JPS60169706A - 表面形状測定装置 - Google Patents

表面形状測定装置

Info

Publication number
JPS60169706A
JPS60169706A JP2448484A JP2448484A JPS60169706A JP S60169706 A JPS60169706 A JP S60169706A JP 2448484 A JP2448484 A JP 2448484A JP 2448484 A JP2448484 A JP 2448484A JP S60169706 A JPS60169706 A JP S60169706A
Authority
JP
Japan
Prior art keywords
light
photodetector
measurement surface
pattern
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2448484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH056643B2 (enrdf_load_stackoverflow
Inventor
Masahiro Aoki
雅弘 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Corp
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Optical Co Ltd filed Critical Olympus Corp
Priority to JP2448484A priority Critical patent/JPS60169706A/ja
Publication of JPS60169706A publication Critical patent/JPS60169706A/ja
Publication of JPH056643B2 publication Critical patent/JPH056643B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)
JP2448484A 1984-02-14 1984-02-14 表面形状測定装置 Granted JPS60169706A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2448484A JPS60169706A (ja) 1984-02-14 1984-02-14 表面形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2448484A JPS60169706A (ja) 1984-02-14 1984-02-14 表面形状測定装置

Publications (2)

Publication Number Publication Date
JPS60169706A true JPS60169706A (ja) 1985-09-03
JPH056643B2 JPH056643B2 (enrdf_load_stackoverflow) 1993-01-27

Family

ID=12139456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2448484A Granted JPS60169706A (ja) 1984-02-14 1984-02-14 表面形状測定装置

Country Status (1)

Country Link
JP (1) JPS60169706A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261017A (ja) * 1985-09-11 1987-03-17 Nec Corp タ−ゲツトアライメント装置
JPS62172208A (ja) * 1986-01-27 1987-07-29 Osaka Seimitsu Kikai Kk 光学的形状測定方法
JPS63250552A (ja) * 1987-04-08 1988-10-18 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
JPS63273066A (ja) * 1987-04-09 1988-11-10 ハイマン　オプトエレクトロニクス　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 赤外線検出器
JP2012021801A (ja) * 2010-07-12 2012-02-02 Mori Seiki Co Ltd 変位検出装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56156937A (en) * 1980-04-30 1981-12-03 Matsushita Electric Ind Co Ltd Optical pickup device
JPS57105831A (en) * 1980-12-19 1982-07-01 Matsushita Electric Ind Co Ltd Detector for optical position
JPS57208642A (en) * 1981-06-18 1982-12-21 Toshiba Corp Focus controller
JPS5848235A (ja) * 1981-09-17 1983-03-22 Toshiba Corp 光学ヘツド
JPS58105832A (ja) * 1981-12-15 1983-06-23 Tachikawa Spring Co Ltd 車両用シ−トの組付構造
JPS58193334U (ja) * 1982-06-19 1983-12-22 赤井電機株式会社 光ピツクアツプ
JPS5979104A (ja) * 1982-10-27 1984-05-08 Matsushita Electric Ind Co Ltd 光学装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56156937A (en) * 1980-04-30 1981-12-03 Matsushita Electric Ind Co Ltd Optical pickup device
JPS57105831A (en) * 1980-12-19 1982-07-01 Matsushita Electric Ind Co Ltd Detector for optical position
JPS57208642A (en) * 1981-06-18 1982-12-21 Toshiba Corp Focus controller
JPS5848235A (ja) * 1981-09-17 1983-03-22 Toshiba Corp 光学ヘツド
JPS58105832A (ja) * 1981-12-15 1983-06-23 Tachikawa Spring Co Ltd 車両用シ−トの組付構造
JPS58193334U (ja) * 1982-06-19 1983-12-22 赤井電機株式会社 光ピツクアツプ
JPS5979104A (ja) * 1982-10-27 1984-05-08 Matsushita Electric Ind Co Ltd 光学装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6261017A (ja) * 1985-09-11 1987-03-17 Nec Corp タ−ゲツトアライメント装置
JPS62172208A (ja) * 1986-01-27 1987-07-29 Osaka Seimitsu Kikai Kk 光学的形状測定方法
JPS63250552A (ja) * 1987-04-08 1988-10-18 Yasunaga Tekkosho:Kk 光学式傷変位計測装置
JPS63273066A (ja) * 1987-04-09 1988-11-10 ハイマン　オプトエレクトロニクス　ゲゼルシヤフト　ミツト　ベシユレンクテル　ハフツング 赤外線検出器
JP2012021801A (ja) * 2010-07-12 2012-02-02 Mori Seiki Co Ltd 変位検出装置

Also Published As

Publication number Publication date
JPH056643B2 (enrdf_load_stackoverflow) 1993-01-27

Similar Documents

Publication Publication Date Title
US4732485A (en) Optical surface profile measuring device
US5424834A (en) Optical displacement sensor for measurement of shape and coarseness of a target workpiece surface
JPS60169706A (ja) 表面形状測定装置
JPS6161178B2 (enrdf_load_stackoverflow)
JPS57149912A (en) Optical position detector
US5636189A (en) Astigmatic method for detecting a focussing error in an optical pickup system
JPS6370110A (ja) 距離測定装置
JPH0449887B2 (enrdf_load_stackoverflow)
JPS635208A (ja) 表面形状測定装置
JPS6283612A (ja) 変位変換器
JP2808713B2 (ja) 光学式微小変位測定装置
JPS60169707A (ja) 表面状態測定装置
JPH02192040A (ja) 光ピックアップ装置
JPS62212508A (ja) 面振れ測定法
JPS6172214A (ja) 焦点検出装置
JPS60210733A (ja) レンズ光軸検査装置
JPS61240103A (ja) 光学式微小変位計
JPH0968408A (ja) 光学式変位センサ
JPH0648399Y2 (ja) 非接触微小表面異常検出装置
JPH0634319A (ja) 光学式変位検出方法及び装置
JPH047807B2 (enrdf_load_stackoverflow)
JPH0323977B2 (enrdf_load_stackoverflow)
JPS62238403A (ja) 表面形状測定装置
JPH01165911A (ja) 光電式位置検出装置
JPH07113610A (ja) 物体表面の光軸方向変位検出装置