JPS60170013A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To improve the record/reproduction efficiency without deteriorating the characteristics of an upper magnetic core by forming a hollow part at a part of a lower magnetic core film to set a coil conductor into said hollow part and therefore flattening the upper magnetic core film with even thickness. CONSTITUTION:A lower magnetic core film 12 is formed on a magnetic substrate 11, and a coil conductor forming part 12b is deleted by etching. A nonmagnetic insulated film 13 is formed by sputtering to the entire part of the film 12 including a core film deleted part 12a with approximately same thickness as the film 12. Then the coil conductor forming groove part 13a is formed equidistantly by etching at the part 12a with rectangular sections. A conductor layer 14 having the film thickness equal to the depth of the part 13a is formed on the part 13a. Then the layer 14 is removed by etching excepting the part 13a, and the surface of the etched surface to form a coil conductor 14a. A gap forming insulated film 15 is formed on the surface of the conductor 14a, and the film 15 is etched away at a back gap part. Then a contact window is formed by etching. An upper magnetic core film 16 is formed finally, and a thin film magnetic head source matter is obtained by patterning. Then the track width processing is applied to said head source matter to obtain a thin film magnetic head 10'.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thin 1 mm magnetic head capable of performing commercial density magnetic recording and reproducing 41-P''.

Background technology and its problems For example, multi-channel recording or reproducing PCM signals,
In other words, a multi-element magnetic head and a thin M Ml magnetic head are used.

Conventionally, this type of thin film magnetic head has been constructed as shown in FIGS. 1 and 2. First, item 7 in Fig. 1 is a thin film magnetic head in which a coil conductor is formed to -1-, and permalloy, sendust, amorphous, etc. is deposited on a magnetic or non-magnetic base 1m+11 by means of sputtering, vapor deposition, etc. An upper magnetic core film (2) is formed, and a coil conductor 1 of
m (41 is formed, a non-magnetic insulating film (5) is deposited on it, and an upper magnetic core layer (6) is formed on it. Then, both magnetic core layers +21 (61 is a coil conductor layer A closed magnetic path is formed via a gap (7) surrounding (4).

In the thin film magnetic head formed in this way, when forming the upper magnetic core film (6), since the coil conductor layer (4) has a required thickness, both ends of the coil conductor 1-(4) are formed as shown in the bottom of the figure. This creates a step. Because of this step, the upper magnetic layer 1e+ has a thickness t1 of the step portion (6a), which is lower than that of the flat portion (6a).
The film thickness t2 in b) inevitably becomes thin when using ordinary means such as sputtering or vapor deposition. The film thickness L2 of this stepped portion (6b) can be controlled by the taper angle θ at both ends of the coil conductor layer (4), but this taper angle θ is 45. It can only be changed within the range of °<θ<90°, and this range is the flat part (6a) and stepped part (6b) of the upper magnetic core crotch (6). The thickness is 1. =12 is impossible.

In this way, in a thin film magnetic head, the magnetic core through which magnetic flux can pass is formed of a thin film, so the recording and reproducing efficiency is as low as Prf41! , ':, and this efficiency constraint is determined by the thinnest part of the magnetic core in the magnetic path, so in this example, the film thickness of the stepped part (6b) of the upper magnetic core H@+61 By°CC
The recording/reproducing efficiency is determined.

Therefore, in this example, it is possible to increase the efficiency by increasing the film thickness of the step part (6b) of the upper magnetic core gland (6), and one way to increase this film thickness is to use a coil conductor. It is conceivable to change the method of etching the layer (4), but with the method other than the above-mentioned lightning dry etching method, etching takes time and when forming a high-density multi-trunk head, the track pitch becomes narrower.
Patterning and etching of the V film becomes impossible. In addition, from the viewpoint of the magnetic properties of the magnetic core 1 film, there are disadvantages such as the occurrence of unnecessary magnetic domains within the surface of the core in the uneven portions, resulting in low magnetic permeability, resulting in poor recording and reproducing efficiency.

In addition, the Neo one shown in Figure 2 is a thin film magnetic head with a coil conductor formed in two layers.
A first coil conductor In (41) is formed at required intervals and a first non-magnetic insulating film (5) is deposited thereon, and a second coil conductor 1t# (4') is placed on top of the first coil conductor In (41). 1 coil conductor 1
C
An upper magnetic core film (6) is formed thereon.

The thin film magnetic head in which the coil conductor is formed into a multilayer structure is advantageous in that it reduces the recording current and improves the reproduction output, but there are various considerations. One of the reasons why silver is needed is to flatten the If part of the coil conductor 1 m to prevent deterioration of the characteristics of the upper magnetic core. Department (
7') is unavoidable, and therefore the above-mentioned first
Similar to the thin-film magnetic head of the January-coil conductor shown in Fig.
The stepped part (6b) of the two-part magnetic core gland (6) is the flat part (
It is thinner than 6a) and the same problem as Shibetsu occurs.

Object of the Invention The present invention provides a thin film magnetic head as described above, in which the upper magnetic core film is formed by flattening it with a uniform film 1ν.
, L': 811 The recording and reproducing efficiency is improved without deteriorating the characteristics of the magnetic core, and the etching time of the upper magnetic core 7 is shortened, patterning accuracy is improved, and manufacturing is simplified. The present invention provides a curved S-shape magnetic head.

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention provides a magnetic substrate, 1
・Part magnetic nid r1 model, gear knob I tW I model and -F part magnetic f'1. ：I）'Tax is formed in the vessel, 1 part magnetic 21 part is formed in 4 parts in part of the 21 parts, and each recessed part of the : 1 conductor is installed to form a phantom thin crotch magnetic head. It is something to do.

fruit can f evening jl The present invention will be described in detail with reference to FIG.

FIG. 3 is an explanatory diagram of the first embodiment of the present invention.

In the figure, ζ (11) is smoothed with a magnetic substrate made of, for example, Mn-Zn ferrite, Ni-Zn ferrite, etc., and then is coated with sendust, permalloy, amorphous, etc. on the plane of this base 13j (11). By means of sputtering, vapor deposition, etc., 1 part magnetic core (12 parts) is formed to a total thickness of about 1νl, including one coil conductor and one insulation layer, which will be constructed later. r11Q(1
2) The coil conductor forming portion (12a) is removed by dry etching or the like (FIG. A).

Next, the upper part including the core 19 removed part (12a) ((if!
A non-magnetic insulating film (13) such as Si (h) is formed on the l core 1% (12) σN- (Figure B), and this non-magnetic insulating film (1
3) A first coil conductor j-(14) is formed on the one ζ coil 7 film removed portion (12a) and patterned into a Pli''JM spacing shape (C in the same figure).In this case, the first coil conductor The conductor 1-(14) may have a shape as shown in FIG. A non-magnetic insulating film (13') is deposited on the first coil conductor NC14) which has been vacuumed in this way.
Gt! (13') 0) Form the second coil conductor 1tJ (14') on l-, and form the first coil conductor 1tm
The surface is flattened by patterning so as to fit into the (+4) interval, and a nonmagnetic insulating film (15) is deposited thereon (E and E' in the same figure).

Next, the non-magnetic insulating film in the part corresponding to the back gap on the magnet 91 + core crotch (12) is completely etched away, and the non-magnetic insulating film (15') is removed in the front gap part so that the required gap length is obtained. ), the process before forming the upper magnetic field 1+1:+A is completed (F and 1?' in the same figure).In this case, the front gap part is formed in the previous step and requires a non-magnetic insulating film C. It may also be formed by ion etching or lap polishing so that the film thickness corresponds to the gap length of ζ.

Finally, by forming the upper magnetic core crotch (16), a thin film magnetic head element is formed (see G and G' in the same figure).
), by subjecting this element to mid-track processing, a thin film magnetic head 001 with no scratches as shown in FIG. 4 is obtained.

Note that in the illustrated configuration of this example, the coil conductor is formed in two layers, but it can also be formed in multiple layers of 3)- or more.
In particular, in the case of an even number of 1-, layers can be formed so as to be successively spaced between the coil conductor patterns, making it easy to flatten the surface.

As described above, by following the steps in this example, the surface on which the magnetic core film is formed on the two parts has approximately the same flattening ability, and even if some buckooning errors and film thickness errors of each layer are included, the level difference can be reduced to 1 μm.
Since it is possible to suppress the thickness to around m, the upper magnetic core film can be formed flat with a uniform thickness. The film thickness of this upper magnetic core film is determined by the coercive force of the recording medium and the required depth value, but in the case of high coercive force media such as metal powder, which is a recent high-density recording medium, a film of 5 μm or more is used. In this case, a step of around 1 μm (2 μm or more) does not pose a problem in terms of magnetic properties, and in the case of a step of 1 μm after 11f, a uniform film thickness can be formed by ordinary sputter deposition.

FIG. 5 is an explanatory diagram of the manufacturing process of a thin film magnetic head as another embodiment of the present invention.

This example differs from the above embodiment in which the coil conductor is formed in multiple layers (two Id in the figure) in that the coil conductor is formed in one layer.

In this example, a 1.5 part magnetic core film (12) is formed on the magnetic base & (11), and a coil conductor forming part (12b) is formed.
After removing the core film by etching (A in the same figure), the core film removed portion <1
Sputtering, vapor deposition, plasma CV
The thickness of the lower magnetic core layer (12) is approximately the same as that of the lower magnetic core layer (12) by means such as I), and then the core layer removed portion (12) is formed to have the same thickness as the lower magnetic core layer (12).
Grooves (13a) for forming coil conductors are formed in the insulating film of a) by plasma etching or the like to form, for example, an 11Ji surface shape at equal intervals (FIG. C).

Next, a conductor layer (14) having the same thickness as the depth of the coil conductor forming groove (13a) is formed thereon, and the area other than the groove (13a) is removed by means such as etching or lap polishing. A coil conductor (14a) is formed by flattening the surface (E in the same figure). After that, an insulating film (15) for gear formation is formed on the surface, and the insulating film (15) in the pack gap part is removed by etching (Figure F), and a contact window is formed by etching (
(No figure shown).

Finally, the upper magnetic core gland (16) is formed and patterned to form a thin film magnetic head element (G in the same figure), and the thin film magnetic head (10' shown in Fig. 6) is formed by processing during the track. is obtained.

As described above, in the case of this example as well, it is possible to substantially flatten the surface on which the upper magnetic core film is formed, and the upper magnetic core film can be formed flat with a uniform film thickness.

Effects of the Invention As described above, the PJ crotch magnetic head according to the present invention has four parts formed on a part of the lower magnetic core film formed on the magnetic substrate, and coil conductors are provided in these four parts. There are almost no steps caused by the coil conductor on the patterned surface, and the upper magnetic core crotch can be formed flat with an even thickness, improving recording and reproducing efficiency without deteriorating magnetic properties, and reducing manufacturing odor. Also, since the upper magnetic core requires only a minimum film thickness, the etching time can be shortened and the accuracy of core patterning can be improved, making it possible to obtain a highly reliable thin-ribbed magnetic head. have the effect of

[Brief explanation of the drawing]

Figure 1 is a WE view of an example of a conventional thin M91 magnetic head.
Fig. 2 is a front view of the same and another example, and Fig. 3 is a M according to the present invention.
FIG. 4 is a cross-sectional view of an example of the thin film magnetic head 1 according to the present invention, and FIG. Figure 6 is the same, tit
1IR4 (This is the h1 diagram of another example of ti & qi het. 001 (Ill') in the figure is thin xin mother qi het, (11)
(I2) is magnetic substrate, (13) is an insulating film, (14) (14') is a coil conductor, (15'
) is the gear foot, (16) is the 1st section P↓: I -j
'It is IIQ. (Hidemori Matsukuma) Figure 1

Claims (1)

[Claims] A magnetic substrate, an upper magnetic core film, a thin film for the gear, and an upper magnetic core 1 are sequentially formed, four parts are formed on a part of the magnetic core film, and a coil conductor is placed in the recessed part. A thin film magnetic head characterized by the following features: