JPS60174856U - ポ−ラロセンサ - Google Patents

ポ−ラロセンサ

Info

Publication number
JPS60174856U
JPS60174856U JP6368784U JP6368784U JPS60174856U JP S60174856 U JPS60174856 U JP S60174856U JP 6368784 U JP6368784 U JP 6368784U JP 6368784 U JP6368784 U JP 6368784U JP S60174856 U JPS60174856 U JP S60174856U
Authority
JP
Japan
Prior art keywords
silicon substrate
polaro
sensor
electrode
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6368784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0351740Y2 (enrdf_load_stackoverflow
Inventor
永田　保広
照雄 木戸
秀夫 片山
向井　藤司
吉明 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Original Assignee
Daikin Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd filed Critical Daikin Industries Ltd
Priority to JP6368784U priority Critical patent/JPS60174856U/ja
Publication of JPS60174856U publication Critical patent/JPS60174856U/ja
Application granted granted Critical
Publication of JPH0351740Y2 publication Critical patent/JPH0351740Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Wire Bonding (AREA)
JP6368784U 1984-04-27 1984-04-27 ポ−ラロセンサ Granted JPS60174856U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6368784U JPS60174856U (ja) 1984-04-27 1984-04-27 ポ−ラロセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6368784U JPS60174856U (ja) 1984-04-27 1984-04-27 ポ−ラロセンサ

Publications (2)

Publication Number Publication Date
JPS60174856U true JPS60174856U (ja) 1985-11-19
JPH0351740Y2 JPH0351740Y2 (enrdf_load_stackoverflow) 1991-11-07

Family

ID=30594070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6368784U Granted JPS60174856U (ja) 1984-04-27 1984-04-27 ポ−ラロセンサ

Country Status (1)

Country Link
JP (1) JPS60174856U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0351740Y2 (enrdf_load_stackoverflow) 1991-11-07

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