JPS6017279A - 電歪振動子を用いる気体ポンプ - Google Patents

電歪振動子を用いる気体ポンプ

Info

Publication number
JPS6017279A
JPS6017279A JP58124635A JP12463583A JPS6017279A JP S6017279 A JPS6017279 A JP S6017279A JP 58124635 A JP58124635 A JP 58124635A JP 12463583 A JP12463583 A JP 12463583A JP S6017279 A JPS6017279 A JP S6017279A
Authority
JP
Japan
Prior art keywords
vibrator
thin copper
electrostriction
electrostrictive
copper disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58124635A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0156275B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Yasuatsu Katsuno
勝野　泰諄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tamagawa Seiki Co Ltd
Original Assignee
Tamagawa Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tamagawa Seiki Co Ltd filed Critical Tamagawa Seiki Co Ltd
Priority to JP58124635A priority Critical patent/JPS6017279A/ja
Publication of JPS6017279A publication Critical patent/JPS6017279A/ja
Publication of JPH0156275B2 publication Critical patent/JPH0156275B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP58124635A 1983-07-11 1983-07-11 電歪振動子を用いる気体ポンプ Granted JPS6017279A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58124635A JPS6017279A (ja) 1983-07-11 1983-07-11 電歪振動子を用いる気体ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58124635A JPS6017279A (ja) 1983-07-11 1983-07-11 電歪振動子を用いる気体ポンプ

Publications (2)

Publication Number Publication Date
JPS6017279A true JPS6017279A (ja) 1985-01-29
JPH0156275B2 JPH0156275B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-11-29

Family

ID=14890286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58124635A Granted JPS6017279A (ja) 1983-07-11 1983-07-11 電歪振動子を用いる気体ポンプ

Country Status (1)

Country Link
JP (1) JPS6017279A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63121785U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-01-30 1988-08-08
US5129789A (en) * 1990-04-23 1992-07-14 Advanced Medical Systems, Inc. Means and method of pumping fluids, particularly biological fluids
CN1106458C (zh) * 1997-12-10 2003-04-23 埃勒夫阿托化学有限公司 膜与氧还原阴极的电解槽的间歇方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818083U (ja) * 1981-07-30 1983-02-03 三菱電機株式会社 圧電振動子ポンプ
JPS59200082A (ja) * 1983-04-27 1984-11-13 Sharp Corp 液送ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818083U (ja) * 1981-07-30 1983-02-03 三菱電機株式会社 圧電振動子ポンプ
JPS59200082A (ja) * 1983-04-27 1984-11-13 Sharp Corp 液送ポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63121785U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-01-30 1988-08-08
US5129789A (en) * 1990-04-23 1992-07-14 Advanced Medical Systems, Inc. Means and method of pumping fluids, particularly biological fluids
CN1106458C (zh) * 1997-12-10 2003-04-23 埃勒夫阿托化学有限公司 膜与氧还原阴极的电解槽的间歇方法

Also Published As

Publication number Publication date
JPH0156275B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-11-29

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