JPS60186408A - 高純度リンの製造法 - Google Patents

高純度リンの製造法

Info

Publication number
JPS60186408A
JPS60186408A JP4123384A JP4123384A JPS60186408A JP S60186408 A JPS60186408 A JP S60186408A JP 4123384 A JP4123384 A JP 4123384A JP 4123384 A JP4123384 A JP 4123384A JP S60186408 A JPS60186408 A JP S60186408A
Authority
JP
Japan
Prior art keywords
phosphine
gas
zone
phosphorus
arsine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4123384A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6410441B2 (cs
Inventor
Akio Iso
磯　晃男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Chemical Industrial Co Ltd
Original Assignee
Nippon Chemical Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP4123384A priority Critical patent/JPS60186408A/ja
Publication of JPS60186408A publication Critical patent/JPS60186408A/ja
Publication of JPS6410441B2 publication Critical patent/JPS6410441B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP4123384A 1984-03-06 1984-03-06 高純度リンの製造法 Granted JPS60186408A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4123384A JPS60186408A (ja) 1984-03-06 1984-03-06 高純度リンの製造法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4123384A JPS60186408A (ja) 1984-03-06 1984-03-06 高純度リンの製造法

Publications (2)

Publication Number Publication Date
JPS60186408A true JPS60186408A (ja) 1985-09-21
JPS6410441B2 JPS6410441B2 (cs) 1989-02-21

Family

ID=12602690

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4123384A Granted JPS60186408A (ja) 1984-03-06 1984-03-06 高純度リンの製造法

Country Status (1)

Country Link
JP (1) JPS60186408A (cs)

Also Published As

Publication number Publication date
JPS6410441B2 (cs) 1989-02-21

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