JPS60173879A - 光電変換装置の製造方法 - Google Patents

光電変換装置の製造方法

Info

Publication number
JPS60173879A
JPS60173879A JP59022159A JP2215984A JPS60173879A JP S60173879 A JPS60173879 A JP S60173879A JP 59022159 A JP59022159 A JP 59022159A JP 2215984 A JP2215984 A JP 2215984A JP S60173879 A JPS60173879 A JP S60173879A
Authority
JP
Japan
Prior art keywords
film
light
oxidized
photoelectric conversion
insulation substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59022159A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0131710B2 (OSRAM
Inventor
Yoshio Kishiyu
籏手　喜男
Masaru Ono
大野　勝
Mikihiko Nishitani
幹彦 西谷
Hiroko Wada
裕子 和田
Noboru Yoshigami
由上　登
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic System Solutions Japan Co Ltd
Panasonic Holdings Corp
NTT Inc
Original Assignee
Matsushita Graphic Communication Systems Inc
Nippon Telegraph and Telephone Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Graphic Communication Systems Inc, Nippon Telegraph and Telephone Corp, Matsushita Electric Industrial Co Ltd filed Critical Matsushita Graphic Communication Systems Inc
Priority to JP59022159A priority Critical patent/JPS60173879A/ja
Publication of JPS60173879A publication Critical patent/JPS60173879A/ja
Publication of JPH0131710B2 publication Critical patent/JPH0131710B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass

Landscapes

  • Light Receiving Elements (AREA)
JP59022159A 1984-02-08 1984-02-08 光電変換装置の製造方法 Granted JPS60173879A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59022159A JPS60173879A (ja) 1984-02-08 1984-02-08 光電変換装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59022159A JPS60173879A (ja) 1984-02-08 1984-02-08 光電変換装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60173879A true JPS60173879A (ja) 1985-09-07
JPH0131710B2 JPH0131710B2 (OSRAM) 1989-06-27

Family

ID=12075048

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59022159A Granted JPS60173879A (ja) 1984-02-08 1984-02-08 光電変換装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60173879A (OSRAM)

Also Published As

Publication number Publication date
JPH0131710B2 (OSRAM) 1989-06-27

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