JPS58215713A - Thin film head for vertical magnetic recording - Google Patents

Abstract

PURPOSE:To obtain a thin film head for vertical magnetic recording having a high write efficiency, by shaping two nonmagnetic film layers and a thin film magnetic pole in parallel with a substrate so as to expose a part of the thin film magnetic pole formed on the substrate having a thin film coil block. CONSTITUTION:The thin film coil block 21 is formed on the substrate 20 with the mask vapor deposition method or the like and the 1st nonmagnetic thin film 22 made of Al, Cu or the like is formed with the mask vapor deposition so as to have a side surface 22A rising higher than that of the thin film coil block 21. The thin film magnetic pole 23 is formed with the sputtering method along the side surface 22A of the nonmagnetic thin film 22. The 2nd nonmagnetic layer 24 of SiO2 or the like is formed on the substrate 20 with the sputtering method so as to cover the surface of the thin film magnetic pole 23. The nonmagnetic film layers 22, 24 and the thin film magnetic pole 23 are shaped in parallel with the substrate 20 so as to expose a part of the thin film magnetic pole 23. Since the thin film coil block 21 is made to approach sufficiently to a recording medium, the efficiency of write/reproduction is improved.

Description

Detailed Description of the Invention +11 Technical Field of the Invention The present invention relates to a thin film head for perpendicular magnetic recording.

(2) Background of the technology There are two types of magnetic recording systems: horizontal magnetic recording, which magnetizes the surface of the recording medium in the horizontal direction, and perpendicular recording, which magnetizes in the thickness direction of the recording medium. This method has the advantage that recording density can be dramatically increased compared to the horizontal magnetic recording method.

For this reason, various types of spatula P for perpendicular magnetic recording and reproduction have been developed, but a head capable of obtaining sufficient magnetic writing efficiency has not yet been obtained.

(3) Prior art and problems FIGS. 1 and 2 each show a conventional perpendicular magnetic recording head. The head shown in FIG. 1 has a thin film coil block 2 formed on a substrate 1, and the thin film coil A thin film magnetic pole 3 is formed along the surface of the block 2, and the tip of the thin film magnetic pole 3 is guided to the end of the substrate 1. The head shown in FIG. 2 also has a magnetic material 5 fixed to the upper end of the non-magnetic material 4.
A hand-wound coil block 6 is arranged around the periphery of the magnetic body 5 and a thin film magnetic pole 7 extending toward the lower end of the nonmagnetic body 4 is formed on the surfaces of the magnetic body 5 and the nonmagnetic body 40, and the surface of the core thin film magnetic pole 70 is covered with a protective layer. It has a structure covered by 8. In the case of the heads shown in FIGS. 1 and 2, the center portion of the coil of the coil block is far away from the magnetic recording medium 9, so there is a large amount of magnetic flux leakage in the middle of the magnetic path, and the writing speed is high. Efficiency cannot be obtained = On the other hand, as shown in FIG. It is very difficult to vertically arrange the magnetic poles 12 on the substrate 11, and ID has not yet been realized. Further, a head shown in FIG. 4 is known. This head consists of two glass plates 13.
With a thin film magnetic pole 15tl formed on one abutting surface of glass plates 13 and 14, a thin film coil f is formed on the abutting surface of both glass plates 13 and 14.
It has a configuration in which it is glued on 0tsuk16.

In the case of this configuration, the formation of the thin film magnetic pole 15 and the bonding of the two glass plates 13 and 14 are troublesome, and the manufacturing process is time-consuming and expensive. Also,
In the case of the head shown in FIG. 4, the coil block 16 is moved away from the recording medium 17 by an amount outside the thickness of the glass plate 13.14;
This is because it is actually quite large compared to the thickness etc. of 6.

This has the disadvantage that writing efficiency on the recording medium is low.

(4) Purpose of the Invention In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a thin film head for perpendicular magnetic recording that can be easily manufactured and has high writing efficiency on a magnetic recording medium.

(5) Structure of the Invention According to the present invention, a substrate, a thin film coil block formed on the substrate, and a side surface rising from the substrate at the center of the thin film coil block are formed. a first non-magnetic film layer, a thin-film magnetic pole formed along the side surface of the first non-magnetic film layer, and a second non-magnetic film layer formed on the substrate so as to cover the surface of the thin-film magnetic pole. A portion of the thin film magnetic pole is exposed apart from the nonmagnetic film layer.

This is achieved by providing a thin film head for perpendicular magnetic recording, characterized in that the first and second nonmagnetic film layers and the thin film magnetic pole are ground in a direction parallel to the substrate.

(6) Examples of the invention The present invention will be described in detail below with reference to one drawing.

FIG. 5 shows the process of forming a thin film head for perpendicular magnetic recording according to an embodiment of the present invention, and FIG. 6 shows its completed state. The structure of the thin film head will be explained according to the order of formation. First, as shown in FIG. 5, a thin film coil block 21 is formed on a substrate 20. The substrate 20 is s N1z
It may be a ferromagnetic substrate such as n-pheite, or it may be a nonmagnetic substrate with a ferromagnetic thin film formed on the surface. The thin film coil block 21 is made into a multi-turn coil shape by a combination K of nine turns of a coil conductor layer and an insulating film layer. As a method for forming the thin film coil block 21, a photoetching method or a mask vapor deposition method can be used.

Next, a first non-magnetic, magnetic film layer 22 made of AJ, Cu, A-no-Cu, etc. is formed on the first substrate 20.

The first nonmagnetic film layer 22 is preferably formed at the center of the thin film coil block 21 so as to have a side surface 22A rising from above the substrate 20 to a position υ higher than the thin film coil block 21. Although such a first nonmagnetic film layer 22 can also be made by photoetching,
In the case of photoetching, it is difficult to form the side surface 22A smoothly. On the other hand, when this first nonmagnetic film layer 22 is formed by a mask vapor deposition method, the side surface 22A
For example, the first non-magnetic film layer 22 having a thickness t of about 20 μm from the substrate 20 is formed using the mask evaporation method, which is preferable for forming the thin film magnetic pole described later because it can be formed smoothly. When forming, the width C of the side surface 22A from the start of the rise to the end of the rise can be approximately 10 μm, and thereby the inclination angle of the side surface 22A can be approximately 60°. .

Next, a thin film magnetic pole 23 is formed along the side surface 22A of the first nonmagnetic film layer 22. The thin film magnetic pole 23 is made of a ferromagnetic material such as permalloy whose tip (upper end) has a narrow width.
As a method of forming the thin film magnetic pole 23, which is preferably formed in a shape of a turn or a shape, a method of forming the thin film magnetic pole 23 is a method of forming the thin film magnetic pole 23 in the form of a turn. Although means such as a ring or plating may be used, a mask vapor deposition method is preferable.

Next, S i Ch, AA! are applied on the substrate 20 so as to cover the surface of the thin film magnetic pole 230 . A second nonmagnetic film layer 24 made of TOS or the like is formed. This second non-magnetic film layer 24,
plays the role of a protective layer, and is preferably a thin film coil block layer 21. as shown in Figure 1. Thin film magnetic pole 23 and the first
For example, a shaped trap and a thin film magnetic pole 23 are formed on the substrate 20 by the TTF sputtering method so as to cover the entire nonmagnetic film layer 24.
so that part of it is exposed.

First and second non-magnetic film layers 22, 24 and thin film magnetic pole 23
is ground in a direction parallel to the substrate 20, as shown in FIG. The ground surface is finished with a smooth flat surface by lapping. In addition, after wrapping 810. It is preferable to form a protective film such as a S/F ivy film.

In the case of the thin film head for perpendicular magnetic recording having the above configuration, the thin film magnetic pole 23 is rounded and formed along the inclined side surface 22A of the first nonmagnetic film layer 22. It is not perpendicular to
It becomes a ridge that faces the magnetic recording medium with a slope. therefore.

Although this arrangement causes a slight decrease in writing efficiency, reproduction efficiency, etc., since the thin film coil block 21 can be brought sufficiently close to the magnetic recording medium, overall, the writing efficiency to the magnetic recording medium is improved. And the regeneration efficiency can be sufficiently increased.

Although one embodiment has been described above, it goes without saying that the present invention is not limited to only the aspects of the above embodiment.

(7) Effects of the Invention As is clear from the above explanation, the perpendicular magnetic recording film head according to the present invention allows the thin film coil block to be brought sufficiently close to the magnetic recording medium. It becomes possible to reduce the leakage of magnetic flux in the middle of the magnetic path, and it becomes possible to sufficiently increase the writing efficiency and reproduction efficiency on the magnetic recording medium. Further, since it can be manufactured only by the process of forming a thin film on a substrate, it has the advantage that it can be manufactured easily and in a short time.

[Brief explanation of the drawing]

1, 2, 3, and 14 are schematic sectional views showing a conventional perpendicular magnetic recording head and magnetic recording medium, respectively, and FIG. 5 is a perpendicular magnetic recording according to an embodiment of the present invention. FIG. 6 is a schematic cross-sectional view showing a completed state of a thin-film head for perpendicular magnetic recording according to an eleventh embodiment of the present invention. In the figure, 20 is a substrate, 21 is a thin film coil block,
22 is a first nonmagnetic film layer, 22A is a side surface, 23 is a thin film magnetic pole, and 24 is a second nonmagnetic film layer. Patent applicant Fujitsu Limited Patent agent Akira Aoki Patent attorney Kazuyuki Nishidate Patent attorney Yukio Uchida Akira Yamaguchi

Claims (1)

[Scope of Claims] 1. A substrate, a thin film coil block formed on the substrate, and a first nonmagnetic film layer formed in the center of the thin film coil block so as to have a side surface rising from the substrate. , a thin film magnetic pole formed along the side surface of the first nonmagnetic film layer, and a second nonmagnetic film layer formed on the substrate so as to cover the surface of the thin film magnetic pole. . A thin film head for perpendicular magnetic recording, wherein the first and second nonmagnetic film layers and the thin film magnetic pole are ground in a direction parallel to the substrate so that a part of the thin film magnetic pole is exposed. 2. The first non-magnetic film layer is formed by mask evaporation. 3. The thin film magnetic pole is formed along the side surface of the first non-magnetic film layer by mask evaporation.