166A (en) | High speed wire bonding method | |
US6955284B2 (en) | Device for positioning a tool in relation to a workpiece | |
US4109846A (en) | Automatic height sensor for semiconductor bonding tool, wafer probe or the like | |
US4619395A (en) | Low inertia movable workstation | |
JPS6255947A (ja) | チツプ部品移載装着装置 | |
JPS56103429A (en) | Die bonder | |
JP2828552B2 (ja) | ワイヤボンディング装置 | |
JPS6259460B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
JPS58160044A (ja) | Nc工作機械における位置補正方法及び装置 | |
JP3625934B2 (ja) | パラレルシーム接合方法及びパラレルシーム接合装置 | |
JPH01166529A (ja) | ボンデイング方法 | |
SU418298A1 (ru) | Автомат для сварки | |
JPH0525238Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
JPS626651B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
JPH0635470Y2 (ja) | ワイヤボンデイング装置 | |
JPS58155108A (ja) | 平板・形鋼用穿孔機 | |
JPH02303138A (ja) | ワイヤボンディング装置及び方法 | |
JPS618933A (ja) | 半導体製造装置 | |
JPS61163647A (ja) | ボンデイング装置 | |
JPH07183321A (ja) | ワイヤボンディング装置 | |
JPH0691121B2 (ja) | ボンデイング装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |