JPS60178677A - 屈曲形圧電アクチユエ−タ - Google Patents

屈曲形圧電アクチユエ−タ

Info

Publication number
JPS60178677A
JPS60178677A JP59034044A JP3404484A JPS60178677A JP S60178677 A JPS60178677 A JP S60178677A JP 59034044 A JP59034044 A JP 59034044A JP 3404484 A JP3404484 A JP 3404484A JP S60178677 A JPS60178677 A JP S60178677A
Authority
JP
Japan
Prior art keywords
piezoelectric
thickness
piezoelectric element
piezoelectric actuator
actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59034044A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0256825B2 (enrdf_load_stackoverflow
Inventor
Shinji Hara
原　臣司
Takashi Yoshizawa
高志 吉澤
Hiroshi Hosaka
寛 保坂
Naoyuki Tamaru
田丸　直幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP59034044A priority Critical patent/JPS60178677A/ja
Publication of JPS60178677A publication Critical patent/JPS60178677A/ja
Publication of JPH0256825B2 publication Critical patent/JPH0256825B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP59034044A 1984-02-24 1984-02-24 屈曲形圧電アクチユエ−タ Granted JPS60178677A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59034044A JPS60178677A (ja) 1984-02-24 1984-02-24 屈曲形圧電アクチユエ−タ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59034044A JPS60178677A (ja) 1984-02-24 1984-02-24 屈曲形圧電アクチユエ−タ

Publications (2)

Publication Number Publication Date
JPS60178677A true JPS60178677A (ja) 1985-09-12
JPH0256825B2 JPH0256825B2 (enrdf_load_stackoverflow) 1990-12-03

Family

ID=12403314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59034044A Granted JPS60178677A (ja) 1984-02-24 1984-02-24 屈曲形圧電アクチユエ−タ

Country Status (1)

Country Link
JP (1) JPS60178677A (enrdf_load_stackoverflow)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627790U (enrdf_load_stackoverflow) * 1985-06-28 1987-01-17
JPH01261879A (ja) * 1988-04-13 1989-10-18 Jgc Corp 積層型変位素子
US5083056A (en) * 1989-03-14 1992-01-21 Kabushiki Kaisha Toshiba Displacement generating apparatus
US5233256A (en) * 1991-01-30 1993-08-03 Murata Manufacturing Co., Ltd. Method of driving piezoelectric bimorph device and piezoelectric bimorph device
JPH0774410A (ja) * 1994-09-06 1995-03-17 Ngk Spark Plug Co Ltd 電歪積層板の製造方法
US5834879A (en) * 1996-01-11 1998-11-10 Wac Data Services Co., Ltd. Stacked piezoelectric actuator
WO1999017383A1 (de) * 1997-09-30 1999-04-08 Siemens Aktiengesellschaft Piezoelektrisches element
JP2001286166A (ja) * 2000-03-30 2001-10-12 Seiko Epson Corp 圧電アクチュエータ、時計および機器
KR100309084B1 (ko) * 1993-09-28 2001-12-15 요트.게.아. 롤페즈 비틀림액추에이터및그제조방법
US6367132B2 (en) * 1998-08-31 2002-04-09 Eastman Kodak Company Method of making a print head
SG97764A1 (en) * 1998-08-21 2003-08-20 Inst Data Storage Multilayer piezoeletric actuator with bending deformation and method for its manufacture
US6885615B1 (en) 1998-12-21 2005-04-26 Seiko Epson Corporation Piezoelectric actuator, time piece, and portable device
KR100485596B1 (ko) * 2002-06-04 2005-04-27 한국과학기술연구원 밴더형 적층 액츄에이터
US6888291B2 (en) * 2002-10-31 2005-05-03 The Boeing Company Electrical system for electrostrictive bimorph actuator
US7024738B2 (en) 1999-05-21 2006-04-11 Matsushita Electric Industrial Co., Ltd. Method for controlling a direction of polarization of a piezoelectric thin film
JP2010517282A (ja) * 2007-01-23 2010-05-20 エプコス アクチエンゲゼルシャフト 圧電素子

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627790U (enrdf_load_stackoverflow) * 1985-06-28 1987-01-17
JPH01261879A (ja) * 1988-04-13 1989-10-18 Jgc Corp 積層型変位素子
US5083056A (en) * 1989-03-14 1992-01-21 Kabushiki Kaisha Toshiba Displacement generating apparatus
US5233256A (en) * 1991-01-30 1993-08-03 Murata Manufacturing Co., Ltd. Method of driving piezoelectric bimorph device and piezoelectric bimorph device
KR100309084B1 (ko) * 1993-09-28 2001-12-15 요트.게.아. 롤페즈 비틀림액추에이터및그제조방법
JPH0774410A (ja) * 1994-09-06 1995-03-17 Ngk Spark Plug Co Ltd 電歪積層板の製造方法
US5834879A (en) * 1996-01-11 1998-11-10 Wac Data Services Co., Ltd. Stacked piezoelectric actuator
WO1999017383A1 (de) * 1997-09-30 1999-04-08 Siemens Aktiengesellschaft Piezoelektrisches element
SG97764A1 (en) * 1998-08-21 2003-08-20 Inst Data Storage Multilayer piezoeletric actuator with bending deformation and method for its manufacture
US6367132B2 (en) * 1998-08-31 2002-04-09 Eastman Kodak Company Method of making a print head
US6885615B1 (en) 1998-12-21 2005-04-26 Seiko Epson Corporation Piezoelectric actuator, time piece, and portable device
US7078847B2 (en) 1998-12-21 2006-07-18 Seiko Epson Corporation Piezoelectric actuator, timepiece, and portable device
US7253552B2 (en) 1998-12-21 2007-08-07 Seiko Epson Corporation Piezoelectric actuator, timepiece, and portable device
US7024738B2 (en) 1999-05-21 2006-04-11 Matsushita Electric Industrial Co., Ltd. Method for controlling a direction of polarization of a piezoelectric thin film
JP2001286166A (ja) * 2000-03-30 2001-10-12 Seiko Epson Corp 圧電アクチュエータ、時計および機器
KR100485596B1 (ko) * 2002-06-04 2005-04-27 한국과학기술연구원 밴더형 적층 액츄에이터
US6888291B2 (en) * 2002-10-31 2005-05-03 The Boeing Company Electrical system for electrostrictive bimorph actuator
JP2010517282A (ja) * 2007-01-23 2010-05-20 エプコス アクチエンゲゼルシャフト 圧電素子

Also Published As

Publication number Publication date
JPH0256825B2 (enrdf_load_stackoverflow) 1990-12-03

Similar Documents

Publication Publication Date Title
JPS60178677A (ja) 屈曲形圧電アクチユエ−タ
US5849125A (en) Method of manufacturing flextensional transducer using pre-curved piezoelectric ceramic layer
US6867533B1 (en) Membrane tension control
JP2001326399A (ja) アクチュエータ装置
EP0901172A1 (en) Piezoelectric actuator
US5781646A (en) Multi-segmented high deformation piezoelectric array
US6111967A (en) Multi-segmented high deformation piezoelectric array
JP3405618B2 (ja) バイモルフ圧電アクチュエータ
JPH06232469A (ja) 圧電アクチュエータの駆動方法
TW202121822A (zh) 具有多層構造之靜電致動器
JPS61150287A (ja) 圧電体変位装置
US6175182B1 (en) Pseudo-shear mode actuator
JPS62246667A (ja) 圧電バルブ及びその駆動方法
JP4443707B2 (ja) 圧電アクチュエータ
JP3326735B2 (ja) 圧電アクチュエータ
JP3106603B2 (ja) 圧電アクチュエータ
JPS5916767A (ja) 印字ユニツト
JP2921310B2 (ja) 積層型圧電アクチュエータ
JPH0443684A (ja) 積層バイモルフ型圧電素子
JPS5919383A (ja) 圧電バイモルフ
JPS61183981A (ja) 圧電体変位装置
JPS62242188A (ja) 圧電バルブ
JPH0964431A (ja) バイモルフ型アクチュエータ
US20070252478A1 (en) Solid-State Actuator, Especially Piezoceramic Actuator
JPH0458769A (ja) 圧電回転微動装置